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Technical Journal "Readout" open open
  • Masao Horiba Awards Research Articles
  • Readout No. E54 - Microplastics and Nanoplastics: Analysis and Method Development
  • Readout No. E53 - 2019 Masao Horiba Awards - Advanced Analytical and Measurement Technologies for Efficient Control System to Maximize the Performance of Electric Power and Batteries Usage
  • Readout No. E52 - Green Innovation for Marine Shipping Industry
  • Readout No. E51 - 2018 Masao Horiba Awards Advanced analytical and measurement technologies in semiconductor manufacturing processes
  • Readout No. E50 - Low-Carbon Society and Environmental Improvement
  • Readout No. E49 - Photonic Instrumentation in Life Science
  • Readout No. E48 - Water Measurement Experts
  • Readout No. E47 - Application for Semiconductor Manufacturing Process
  • Readout No. E46 - New Development for Automotive Test Systems
  • Readout No. E45 - Application Technology in Analysis
  • Readout No. E44 - Contribution of Diagnostics to Total Medical Care/Healthcare
  • Readout No. E43 - Watching the Environmental and Society with Measurements
  • Readout No. E42 - More Efficient Testing on Automotive Development, Improving the Accuracy of Fuel Consumption Measurement
  • Readout No. E41 - Application
  • Readout No. E40 - Application
  • Readout No. E18 - EUROPE
  • Readout No. E17 - AMERICA
  • Readout No. E16 - Chinese (Asia)
  • Readout No. E15 - Technologies for HORIBA STEC
  • Readout No. E14 - Masao HORIBA Awards"Measurement of Bioparticles" and "Measurement of Internal Combustion"
  • Readout No. E13 - Technologies for Automotive Testing
  • Readout No. E12 - Masao Horiba Awards "X-ray Analysis Technology"
  • Readout No. E11 - The Second Masao Horiba Awards
  • Readout No. E10 - Environmental Analysis Technologies for the Management of Global Environment and the Development of Industry
  • Readout No. E09 - The First Dr.Masao Horiba's Award and the 50th Anniversary Products
  • Readout No. E08 - Products and Technologies of HORIBA ABX
  • Readout No. E07 - Products and Technologies of Jobin Yvon HORIBA Group
  • Readout No. E06 - 50th Anniversary of HORIBA, Ltd. Products and Technology of HORIBA Group
  • Readout No. E05 - Semiconductor Instruments
  • Readout No. E04 - Hematology Instruments
  • Readout No. E03 - Paticulate Matter
  • Readout No. E02 - The Technolgy Alliance for X-ray Analysis
  • Readout No. E01 - the Analysis of the Global Environment
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    Technical Journal "Readout"
    • Masao Horiba Awards Research Articles
    • Microplastics and Nanoplastics: Analysis and Method Development
    • 2019 Masao Horiba Awards - Advanced Analytical and Measurement Technologies for Efficient Control System to Maximize the Performance of Electric Power and Batteries Usage
    • Green Innovation for Marine Shipping Industry
    • 2018 Masao Horiba Awards Advanced analytical and measurement technologies in semiconductor manufacturing processes
    • Low-Carbon Society and Environmental Improvement
    • Photonic Instrumentation in Life Science
    • Water Measurement Experts
    • Application for Semiconductor Manufacturing Process
    • New Development for Automotive Test Systems
    • Application Technology in Analysis
    • Contribution of Diagnostics to Total Medical Care/Healthcare
    • Watching the Environmental and Society with Measurements
    • More Efficient Testing on Automotive Development, Improving the Accuracy of Fuel Consumption Measurement
    • Application
    • Application
    • EUROPE
    • AMERICA
    • Chinese (Asia)
    • Technologies for HORIBA STEC
    • Masao HORIBA Awards"Measurement of Bioparticles" and "Measurement of Internal Combustion"
    • Technologies for Automotive Testing
    • Masao Horiba Awards "X-ray Analysis Technology"
    • The Second Masao Horiba Awards
    • Environmental Analysis Technologies for the Management of Global Environment and the Development of Industry
    • The First Dr.Masao Horiba's Award and the 50th Anniversary Products
    • Products and Technologies of HORIBA ABX
    • Products and Technologies of Jobin Yvon HORIBA Group
    • 50th Anniversary of HORIBA, Ltd. Products and Technology of HORIBA Group
    • Semiconductor Instruments
    • Hematology Instruments
    • Paticulate Matter
    • The Technolgy Alliance for X-ray Analysis
    • the Analysis of the Global Environment
    Readout No. E41 - Application

Technical Journal "Readout"

Readout

READOUT is a technical journal issued by HORIBA. The name "READOUT" represents our sincere desire - helping readers understand the company's proprietary products and technologies by offering information about them. Since its first issue in July 1990, the journal has been published biannually.

Readout No. E41

Application

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1.53 MB
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Semiconductor Device Progress and Latest Mass Flow Controller Trends
Author: Tetsuo SHIMIZU – The Japanese semiconductor device industry has been losing momentum, and companies in the industry are making efforts to rebuild their profit structures. However, if we look at the industry worldwide, it still has momentum. Production output of semiconductors increased by approximately 60% during the 12 years between 200 and 2012, oligopolies are forming, and 3 major companies make up about 60% of total investment. Technologies for smaller semiconductor devices are emerging, and immersion double patterning exposure, EUV exposure, and DSA technologies are being researched for manufacturing semiconductor devices at the 10-nm level. Also, a 450-mm wafer consortium has been formed, mostly with members from Europe and the US, which is starting to investigate the practical use of large-diameter wafers. As technologies are refined and the industry considers moving toward large-diameter wafers, the requirements for fluids and gases used during film depositing, and etching, etc. are becoming stricter. This paper will discuss the latest mass flow controller (MFC) trends that go along with the industry’s move toward smaller semiconductor devices and large-diameter wafers.
open
PDF
2.28 MB
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The Trends in Environmental Regulations in China
Author: Hu LI – Problems with environmental pollution are emerging along with the rapid economic growth in China, and measures to protect the environment are becoming increasingly important. The 11th Chinese Five-Year Environmental Protection Plan (2006-2010) set total emission regulation targets for pollutants, and China achieved those goals within that period. The 12th Chinese Five-Year Environmental Protection Plan (2011-2015) contains even more environmental regulations, including environmental measures in various fields, such as air quality, water quality, soil quality, and solid waste. A Chinese national strategy has also been created to help the environmental industry evolve over the long term. This paper will mainly cover new environmental regulations in China since 2011. In the near future, environmental regulations and environmental preservation technologies and know-how that have been used in developed countries will probably be useful in the environmental protection field in China.
open
PDF
3.93 MB
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Analysis of the Chromophoric Dissolved Organic Matter in Water by EEMs with HOBIBA-Jobin Yvon Fluorescence Instrument called “Aqualog”
Author: Adam M. GILMORE Stephen M. COHEN – Water quality is one of the most significant global environmental concerns, making it one of the most impor tant areas of research for HORIBA’s fluorescence instruments. This article describes how our Fluorolog and FluoroMax spectrofluorometers and FluorEssence analysis software facilitate sensitive identification and quantification of natural and man-made sources of Colored Dissolved Organic Matter (CDOM) components important to water quality. The article focuses on the method of Excitation-Emission Matrix (EEM) which simultaneously measures the excitation (absorbance) and emission spectra for all fluorescent components in a water sample. The article emphasizes the most important aspect of the EEM method, which is the accurate correction of both the instrument’s spectral response and the influence of the light-absorbance properties of the sample as required for component identification and quantification. The future of water-quality fluorescence analysis is discussed in light of recognized potential applications and recent efforts to institute international standards for EEM methodology.
open
PDF
1.7 MB
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Vapor Concentration Control System for Bubbling Method
Author: Masakazu MINAMI – For the semiconductor manufacturing process that involves the liquid and solid precursors, a stable and reliable vapor delivery system is usually a critical portion to the success of the process. Moreover, it could offer the capability of monitor and control the vapor concentration for bubbling method, in addition to the vaporization. This paper introduces a new Vapor Concentration Control (VCC) system that combines the bubbling vaporization technology and vapor concentration control capabilities to achieve an intelligent solution in utilizing liquid and solid precursors.
open
PDF
2.14 MB
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Development to Ultra Thin MFC
Author: Tadahiro YASUDA – I introduce the efforts of miniaturization of the Mass Flow Controller (see Figure 1). It also leads to cost reduction solution and energy saving solutions, and high performance by reducing the unnecessary part. It is thought to be useful for new needs in the semiconductor process gas control. I introduce development of thinner mass flow controller which is main product of HORIBA STEC.
open
PDF
4.43 MB
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Emissions and Fuel Economy Measurement System Using Intermittent Sampling CVS for PHEV
Author: Yoshinori OTSUKI – Recently, Plug-in Hybrid Electric Vehicles (PHEVs) attract attention while the reduction of the consumption of the fossil fuel is demanded. On the other hand, high Dilution Factors (DFs) and low concentrations of gaseous components in the Constant Volume Sampling (CVS) are imposed by the intermittent operation of the engine in the PHEV. Such a dilution condition causes a numerical error of DF by the assumption of negligible ambient components and an analysis error of gaseous components. New emission measurement method which provides intermittent sampling synchronized with engine operation mode has been investigated in this study. The results showed the ability of proposed system to improve emissions and fuel economy measurement accuracy by increasing gaseous concentrations in the CVS system.
open
PDF
2.19 MB
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Simplified Analysis for Soil Samples with Compact Water Quality Meter <LAQUAtwin> - Measurement of exchangeable calcium ion and potassium ion in soil -
Author: Keiko KUWAMOTO – Exchangeable calcium ion (Ca2+) and potassium ion (K+) extracted with 1 mol/L ammonium acetate (NH4OAc) solution were measured with Atomic Absorption Spectroscopy (AAS) and Inductively Coupled Plasma Optical Emission Spectrometry (ICP-OES). Simple and quick measurements by AAS or ICPOES are difficult in the field because these are large analytical instruments. A simplified analysis was tried with the compact water quality meter <LAQUAtwin> (Ion Selective Electrode; ISE). In case of measurement of Ca2+ and K+ with ISE methods, the high NH4OAc concentration solution produced inaccurate results due to a potential difference shift. In this report, LAQUAtwin meters are used for soil sample measurements. The procedure used herein proves that Ca2+ and K+ are easily measurable using this procedure with the ISE methodology.
open
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4.07 MB
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Inspection and Calibration for pH or Conductivity Meters
Author: Chihiro NAKAMURA – It is important for pH meter and Conductivity meter to provide proper operation, inspection and calibration in order to keep high reliability. Various regulation including Japanese Pharmacopoeia (16 revision) is requesting that Standard items such as stability must be confirmed with objective evidence when calibration is made. A digital simulator can inspect main unit and electrode individually. Therefore a digital simulator can inspect whether or not a main unit is working properly. Also we could rapidly found out 15% of electrodes had malfunction when we visited research laboratory in the university. This shows that this method is effective for inspection and calibration.
open
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1.6 MB
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Rotary Residual Chlorine Meter HR-200RT RA-30
Author: Kohei TANAKA; Kazuhiro IRIE – In Japan, you drink water straight from the tap, damage is not necessarily done to the body. That is because advanced water disposal is performed in the water treatment plant. The Water Treatment & Environment product of HORIBA including a rotary residual chlorine meter supports those water disposals. In the water treatment plant, the processing using chlorine is indispensable processing for sterilization. There are also some methods of measuring residual chlorine and each has the feature. In this paper, firstly, processing in a water treatment plant is introduced. Next, the measurement principle of residual chlorine and the feature of residual chlorine meters are introduced.
open
PDF
5.97 MB
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Handheld X-ray Fluorescence Analyzer MESA-600/630
Author: Tetsuya TAKIMOTO – Recently, handheld X-ray fluorescence (XRF) analyzers have been used widely in the field of on-site elemental analysis. Handheld XRF analyses can provide rapid material confirmation, alloy grade identification and field screening of outdoor samples. MESA-600/630 has been greatly improved the usability by new user interface, a large touch screen, and a longer-life battery. Therefore, this analyzer can be applied more flexible to various analytical fields. Additional empirical calibrations using optional software make particular applications such as quality control of special alloy and measurement of plating film thickness. In this article, we introduce features, functions and applications for MESA-600/630.
open
PDF
5.79 MB
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New Application and Recent Improvement of Raman Spectroscopy of Raman Spectroscopy
Author: Yasushi NAKATA; Emmanuel FROIGNEUX – Raman spectroscopy have been progressed with new technologies applied to specific applications. By combining microscopy, its sensitivity has been increased as several orders in these decades. Especially, some new technologies for Raman imaging has been developed and will open new analytical world. In this report, we explain new Raman application of pharmaceutics, carbon materials (graphen and carbon nanotube), and lithium ion battery. In these, Raman analytical technology used in HORIBA products are also introduced.
open
PDF
3.29 MB
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The LA-960 Laser Diffraction/Scattering Particle Size Distribution Analyzer
Author: Makoto UMEZAWA; Hirosuke SUGASAWA – The LA-960 particle size distribution measurement instrument with laser, diffraction/scattering is a next-generation model that was developed as the highest-end model of its type. The LA-960 is based on the LA-950V2 hardware design, which has a high level of design maturity and has been popular in the past, and has significantly improved analysis capabilities compared to that model. The following 5 points are features of the LA-960. 1. Improved minimum particle size measurement accuracy and reproducibility 2. Increased maximum measurable particle size 3. Introduction of the latest calculation algorithms 4. New software GUI 5. Data compatibility with the old model We would like to discuss the features of the instrument in detail. We will also provide actual measurement examples to show instrument performance.
open
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2.24 MB
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Technology That Uses Light to Measure Powder Size - Why Measure Particle Diameter? To What Point Can It Be Measured? -
Author: Satoru TANAKA; Satoko ISHIHARA; Yoko SHINOZAKI; Kyoko MITSUNARI; Makoto OHISHI – The Japanese character for “powder” is made up of two parts that mean “separate” and “rice”. Originally, grains like rice were crushed into small pieces. There are many types of powder around us, not limited to the “powder” that referred to crushed grains a long time ago. Some types of powder are suspended powders that are deemed to be harmful, such as fine particulate matter 2.5 (PM2.5). More familiar types of powder would be in the form of medicine or food. We get benefits from many types of powders in our daily lives, from flour to home appliances and even space-related technologies.
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