*1：Please contact us for supported gas type and full scale flow rate.
*2：Flow rate accuracy can be guaranteed down to 0.1 SCCM N₂ equivalent.
*3：This is guaranteed value under 25 ℃ and ≤ 1.0 × 10-3 Pa(A).
*4：This is guaranteed under our conditions using calibration N₂ gas. Setting time may vary depending on the gas type and operating environment conditions.
*5：Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec(±10 PSI/sec).
*6：EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.
