HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

A concentration monitor ideal for high-precision measurements of low-concentration hydrofluoric acid, hydrochloric acid, and ammonia.

With a sensor that has excellent corrosion resistance, it can accurately and quickly measure low concentrations of hydrofluoric acid, hydrochloric acid as well as ammonia. This makes it ideal for single wafer cleaning and batch cleaning applications.

CONDChemical Concentration

DC24VTransmission OutputContact OutputRS-485Single ComponentLow Concentration

Сегмент: Semiconductor
Подразделение: Wet Process Control
Производитель: HORIBA Advanced Techno Co., Ltd.

Compatible with five types of measurements

Accommodating five types of measurements: HF concentration, HCl concentration, NH₃ concentration, conductivity, and temperature.  For HF concentration, HCl concentration, and NH₃ concentration, temperature compensation measurements are conducted based on their respective temperature characteristic data.

Accurate measurements with high reproducibility of low-concentration HF Concentration

Measurement is possible with high reproducibility within ±25ppm. The display resolution is equivalent to 0.5%, which is 5000ppm.  Catering to low-concentration requirements by providing ppm-level readings.

Abundant output options

Able to provide a wide range of outputs, not only for upper and lower concentration limits but also for concentration abnormalities and abnormal sample measurement outputs. (7 output points)

Analog output can be set arbitrarily within the concentration measurement range

It is possible to set the analog output range within the measurement range of 0-200%, allowing for a finer output of concentration values.

Concentration conversion function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics.  It is particularly suitable for the dilution management of low-concentration chemical solutions.

Product name

Low Concentration Type HF / HCl / NH3 Concentration Monitor

Model

HF-960M

Measurement rangeHF: 0 - 5000 ppm, HCl: 0 - 5000 ppm, NH3: 0 - 10000 ppm, Conductivity:0 - 50.0 mS/cm

Power supply

Rated voltage 24 V DC, 10 W (max)

Structure

Iindoor-use, panel installation type, panel case : ABS, terminal : PBT, Panel : IP65 dust and water proof structure

External dimensions

96 (W) x 96 (H) x 115 (D) mm, Case depth : approx.105 (when panel-mounted)

Weight

Approx. 550 g

Conforming standards

CE marking, FCC Part15

Compatible sensors

FS-10F series flow-type sensor

Schematics

Запросить информацию

У вас есть вопросы или пожелания? Используйте эту форму, чтобы связаться с нашими специалистами.

* Эти поля обязательны для заполнения.

Related products

514-22
514-22

1.41 mS/cm Conductivity Standard Solution

514-23
514-23

12.9 mS/cm Conductivity Standard Solution

9371-10D Conductivity Cell
9371-10D Conductivity Cell

Conductivity Cell for Ultra Pure Water Measurement

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HC-200F
HC-200F

Field-installation Type Fluoride Ion Concentration Meter

HC-200NH
HC-200NH

Field-installation type ammonia nitrogen meter

HC-300F
HC-300F

Field-installation Type Fluoride Ion Concentration Meter

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-200FL
HD-200FL

Field-installation type optical dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

HE-200R
HE-200R

Field-installation type electric resistivity meter (resistivity meter)

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

HE-300R
HE-300R

Field-installation type electric resistivity meter (resistivity meter)

HE-480C
HE-480C

Panel-mount type conductivity meter (conductivity meter)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount type conductivity meter (conductivity meter)

HE-480R
HE-480R

Panel-mount type resistivity meter (resistivity meter)

HE-480R(W)
HE-480R(W)

Resistivity Meter for Semiconductor Cleaning Processes

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount type 2-channel conductivity meter (conductivity meter)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount type conductivity meter

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW
HE-960RW

Panel-mount type 2-channel electric resistivity meter (resistivity meter)

HE-960RW-GC
HE-960RW-GC

2-Channel Resistivity Meter

HF-700A
HF-700A

Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide

HF-960H
HF-960H

HF / HCl Concentration Monitor