Semiconductor

Semiconductor

HORIBA have developed a line-up of fluid control, vaporization, analytical equipment and measuring systems tailored to every stage of the semiconductor, FPD manufacturing process, and the other wide range of manufacturing process. In all stages, from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency in your process.

Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.

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Fluid Control

Fluid Control

Fluid Control Systems

Fluid Control System

Dry Process Control

Dry Process Control

Wet Process Control

Wet Process Control

Metrology

Metrology

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See more our NEW and HOT products !

CRITERION D500

Pressure Insensitive Mass Flow Module

This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.

The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. 

 

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Mixed Injection System Liquid Vaporizer MV-2000 Series

The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

 

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High Precision, High Stability Chemical Concentration Monitor

The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
 By improving HORIBA's renowned spectroscopic measurement technology,  the CS-700 realizes up to 5X improvement in measurement performance.
 Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.

 

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Dissolved Oxygen Monitor in Low Concentration HF HD-960L

High stability measurement dissolved oxygen in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.

 

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Reticle / Mask Particle Detection System PR-PD2HR

The HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.

 

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Latest News

Capacitance Manometer VG Series

HORIBA wins a 2018 iF DESIGN AWARD with its innovative VG-200 capacitance manometer

|   Press release

HORIBA, an OEM of instruments and measurement systems, has secured a prestigious iF DESIGN AWARD 2018, in the ‘Product Design’ discipline, with its VG...

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Atsushi Horiba Elected VLSI Research All-Star of the Chip-Making Industry for Management Contributions

|   Press release

VLSI Research Inc. (stylized VLSIresearch) in the USA announced its 2017 All-Stars of the Semiconductor Industry, nine executives who made outstanding...

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HORIBA STEC has obtained ISO/IEC 17025 Accreditation for Gas Mass Flow Rate Calibrations

HORIBA STEC, Co., Ltd. (hereafter HORIBA STEC) — a subsidiary of HORIBA, Ltd. (hereafter HORIBA) — has obtained accreditation based on ISO/IEC 17025...

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Latest Events

Graphene 2019

Official website:

    Dear visitor, please look at the full program and book your reservation on the official website

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    Browse Products

    CM-200A/210A
    MoreCM-200A/210A
    Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor
    CRITERION D500
    MoreCRITERION D500
    Pressure Insensitive Mass Flow Module
    CS-100 Series
    MoreCS-100 Series
    Stand-alone Type Chemical Concentration Monitor
    CS-100F4
    MoreCS-100F4
    Multi-point Chemical Solution Monitor
    CS-131
    MoreCS-131
    High-speed response and compact chemical solution concentration monitor SC-1 Monitor,
    CS-137
    MoreCS-137
    BHF Concentration Monitor
    CS-139E
    MoreCS-139E
    High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor
    CS-150
    MoreCS-150
    SPM Monitor
    CS-153
    MoreCS-153
    FPM Monitor
    CS-153N
    MoreCS-153N
    HF/HNO3 Monitor
    CS-600F
    MoreCS-600F
    Fiber Optic Type Chemical Concentration Monitor
    CS-700
    MoreCS-700
    High Precision, High Stability Chemical Concentration Monitor
    EC-5000 Series
    MoreEC-5000 Series
    Exhaust Pressure Controller
    EV-140C
    MoreEV-140C
    Optical Emission Spectroscopy Etching End-point Monitor
    FDM Series
    MoreFDM Series
    POCl3 Auto Refill System
    GR-300 Series
    MoreGR-300 Series
    Wafer Back Side Cooling System
    HE-480C-GC
    MoreHE-480C-GC
    Carbon Sensor Conductivity Meter (Low concentration type)
    HE-480R(W)
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    Industrial resistivity meter
    HE-960CA
    MoreHE-960CA
    Citric Acid Monitor
    HE-960H-KOH
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    KOH Monitor
    HE-960H-TM
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    Wide range TMAH Concentration Monitor
    HE-960H-TM-S
    MoreHE-960H-TM-S
    High Precision TMAH Concentration Monitor
    HE-960HC
    MoreHE-960HC
    Carbon Sensor Conductivity Meter (High concentration type)
    HE-960LC
    MoreHE-960LC
    Carbon Sensor Conductivity Meter
    HE-960R-GC(W)
    MoreHE-960R-GC(W)
    Carbon Sensor Resistivity Meter
    HE-960RW-GC(W)
    MoreHE-960RW-GC(W)
    2-Channel Resistivity Meter
    HE-960TM
    MoreHE-960TM
    TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations
    HE-Z-100T
    MoreHE-Z-100T
    High Resistivity Meter
    HF HD-960L
    MoreHF HD-960L
    Dissolved Oxygen Monitor in Low Concentration
    HF-960EM
    MoreHF-960EM
    In-line Sensor & Auto Range Switching Concentration Monitor
    HF-960H
    MoreHF-960H
    HF / HCl Concentration Monitor
    HF-960M
    MoreHF-960M
    Low Concentration Type HF/HCl/NH3 Concentration Monitor
    HF-SP-CU
    MoreHF-SP-CU
    2-channel High Precision HF Concentration Monitor
    HP-480(W)
    MoreHP-480(W)
    Industrial pH meter
    HZ-960
    MoreHZ-960
    Dissolved Ozone Monitor
    HZ-960HPO-M
    MoreHZ-960HPO-M
    H2O2 Monitor
    IR-200
    MoreIR-200
    Gas Monitor for Chamber Cleaning End Point Monitoring
    IR-300
    MoreIR-300
    Vapor Concentration Monitor
    IR-400
    MoreIR-400
    High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
    LE Series
    MoreLE Series
    Large Flow Liquid Source Vaporization Control System
    LEM-CT-670-G50
    MoreLEM-CT-670-G50
    Real Time Interferometric Process Monitor [CCD] Laser Interference Camera
    LF-F/LV-F Series
    MoreLF-F/LV-F Series
    Digital Liquid Mass Flow Meters / Controllers
    LSC series
    MoreLSC series
    Compact Baking System
    LU Series
    MoreLU Series
    Liquid Auto Refill System
    MI-1000/MV-1000
    MoreMI-1000/MV-1000
    Mixed Injection System Liquid Vaporizers
    MICROPOLE System
    MoreMICROPOLE System
    Compact Process Gas Monitor
    MU-2200
    MoreMU-2200
    Mixed Gas Generators MU Series
    MV-2000 Series
    MoreMV-2000 Series
    Mixed Injection System Liquid Vaporizer
    PR-PD2
    MorePR-PD2
    Reticle/Mask Particle Detection System
    PR-PD2BLI
    MorePR-PD2BLI
    Blanks Mask Particle Detection System
    PR-PD2HR
    MorePR-PD2HR
    Reticle / Mask Particle Detection System
    PR-PD3
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    Compact Reticle/Mask Particle Detection System
    PR-PD5
    MorePR-PD5
    Low-cost Reticle/Mask Particle Detection System
    PV Series
    MorePV Series
    Piezo Actuator Valve
    RP-1
    MoreRP-1
    Reticle/Mask Particle Remover
    RU-1000
    MoreRU-1000
    Plasma Emission Controller
    SC-2 Concentration Monitor, CS-152
    MoreSC-2 Concentration Monitor, CS-152
    Semiconductor process monitoring for SC-2 process
    SEC-400 series
    MoreSEC-400 series
    Mass flow controllers
    SEC-8000 F/D/E Series
    MoreSEC-8000 F/D/E Series
    High Temperature Digital Mass Flow Controller
    SEC-E Series
    MoreSEC-E Series
    Mass Flow Controller
    SEC-N100 Series
    MoreSEC-N100 Series
    Digital Mass Flow Controller
    SEC-R100 Series
    MoreSEC-R100 Series
    Digital Mass Flow Controller
    SEC-Z500X
    MoreSEC-Z500X
    Multi Range/Multi Gas Digital Mass Flow Controller
    SEC-Z700X Series
    MoreSEC-Z700X Series
    Pressure Insensitive Mass Flow Controller
    SLIA-300
    MoreSLIA-300
    Highly Sensitive Silica Monitor
    TU Series
    MoreTU Series
    Test Gas Generation Systems
    UP-100
    MoreUP-100
    Micro Volume pH Monitor
    UR-Z700 series
    MoreUR-Z700 series
    Digital Automatic Pressure Regulator
    VC Series
    MoreVC Series
    Direct Liquid Injection System
    VG Series
    MoreVG Series
    Capacitance Manometer
    XF-100 Series
    MoreXF-100 Series
    Digital Liquid Mass Flow Meters