Semiconductor Manufacturing Process

Providing Solutions At Every Stage Of The Semiconductor Manufacturing Process From Start To Finish

Semiconductors are the key evolving components in the industry today. HORIBA has kept its sights keenly focused on this micro world. Specialists in each field; HORIBA have pursued proprietary engineering projects in a wide range of areas that include evaluation and analysis, purity of ultra-pure water, composition of liquids and gases, and more broadly, environment and safety. With our sights set clearly on the overall process, we have developed a line-up of analytical equipment, fluid control and measuring systems tailored to every stage of the semiconductor manufacturing process in response to stringent quality control requirements. In all stages, from materials evaluation through to final inspection, HORIBA products help maintain high efficiency in the manufacture of leading-edge electronics devices.

Browse Products

CS-100F1 Series
more CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

HD-480
more HD-480

Panel-mount Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

HE-960LF / FS-09F-1/2
more HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

CS-620F
more CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-900
more CS-900

Non-Contact Chemical Concentration Monitor

SEC-Z700S Series
more SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Controller

SLIA-300
more SLIA-300

Highly Sensitive Silica Monitor

FS-3000
more FS-3000

Thermal Flow Splitter

LEM Series
more LEM Series

Camera Endpoint Monitor based on Real Time Laser Interferometry

HF-960EM
more HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

CS-600F
more CS-600F

Fiber Optic Type Chemical Concentration Monitor

HE-960RW
more HE-960RW

Panel-mount Type Resistivity Meter(Four-Wire Transmission, 2-channel)

HE-960TM
more HE-960TM

TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

EG-100
more EG-100

Washwater Monitoring System

UP-100
more UP-100

Micro Volume pH Monitor

HE-480R
more HE-480R

Panel-mount Type Resistivity Meter(Four-Wire Transmission)

TPNA-500
more TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

CODA-500
more CODA-500

Automatic COD Monitor

HC-200F
more HC-200F

Field-installation Type Simplified Fluoride Ion Concentration Meter(Four-Wire Transmission)

OPSA-150
more OPSA-150

Organic Pollutant Monitor

HE-960CW
more HE-960CW

Panel-mount Type Conductivity Meter (Four-Wire Transmission, 2-channel)

HE-480R(W)
more HE-480R(W)

Industrial resistivity meter

HP-480(W)
more HP-480(W)

Industrial pH meter

HE-300R
more HE-300R

Field-installation Type Electric Resistivity Meter (Two-Wire Transmission)

HE-480C
more HE-480C

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

CS-100 Series
more CS-100 Series

Stand-alone Type Chemical Concentration Monitor

HE-200C
more HE-200C

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HF-960M
more HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HO-200
more HO-200

Field-installation Type ORP Meter (Four-Wire Transmission)

HO-480
more HO-480

Panel-mount Type ORP Meter (Four-Wire Transmission)

HE-960H-TM
more HE-960H-TM

Wide range TMAH Concentration Monitor

HF-960H
more HF-960H

HF / HCl Concentration Monitor

HC-200NH
more HC-200NH

Field-installation Type Ammonia Nitrogen Meter(Four-Wire Transmission)

HP-960FTP
more HP-960FTP

Panel-mount Type pH Meter (Four-Wire Transmission, 4 point ararm, Time sharing Proportional Control)

HE-960HC
more HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-480C-GC
more HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HP-480TP
more HP-480TP

Panel-mount Type pH Meter (Four-Wire Transmission, Industrial Time sharing Proportional Control)

HE-960RW-GC(W)
more HE-960RW-GC(W)

2-Channel Resistivity Meter

HE-960R-GC(W)
more HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HP-480PL
more HP-480PL

Panel-mount Type pH Meter (Four-Wire Transmission, Pulse Proportional Control)

HU-200TB-W
more HU-200TB-W

Field-installation Type Turbidity Meter (Four-Wire Transmission, For Wide Range)

HP-480
more HP-480

Panel-mount Type pH Meter (Four-Wire Transmission)

HE-960CA
more HE-960CA

Citric Acid Monitor

HU-200TB-IM
more HU-200TB-IM

Field-installation Type Turbidity Meter (Four-Wire Transmission, Immersion Type)

HE-960LC
more HE-960LC

Carbon Sensor Conductivity Meter

HU-200TB-H
more HU-200TB-H

Field-installation Type Turbidity Meter (Four-Wire Transmission, High-sensitivity)

CS-700
more CS-700

High Precision, High Stability Chemical Concentration Monitor

HD-960L
more HD-960L

Dissolved Oxygen Monitor in Low Concentration

HE-300C
more HE-300C

Field-installation Type Electric Conductivity Meter (Two-Wire Transmission, For Low-concentration)

HF-SP-CU
more HF-SP-CU

2-channel High Precision HF Concentration Monitor

HC-300F
more HC-300F

Field-installation Type Simplified Fluoride Ion Concentration Meter(Two-Wire Transmission)

HZ-960
more HZ-960

Dissolved Ozone Monitor

HE-960H-TM-S
more HE-960H-TM-S

High Precision TMAH Concentration Monitor

HP-300
more HP-300

Field-installation Type pH Meter (Two-Wire Transmission)

HE-200R
more HE-200R

Field-installation Type Electric Resistivity Meter (Four-Wire Transmission)

HD-200
more HD-200

Field-installation Type Dissolved Oxygen Meter (Four-Wire Transmission, Membrane Type)

HO-300
more HO-300

Field-installation Type ORP Meter (Two-Wire Transmission)

HD-300
more HD-300

Field-installation Type Dissolved Oxygen Meter(Two-Wire Transmission, Membrane Type)

HU-200SS
more HU-200SS

Field-installation Type MLSS Meter (Four-Wire Transmission)

HD-200FL
more HD-200FL

Field-installation Type Dissolved Oxygen Meter (Four-Wire Transmission, Optical Type)

HP-200
more HP-200

Field-installation Type pH Meter (Four-Wire Transmission)

XGT-7200
more XGT-7200

X-ray Analytical Microscope

XGT-9000
more XGT-9000

X-ray Analytical Microscope