Semiconductor Manufacturing Process

Providing Solutions At Every Stage Of The Semiconductor Manufacturing Process From Start To Finish

Semiconductors are the key evolving components in the industry today. HORIBA has kept its sights keenly focused on this micro world. Specialists in each field; HORIBA have pursued proprietary engineering projects in a wide range of areas that include evaluation and analysis, purity of ultra-pure water, composition of liquids and gases, and more broadly, environment and safety. With our sights set clearly on the overall process, we have developed a line-up of analytical equipment, fluid control and measuring systems tailored to every stage of the semiconductor manufacturing process in response to stringent quality control requirements. In all stages, from materials evaluation through to final inspection, HORIBA products help maintain high efficiency in the manufacture of leading-edge electronics devices.

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TPNA-500 Automatic Total Nitrogen/Phosphorus Monitoring
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Automatic Total Nitrogen/Phosphorus Monitoring

Automatic COD Monitor CODA-500
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Automatic COD Monitor

Highly Sensitive Silica Monitor SLIA-300
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Highly Sensitive Silica Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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SPM Monitor

XGT-9000
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X-ray Analytical Microscope

In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
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In-line Sensor & Auto Range Switching Concentration Monitor

Fiber Optic Type Chemical Concentration Monitor CS-600F
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Fiber Optic Type Chemical Concentration Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

Real Time Interferometric Process Monitor LEM-CT-670-G50
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Real Time Interferometric Process Monitor [CCD] Laser Interference Camera

TMAH Conductivity Meter HE-960TM
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TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

Micro Volume pH Monitor UP-100
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Micro Volume pH Monitor

Hydrofluoric Acid Monitor CM-200A/210A
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Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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HF/HNO3 Monitor

Industrial resistivity meter HE-480R(W)
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Industrial resistivity meter

Industrial pH meter HP-480(W)
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Industrial pH meter

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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Stand-alone Type Chemical Concentration Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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FPM Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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BHF Concentration Monitor

Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M
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Low Concentration Type HF/HCl/NH3 Concentration Monitor

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S
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Wide range TMAH Concentration Monitor

HF / HCl Concentration Monitor HF-960H
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HF / HCl Concentration Monitor

Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC
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Carbon Sensor Conductivity Meter (High concentration type)

Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
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Carbon Sensor Conductivity Meter (Low concentration type)

2-Channel Resistivity Meter HE-960RW-GC(W)
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2-Channel Resistivity Meter

Carbon Sensor Resistivity Meter HE-960R-GC(W)
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Carbon Sensor Resistivity Meter

SC-1 Monitor, CS-131
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High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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Semiconductor process monitoring for SC-2 process

Citric Acid Monitor HE-960CA
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Citric Acid Monitor

Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC
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Carbon Sensor Conductivity Meter

High Resistivity Meter HE-Z-100T
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High Resistivity Meter

High Precision, High Stability Chemical Concentration Monitor CS-700
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High Precision, High Stability Chemical Concentration Monitor

Dissolved Oxygen Monitor in Low Concentration HF HD-960L
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Dissolved Oxygen Monitor in Low Concentration

2-channel High Precision HF Concentration Monitor HF-SP-CU
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2-channel High Precision HF Concentration Monitor

Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M
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Dissolved Ozone Monitor

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S
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High Precision TMAH Concentration Monitor

XGT-7200
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X-ray Analytical Microscope

Ammonia Nitrogen Meter HC-200NH
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Ammonia Nitrogen Meter

HD-200FL (Four-Wire Analyzer)
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Industrial dissolved oxygen analyzer (Four-Wire Analyzer)

HU-200SS (Four-Wire Analyzer)
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Industrial MLSS meter (Four-Wire Analyzer)

HD-300 (Two-Wire Transmitter)
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Industrial dissolved oxygen analyzer (Two-Wire Transmitter)

HP-300 (Two-Wire Transmitter)
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Industrial pH meter (Two-Wire Transmitter)

HD-200 (Four-Wire Analyzer)
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Industrial dissolved oxygen analyzer (Four-Wire Analyzer)

HO-200 (Four-Wire Analyzer)
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Industrial ORP meter (Four-Wire Analyzer)

HP-200-K (Four-Wire Analyzer)
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Industrial pH meter (Four-Wire Analyzer)

The Slim48 series HD-480 industrial dissolved oxygen meter HD-480
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Industrial dissolved oxygen analyzer (The Slim48 series)

Industrial pH meter HP-480TP
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Industrial pH meter - Industrial time sharing proportional control

HE-300R (Two-Wire Transmitter)
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Industrial electric resistivity meter (Two-Wire Transmitter)

HE-300C (Two-Wire Transmitter)
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Industrial electric conductivity meter (Two-Wire Transmitter)

HE-200R (Four-Wire Analyzer)
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Industrial electric resistivity meter (Four-Wire Analyzer)

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Industrial electric conductivity meter (Four-Wire Analyzer)

Industrial resistivity meter HE-960RW
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Industrial resistivity meter

HE-960CW 2-channel Sanitary Conductivity Meter
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2-channel Sanitary Conductivity Meter (Low Concentration type)

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Industrial conductivity meter (low concentration type)