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FPD Manufacturing Process

FPD Process

HORIBA have fostered various analysis, control, and evaluation technologies for the silicon semiconductor manufacturing processes; a field where strict specifications must be satisfied.

HORIBA makes full use of these technologies in the field of FPD processing. These technologies provide manufacturing support for various types of processes, including gas and liquid medication composition, the detection of particles on masks and thin film measurement. These technologies are also being applied to high-performance analytical and control equipment that supports the research and development of PDPs, organic EL, FEDs, and the diversifying and evolving field of FPDs.

FPD Manufacturing Process

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51 series
51 series

Explosion-proof Gas Analyzer

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

EV 2.0 Series
EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

FS-3000
FS-3000

Thermal Flow Splitter

GD-Profiler 2™
GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

IR-400
IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

IT-480 series
IT-480 series

High-Accuracy Infrared Thermometers [Stationary type]

LabRAM HR Evolution
LabRAM HR Evolution

Confocal Raman Microscope

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

Partica LA-960V2
Partica LA-960V2

Laser Scattering Particle Size Distribution Analyzer

Process
Process

Process Analyzer System

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

UVISEL 2 VUV
UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

VA-5000 / VA-5000WM Series
VA-5000 / VA-5000WM Series

Multi-Component Gas Analyzer

VC Series
VC Series

Direct Liquid Injection System

XGT-7200
XGT-7200

X-ray Analytical Microscope

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