CS-900F Fiber-Optic Type Non-Contact Chemical Concentration Monitor

Fiber-Optic Type Non-Contact Chemical Concentration Monitor

Non-contact, stable concentration measurement for semiconductor process chemicals!
The CS-900F adopts a non-contact measurement method that can be implemented simply by mounting the cell unit on to piping. This approach helps reduce the risk of chemical leakage and contamination.
We also expanded the range of supported wet process chemicals, further enhancing stability and versatility as the flagship model in the CS Series.

Segment: Semiconductor

Abteilung: Wet Process Control

Produktionsfirma: HORIBA Advanced Techno Co., Ltd.

Compact design with stable measurement performance
By introducing fiber-optic cable, we reduced the volume of the cell unit installed inside the customer’s equipment by approximately 60%* compared with previous models, enabling stable measurements with reduced susceptibility to external disturbances.

Expanded range of measurable wet process chemicals
By expanding the wavelength range to about three times of previous models*, it supports a wider variety of wet process chemicals. High-temperature chemical solutions up to 80°C can be measured directly with no pre-treatment, contributing to safer operation.

Safety and process optimization through non-contact measurement
The CS-900F uses a non-contact method that requires simply mounting the cell unit onto piping, reducing the risk of chemical leaks and contamination. It contributes to safer operation and reduces chemical consumption.

* Comparison with HORIBA’s previous models. Actual results may vary depending on usage and conditions.

Product name		Fiber-Optic Type Non-Contact Chemical Concentration Monitor
Model		CS-900F
Measurement principle		Absorption spectroscopic method
Calculation		Temperature compensation multivariate analysis
Measurement range・Repeatability （Unit:mass%）	Model	Component	Measurable range	Repeatability	Analog output range
	CS-900F-1-1-1P-1P25P5-AA	NH₃	0.00 to 1.20	±0.05	0.00 to 10.00
		H₂O₂	0.00 to 5.50	±0.10	0.00 to 10.00
		H₂O	93.3 to 100.0	±1.0	ー
	CS-900F-1-1-1P-P8P8-11	NH₃	0.00 to 0.80	±0.03	0.00 to 1.00
		H₂O₂	0.00 to 0.80	±0.03	0.00 to 1.00
		H₂O	98.4 to 100.0	±0.2	ー
Conditions of measurement		1） Measurement interval : Approx. 5 sec 2） Moving average: 16 times
Tube		PFA tube 1 inch or 3/4 inch (Avoid the black part of the anti-static type PFA tube) Note: The surface of the pipe must be free of scratches, dents, and cloudiness.
Sample condition		Sample temperature: 20 to 80 ℃ Atmospheric temperature, Sample temperature fluctuation: ±1 ℃ (period of time: 1 hour) Sample pressure less than 0.2 MPa (G) Sample pressure fluctuation: within 0.02 MPa Note: Air bubble in sample solution effect on measurement so please flow sample to prevent from bubble remaining PFA tube.
Power source		24 V DC
Power consumption		Approx. 40 W (Transient electric current at the time of start is excluded)
Weight		Main unit: Approx. 5.8 kg Cell unit: Approx. 1.4 kg
Dimension		Main unit: 217 (W) X 290 (D) X 173 (H) mm (Excluding projections) Cell unit: 186 (W) X 142 (D) X 83 (H) mm (Excluding projections)
Slanting angle of installation		Main unit within ±1°
Expected lifespan of light source		5 years
Fiber-optic cable		Standard length: 5 m, Bend radius: R150 mm

CS-900F

Fiber-Optic Type Non-Contact Chemical Concentration Monitor

Compact design with stable measurement performance

Expanded range of measurable wet process chemicals

Safety and process optimization through non-contact measurement

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