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FPD Manufacturing Process

FPD Process

HORIBA have fostered various analysis, control, and evaluation technologies for the silicon semiconductor manufacturing processes; a field where strict specifications must be satisfied.

HORIBA makes full use of these technologies in the field of FPD processing. These technologies provide manufacturing support for various types of processes, including gas and liquid medication composition, the detection of particles on masks and thin film measurement. These technologies are also being applied to high-performance analytical and control equipment that supports the research and development of PDPs, organic EL, FEDs, and the diversifying and evolving field of FPDs.

FPD Manufacturing Process

Browse Products

mehr 51 series

Explosion-proof Gas Analyzer

mehr CS-100 Series

Stand-alone Type Chemical Concentration Monitor

mehr CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

mehr CS-600F

Fiber Optic Type Chemical Concentration Monitor

mehr CS-700

High Precision, High Stability Chemical Concentration Monitor

mehr EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

mehr FS-3000

Thermal Flow Splitter

mehr GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

mehr IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

mehr IT-480 series

High-Accuracy Infrared Thermometers [Stationary type]

mehr LabRAM HR Evolution

Confocal Raman Microscope

mehr LSC series

Compact Baking System

mehr LU Series

Liquid Auto Refill System

mehr Micropole System

Residual Gas Analyzer

mehr Partica LA-960V2

Laser Scattering Particle Size Distribution Analyzer

mehr Process

Process Analyzer System

mehr SEC-E Series

Mass Flow Controller

mehr SEC-N100 Series

Digital Mass Flow Controller

mehr SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

mehr SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

mehr UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

mehr VA-5000 / VA-5000WM Series

Multi-Component Gas Analyzer

mehr VC Series

Direct Liquid Injection System

mehr XGT-7200

X-ray Analytical Microscope

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