Semiconductor

Semiconductor

HORIBA have developed a line-up of fluid control, vaporization, analytical equipment and measuring systems tailored to every stage of the semiconductor, FPD manufacturing process, and the other wide range of manufacturing process. In all stages, from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency in your process.

Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.

Browse Semiconductor Divisions

Fluid Control

Fluid Control

Fluid Control Systems

Fluid Control System

Dry Process Control

Dry Process Control

Wet Process Control

Wet Process Control

Metrology

Metrology

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See more our NEW and HOT products !

CRITERION D500

Pressure Insensitive Mass Flow Module

This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.

The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. 

 

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Mixed Injection System Liquid Vaporizer MV-2000 Series

The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

 

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High Precision, High Stability Chemical Concentration Monitor

The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
 By improving HORIBA's renowned spectroscopic measurement technology,  the CS-700 realizes up to 5X improvement in measurement performance.
 Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.

 

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Dissolved Oxygen Monitor in Low Concentration HF HD-960L

High stability measurement dissolved oxygen in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.

 

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Reticle / Mask Particle Detection System PR-PD2HR

The HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.

 

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Latest News

Capacitance Manometer VG Series

HORIBA wins a 2018 iF DESIGN AWARD with its innovative VG-200 capacitance manometer

HORIBA, an OEM of instruments and measurement systems, has secured a prestigious iF DESIGN AWARD 2018, in the ‘Product Design’ discipline, with its VG...

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Atsushi Horiba Elected VLSI Research All-Star of the Chip-Making Industry for Management Contributions

VLSI Research Inc. (stylized VLSIresearch) in the USA announced its 2017 All-Stars of the Semiconductor Industry, nine executives who made outstanding...

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HORIBA STEC has obtained ISO/IEC 17025 Accreditation for Gas Mass Flow Rate Calibrations

HORIBA STEC, Co., Ltd. (hereafter HORIBA STEC) — a subsidiary of HORIBA, Ltd. (hereafter HORIBA) — has obtained accreditation based on ISO/IEC 17025...

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Browse Products

BHF Concentration Monitor, CS-137
MoreBHF Concentration Monitor, CS-137
CRITERION D500
MoreCRITERION D500
Pressure Insensitive Mass Flow Module
Dissolved Ozone Monitor HZ-960
MoreDissolved Ozone Monitor HZ-960
EV-140C
MoreEV-140C
Optical Emission Spectroscopy Etching End-point Monitor
Fiber Optic Type Chemical Concentration Monitor CS-600F
MoreFiber Optic Type Chemical Concentration Monitor CS-600F
FPM Monitor CS-153
MoreFPM Monitor CS-153
Gas Monitor for Chamber Cleaning End Point Monitoring IR-200
MoreGas Monitor for Chamber Cleaning End Point Monitoring IR-200
H2O2 Monitor HZ-960HPO-M
MoreH2O2 Monitor HZ-960HPO-M
HF-960M
MoreHF-960M
Low Concentration Type HF/HCl/NH3 Concentration Monitor
HF/HNO3 Monitor, CS-153N
MoreHF/HNO3 Monitor, CS-153N
High Precision, High Stability Chemical Concentration Monitor
MoreHigh Precision, High Stability Chemical Concentration Monitor
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring IR-400
MoreHigh-grade type Gas Monitor for Chamber Cleaning End Point Monitoring IR-400
High-speed response and compact chemical solution concentration monitor SC-1 Monitor, CS-131
MoreHigh-speed response and compact chemical solution concentration monitor SC-1 Monitor, CS-131
High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor, CS-139E
MoreHigh-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor, CS-139E
LEM-CT-670-G50
MoreLEM-CT-670-G50
Real Time Interferometric Process Monitor [CCD] Laser Interference Camera
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
MI-1000/MV-1000
MoreMI-1000/MV-1000
Mixed Injection System Liquid Vaporizers
MICROPOLE System
MoreMICROPOLE System
Compact Process Gas Monitor
PR-PD2
MorePR-PD2
Reticle/Mask Particle Detection System
PR-PD2BLI
MorePR-PD2BLI
Blanks Mask Particle Detection System
SC-2 Concentration Monitor, CS-152
MoreSC-2 Concentration Monitor, CS-152
Semiconductor process monitoring for SC-2 process
SEC-400 series
MoreSEC-400 series
Mass flow controllers
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller
SPM Monitor CS-150
MoreSPM Monitor CS-150
Stand-alone Type Chemical Concentration Monitor CS-100 Series
MoreStand-alone Type Chemical Concentration Monitor CS-100 Series
UR-Z700 series
MoreUR-Z700 series
Digital Automatic Pressure Regulator
Vapor Concentration Monitor IR-300
MoreVapor Concentration Monitor IR-300
XF-100 Series
MoreXF-100 Series
Digital Liquid Mass Flow Meters