Optical Fiber Type Hot Phosphoric Acid Concentration Monitor
Keywords: 3D NAND, SiN(Silicon nitride), Etching, Hot phos(Hot phosphoric acid),
In 3D NAND manufacturing process, dozens of layers of SiO2 and SiN are deposited, and the SiN layer is selectively removed using hot phos.
In this process, the desired etching rate can be achieved by controlling the concentration and temperature of the chemical solution.
Previous products have difficulty to measure high temperature chemicals, but the CS-620F is able to measure at high temperatures up to 170 C degrees.
Continuous Measurements are made using absorption spectroscopy, which requires less maintenance and fewer consumables versus other methods.
High concentration phosphoric acid up to 92% can be measured
No cooling mechanism and cooling time is needed.
Direct measurement is possible without cooling high-temperature phosphoric acid (140 to 170°C) in the circulation line.
PFA is used in the sample wetted area to reduce contamination risk.
Contributes to significant reduction in equipment downtime by adopting semi-annual background correction cycles.
Contributes to faster concentration feedback control by updating measured data every 3 seconds
▶ Measurement results
The sample (actual solution) measured for 1 hour shows exellent stability.
▶ Measurement conditions
Measurement Cycle: every 3 seconds Measurement time: 1 hour Moving average: 16 times
Sample concentration (Initial Sample Concentration) H3PO4: 92.2% H2O: 7.8% Sample temperature: 141°c
High Precision, High Stability
Chemical Concentration Monitor
Fiber Optic Type Chemical
Dissolved Oxygen Monitor
in Low Concentration
|Product name||CHEMICAL SOLUTION MONITOR|
|Measurement principle||Absorption spectroscopic method|
|Calculation principle||Temperature compensation type multivariate analysis|
|・ Repeatability is defined by maximum error from average (1 hour).|
・ In the case of low temperature measurement (140°C) and high temperature measurement (170°C) with the same chemical,
there is possibility of discrepancy (Maximum +/- 0.30%).
|1) Measurement interval: Approx. 3 sec. (minimum)|
2) Moving average: 16 times
|Connection fitting size||1 inch or 3/4 inch|
|Sample condition||Sample temperature: 140 to 170°C|
Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour)
Input pressure: 0.2 MPa or less
Pressure fluctuation: 0.02 MPa or less
Flow rate: 1 to 30 L/min
|Air(for operation and purge)||Connection port: 4 mm O.D. quick joint|
Pressure: 0.2 MPa ± 0.02 MPa
|Power source||100 to 230 V AC (Single-Phase), 50/60 Hz|
|Power consumption||Approx.85 VA (Transient electric current at the time of the start is excluded)|
|Communication||Parallel I/O, RS-232C, Analog output|
|Dimension||(Monitor) 200 (W) × 308 (D) × 78 (H) mm|
(Lamp unit) 200 (W) × 262 (D) × 100 (H) mm
(Sample cell) 240 (W) × 209 (D) × 205 (H) mm
|Weight||(Monitor) Approx.3.6 kg|
(Lamp unit) Approx.2.8 kg
(Sample cell) Approx.3.0 kg
|Ambient temperature||(Monitor, Lamp unit) 20 to 30°C|
(Optical fiber, Sample cell) 20 to 100°C
* Sudden temperature change should be avoided, within +/- 1°C/1hour
|Ambient humidity||(Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)|
|Slanting angle of installation||(Monitor, Lamp unit) Within +/-1 degree|
(Sample cell) Please install so that air bubbles do not stay up.
|Optical fiber||Length: 5 m, Bend radius: R150 mm|
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