Semiconductor Page Heading

Injection System

Semiconductor manufacturing equipment is increasingly demanding more compact liquid material vaporization systems, and many direct vaporization systems have been adopted to meet these needs. In-house mass flow controllers/meters are used in the flow control section for carrier gas and liquid materials. HORIBA's unique system lineup is tailored to meet customers' requirements.
Liquid material and carrier gas flow rates are controlled by a digitally controlled mass flow controller/meter and introduced into a dedicated vaporization section. In the vaporizer, the liquid material and carrier gas are efficiently given heat for continuous vaporization. The simple structure enables the construction of a liquid material vaporization system that is both compact and lightweight.

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

Informationsanfrage

Sie haben Fragen oder Wünsche? Nutzen Sie dieses Formular, um mit unseren Spezialisten in Kontakt zu treten.

Corporate