Eco-Friendly Products
Development of Long-Life, Energy Conservation “Eco-Friendly Products”
In order to provide customers with products that reflect consideration of their life cycles, such as long those with usable lives and minimization of energy consumption, we have positioned certain products as “eco-friendly products” if they satisfy certain standards we have adopted; we use this description when developing and marketing such products. With social and economic matters such as rising energy costs in the background, we use quantitative measurement to determine to what extent products reduce energy requirements or materials used. With our “eco-friendly products,” we aim to achieve a 25% reduction compared to conventional models.
Eco-Friendly Product: HORIBA, Ltd.
Gloss Checker IG-340
A handy gloss meter, the gloss checker IG-340 measures surface luster or brightness ("gloss") whenever and wherever you need it, making it easy to evaluate and control "gloss," an important surface attribute that adds value to the appearance of all sorts of goods and shapes.
Compatible with its predecessor model IG-320, the IG-340 features a renewed design with simple operation buttons and an eye-friendly LCD screen to allow for more intuitive operation.
With revamped circuit design, which encompasses the control of the optics system, and a change of power source from one 9V battery to two AA batteries, the IG-340’s power consumption has been successfully reduced by approximately 44.4% compared to its predecessor. Furthermore, for ergonomic grip design and lighter weight, a new mold was designed exclusively for the IG-340 to cut its mass by 32.1% from the IG-320.
Eco-friendly product: HORIBA STEC, Co., Ltd.
Capacitance Manometer VG-527
The capacitance manometer VG-527 measures pressure at semiconductor manufacturing processes, especially deposition processes such as CVD*1 and ALD*2. Because of the low vapor pressure materials used in these deposition processes, the sensor temperature must be accurately adjusted to prevent condensation and thermal decomposition of the material in order to maintain stable pressure measurements.
The VG-527 comes with an improved heat-insulating/dissipation structure, which helps to increase the accuracy of sensor temperature adjustment. The temperature adjustment range up to 200°C can be specified according to the material characteristics, extending the sensor life and significantly reducing maintenance costs.
*1: Chemical vapor deposition: vapor-deposition method for forming thin films of various substances
*2: Atomic layer deposition: thin-film formation technology utilizing a continuous gas-phase chemical reaction
Eco-friendly product: HORIBA Advanced Techno Co., Ltd.
Chemical Concentration Monitor CS-900
HORIBA's chemical concentration monitor CS-900 performs measurement of chemical concentration in the cleaning process, a key process for semiconductor manufacturing.
Zero contamination is made possible by directly connecting a sensor externally to the PFA piping.
Completely upgrading the optical system, the equipment has been made more compact while retaining the original specifications of CS-600F and the CS-900 has a reduced footprint within the semiconductor wafer cleaning equipment.
