Semiconductor

Semiconductor

HORIBA have developed a line-up of fluid control, vaporization, analytical equipment and measuring systems tailored to every stage of the semiconductor, FPD manufacturing process, and the other wide range of manufacturing process. In all stages, from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency in your process.

Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.

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Fluid Control

Fluid Control

 

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Fluid Control Systems

Fluid Control System

 

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Dry Process Control

Dry Process Control

 

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Wet Process Control

Wet Process Control

 

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Metrology

Metrology

 

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Feature

See more our NEW and HOT products !

CRITERION D500

Pressure Insensitive Mass Flow Module

This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.

The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. 

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Mixed Injection System Liquid Vaporizer MV-2000 Series

The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

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High Precision, High Stability Chemical Concentration Monitor

The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
 By improving HORIBA's renowned spectroscopic measurement technology,  the CS-700 realizes up to 5X improvement in measurement performance.
 Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.

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Dissolved Oxygen Monitor in Low Concentration HF HD-960L

High stability measurement dissolved oxygen in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.

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Reticle / Mask Particle Detection System PR-PD2HR

The HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.

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Latest News

Capacitance Manometer VG Series
|   Press release

HORIBA wins a 2018 iF DESIGN AWARD with its innovative VG-200 capacitance...

HORIBA, an OEM of instruments and measurement systems, has secured a prestigious iF DESIGN AWARD 2018, in the ‘Product Design’ discipline, with its VG...

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|   Press release

Atsushi Horiba Elected VLSI Research All-Star of the Chip-Making Industry for...

VLSI Research Inc. (stylized VLSIresearch) in the USA announced its 2017 All-Stars of the Semiconductor Industry, nine executives who made outstanding...

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HORIBA STEC has obtained ISO/IEC 17025 Accreditation for Gas Mass Flow Rate...

HORIBA STEC, Co., Ltd. (hereafter HORIBA STEC) — a subsidiary of HORIBA, Ltd. (hereafter HORIBA) — has obtained accreditation based on ISO/IEC 17025...

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Latest Events

2019 MRS Fall Meeting & Exhibit
- | Boston, MA

2019 MRS Fall Meeting & Exhibit

Come and visit HORIBA Scientific at the 2019 MRS Fall Meeting & Exhibit

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- | Livonia, MI

2019 ANACHEM / SAS Symposium

Come and visit HORIBA Scientific at the 2019 ANACHEM / SAS Symposium

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AAPS 2019 PHARMSCI 360
- | San Antonio, TX

AAPS 2019 PHARMSCI 360

Come and visit HORIBA Scientific AAPS 2019

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Browse Products

CM-200A/210A
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Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor

CRITERION D500
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Pressure Insensitive Mass Flow Module

CS-100 Series
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Stand-alone Type Chemical Concentration Monitor

CS-100F4
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Multi-point Chemical Solution Monitor

CS-131
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High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

CS-137
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BHF Concentration Monitor

CS-139E
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High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

CS-150
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SPM Monitor

CS-153
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FPM Monitor

CS-153N
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HF/HNO3 Monitor

CS-600F
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Fiber Optic Type Chemical Concentration Monitor

CS-700
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High Precision, High Stability Chemical Concentration Monitor

EC-5000 Series
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Exhaust Pressure Controller

EV-140C
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Optical Emission Spectroscopy Etching End-point Monitor

FDM Series
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POCl3 Auto Refill System

GR-300 Series
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Wafer Back Side Cooling System

HE-480C-GC
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Carbon Sensor Conductivity Meter (Low concentration type)

HE-480R(W)
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Industrial resistivity meter

HE-960CA
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Citric Acid Monitor

HE-960H-TM
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Wide range TMAH Concentration Monitor

HE-960H-TM-S
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High Precision TMAH Concentration Monitor

HE-960HC
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Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
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Carbon Sensor Conductivity Meter

HE-960R-GC(W)
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Carbon Sensor Resistivity Meter

HE-960RW-GC(W)
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2-Channel Resistivity Meter

HE-960TM
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TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

HE-Z-100T
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High Resistivity Meter

HF HD-960L
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Dissolved Oxygen Monitor in Low Concentration

HF-960EM
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In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
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HF / HCl Concentration Monitor

HF-960M
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Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-SP-CU
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2-channel High Precision HF Concentration Monitor

HP-480(W)
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Industrial pH meter

HZ-960
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Dissolved Ozone Monitor

IR-200
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Gas Monitor for Chamber Cleaning End Point Monitoring

IR-300
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Vapor Concentration Monitor

IR-400
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High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

LE Series
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Large Flow Liquid Source Vaporization Control System

LEM-CT-670-G50
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Real Time Interferometric Process Monitor [CCD] Laser Interference Camera

LF-F/LV-F Series
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Digital Liquid Mass Flow Meters / Controllers

LSC series
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Compact Baking System

LU Series
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Liquid Auto Refill System

MI-1000/MV-1000
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Mixed Injection System Liquid Vaporizers

MICROPOLE System
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Compact Process Gas Monitor

MU-2200
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Mixed Gas Generators MU Series

MV-2000 Series
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Mixed Injection System Liquid Vaporizer

PR-PD2
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Reticle/Mask Particle Detection System

PR-PD2BLI
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Blanks Mask Particle Detection System

PR-PD2HR
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Reticle / Mask Particle Detection System

PR-PD3
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Compact Reticle/Mask Particle Detection System

PR-PD5
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Low-cost Reticle/Mask Particle Detection System

PV Series
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Piezo Actuator Valve

RP-1
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Reticle/Mask Particle Remover

RU-1000
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Plasma Emission Controller

SC-2 Concentration Monitor, CS-152
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Semiconductor process monitoring for SC-2 process

SEC-400 series
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Mass flow controllers

SEC-8000 F/D/E Series
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High Temperature Digital Mass Flow Controller

SEC-E Series
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Mass Flow Controller

SEC-N100 Series
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Digital Mass Flow Controller

SEC-R100 Series
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Digital Mass Flow Controller

SEC-Z500X
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Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
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Pressure Insensitive Mass Flow Controller

SLIA-300
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Highly Sensitive Silica Monitor

TU Series
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Test Gas Generation Systems

UP-100
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Micro Volume pH Monitor

UR-Z700 series
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Digital Automatic Pressure Regulator

VC Series
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Direct Liquid Injection System

VG Series
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Capacitance Manometer

XF-100 Series
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Digital Liquid Mass Flow Meters