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FPD Manufacturing Process

FPD Process

HORIBA have fostered various analysis, control, and evaluation technologies for the silicon semiconductor manufacturing processes; a field where strict specifications must be satisfied.

HORIBA makes full use of these technologies in the field of FPD processing. These technologies provide manufacturing support for various types of processes, including gas and liquid medication composition, the detection of particles on masks and thin film measurement. These technologies are also being applied to high-performance analytical and control equipment that supports the research and development of PDPs, organic EL, FEDs, and the diversifying and evolving field of FPDs.

FPD Manufacturing Process

Browse Products

51 series
mehr 51 series

Explosion-proof Gas Analyzer

CS-100 Series
mehr CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
mehr CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
mehr CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-700
mehr CS-700

High Precision, High Stability Chemical Concentration Monitor

EV 2.0 Series
mehr EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

FS-3000
mehr FS-3000

Thermal Flow Splitter

GD-Profiler 2™
mehr GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

IR-400
mehr IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

IT-480 series
mehr IT-480 series

High-Accuracy Infrared Thermometers [Stationary type]

LabRAM HR Evolution
mehr LabRAM HR Evolution

Confocal Raman Microscope

LSC series
mehr LSC series

Compact Baking System

LU Series
mehr LU Series

Liquid Auto Refill System

MICROPOLE System
mehr MICROPOLE System

Compact Process Gas Monitor

Partica LA-960V2
mehr Partica LA-960V2

Laser Scattering Particle Size Distribution Analyzer

Process
mehr Process

Process Analyzer System

SEC-E Series
mehr SEC-E Series

Mass Flow Controller

SEC-N100 Series
mehr SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X
mehr SEC-Z500X

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
mehr SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

UVISEL 2 VUV
mehr UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

VA-5000 / VA-5000WM Series
mehr VA-5000 / VA-5000WM Series

Multi-Component Gas Analyzer

VC Series
mehr VC Series

Direct Liquid Injection System

XGT-7200
mehr XGT-7200

X-ray Analytical Microscope

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