Piezo actuator valve

Ultra clean 대응：모두 메탈 구조를 채용
광범위는 유체 제어에 대응：미소 유량으로부터 대유량의 유체 제어가 가능
고온 대응 모델 구성：PV-1000 S/2000 S타입
RoHS 지령 적합

GHPV-1000

Flow Range	1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)
Flow Control Range	2 -100% F.S.
Valve Type	normally open / close
Input Signal	0 - 5VDC
Responce	less than 0.5 sec.
Operating Temperature	0 - 50 °C
Operating Diffential Pressure	MAX. 300 kPa(a)(max,42psi)
Pressure Resistance	1MPa
Leak Integrity	5×10-12Pa•m3(He)

Flow Range	10/20 LM
Flow Control Range	2 -100% F.S.
Valve Type	normally open / close
Input Signal	0 - 5VDC
Responce	less than 0.5 sec.
Operating Temperature	0 - 50 °C
Operating Diffential Pressure	MAX. 300 kPa(a)(max,42psi)
Pressure Resistance	1MPa
Leak Integrity	5×10-12Pa•m3(He)