PLIMA-LED

Micro Photoluminescence Imaging System

PLIMA-LED is a next-generation photoluminescence solution that integrates PL, AOI, and spectral analysis into a single platform, enabling precise optical inspection, yield analysis, and seamless integration with manufacturing execution systems.

Segment: Semiconductor

Abteilung: Metrology

Integrated PL, AOI, and Spectrum Analysis

PL Image
- Detection Items:
  - Intensity: High/Low/No Signal
  - Chip Luminance: Average/Total
  - Standard Deviation/Coefficient of Variation (CV)
- Chip Size ≥ 10 μm, Pitch ≥ 20 μm, Gap ≥ 3.5 μm
AOI
- Detects surface defects, cracks, pattern misalignment, and positioning errors
  Minimum detectable chip size: 1.5 μm
  Achieves composite judgment based on AOI and PL information
Spectrum Analysis
- Key spectrum parameters:
  - Wp (Peak Wavelength)
  - FWHM (Full width at half maximum)
  - II (Integrated intensity), Ip (Peak intensity)
- Pitch Resolution
  - 0.5 mm (4-inch wafer), 1.0 mm (6-inch wafer), 2.0 mm (8-inch wafer)

General Specification

General	Scan method	Spiral scan with 1800 RPM rotation and linear motion
	Wafer	4＂, 6＂
	Stage	XY-axis Linear stage, Z axis stage R stage with 1800RPM (Max)
Measurement	Objective Lens	5X, 10X, 20X, 50X Laser excitation without objective lens (Option)
	Image Camera	Resolution : 2048 x 2048 (4M pixel) Pixel size : 5.5 um x 5.5 um
	Optical Fiber	400 um bundle core
	PMT	Port 1 (PMT 1) : PL Inspection with bandpass filter Port 2 (PMT 2) : Reflection (Scattering)
	Spectrometer	Groove Density : 300 lines/ mm Spectral range (nm) : 210 – 2100 Pixel (ea) : 2048 x 64 Dispersion : 0.44 nm / pixel
Excitation Source		50 mW 375 nm Laser (for Blue, Green LED) 50 mW 532 nm Laser (for Red LED)
Measurement speed			4inch	6inch
		PMT Mapping (2 channel at same time, 5um step)	8pcs / 1H	6pcs / 1H
		PMT Mapping & Spectrum mapping (Optional measurement)	7 pcs / 1H (PMT : 5um / Spectrum : 2mm )	7 pcs / 1H (PMT : 5um / Spectrum : 4mm )
		Micro Spectrometer mapping	3,600 points / hour Step : Min. 2um
Dimension (mm)		2000 (w) x 1400 (d) x 2000 (h)

Utility

Operating Environment	Place	Clean Room (class ~ 10000)
	Temperature	15 ~ 35° C
	Humidity	<85% RH with no condensation
Utility	Dimensions	1500 mm x 2000 mm x 2300 mm, incl. HEPA filter
	Weight	1760 Kg
	Input Voltage	220V±10% 50/60Hz single phase
	Full load current	47A
	Vacuum1	40L/min, -80KPa Pipe size : Outer diameter 6mm
	Vacuum2	120L/min, -40KPa Pipe size : Outer diameter 6mm
	Air	90L/min, 0.5MPa Pipe size : Outer diameter 6mm

PLIMA-LED

Micro Photoluminescence Imaging System

Integrated PL, AOI, and Spectrum Analysis

General Specification

Utility

Informationsanfrage