Semiconductor

Semiconductor

HORIBA have developed a line-up of fluid control, vaporization, analytical equipment and measuring systems tailored to every stage of the semiconductor, FPD manufacturing process, and the other wide range of manufacturing process. In all stages, from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency in your process.

Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.

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Fluid Control

Fluid Control

Fluid Control Systems

Fluid Control System

Dry Process Control

Dry Process Control

Wet Process Control

Wet Process Control

Metrology

Metrology

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See more our NEW and HOT products !

CRITERION D500

Pressure Insensitive Mass Flow Module

This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.

The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. 

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Mixed Injection System Liquid Vaporizer MV-2000 Series

The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

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High Precision, High Stability Chemical Concentration Monitor

The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
 By improving HORIBA's renowned spectroscopic measurement technology,  the CS-700 realizes up to 5X improvement in measurement performance.
 Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.

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Dissolved Oxygen Monitor in Low Concentration HF HD-960L

High stability measurement dissolved oxygen in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.

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Reticle / Mask Particle Detection System PR-PD2HR

The HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.

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Latest News

Capacitance Manometer VG Series
|   Press release

HORIBA wins a 2018 iF DESIGN AWARD with its innovative VG-200 capacitance...

HORIBA, an OEM of instruments and measurement systems, has secured a prestigious iF DESIGN AWARD 2018, in the ‘Product Design’ discipline, with its VG...

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|   Press release

Atsushi Horiba Elected VLSI Research All-Star of the Chip-Making Industry for...

VLSI Research Inc. (stylized VLSIresearch) in the USA announced its 2017 All-Stars of the Semiconductor Industry, nine executives who made outstanding...

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HORIBA STEC has obtained ISO/IEC 17025 Accreditation for Gas Mass Flow Rate...

HORIBA STEC, Co., Ltd. (hereafter HORIBA STEC) — a subsidiary of HORIBA, Ltd. (hereafter HORIBA) — has obtained accreditation based on ISO/IEC 17025...

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Latest Events

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64th Annual Meeting of the Biophysical Society

Visit HORIBA Scientific at Biophysical Society 2020 booth #409

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2020 Unified Wine and Grape Symposium

Visit HORIBA Scientific at the 2020 Unified Symposium

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Photonics West

Visit HORIBA Scientific at Photonics West 2020 booth #1726

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Browse Products

Hydrofluoric Acid Monitor CM-200A/210A
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Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor

CRITERION D500
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Pressure Insensitive Mass Flow Module

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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Stand-alone Type Chemical Concentration Monitor

CS-100F4
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Multi-point Chemical Solution Monitor

SC-1 Monitor, CS-131
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High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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BHF Concentration Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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SPM Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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FPM Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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HF/HNO3 Monitor

Fiber Optic Type Chemical Concentration Monitor CS-600F
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Fiber Optic Type Chemical Concentration Monitor

High Precision, High Stability Chemical Concentration Monitor CS-700
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High Precision, High Stability Chemical Concentration Monitor

Exhaust Pressure Controller EC-5000 Series
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Exhaust Pressure Controller

EV-140C
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Optical Emission Spectroscopy Etching End-point Monitor

POCl3 Auto Refill System FDM Series
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POCl3 Auto Refill System

GR-300 Series
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Wafer Back Side Cooling System

Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
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Carbon Sensor Conductivity Meter (Low concentration type)

Industrial resistivity meter HE-480R(W)
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Industrial resistivity meter

Citric Acid Monitor HE-960CA
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Citric Acid Monitor

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S
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Wide range TMAH Concentration Monitor

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S
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High Precision TMAH Concentration Monitor

Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC
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Carbon Sensor Conductivity Meter (High concentration type)

Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC
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Carbon Sensor Conductivity Meter

Carbon Sensor Resistivity Meter HE-960R-GC(W)
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Carbon Sensor Resistivity Meter

2-Channel Resistivity Meter HE-960RW-GC(W)
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2-Channel Resistivity Meter

TMAH Conductivity Meter HE-960TM
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TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

High Resistivity Meter HE-Z-100T
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High Resistivity Meter

Dissolved Oxygen Monitor in Low Concentration HF HD-960L
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Dissolved Oxygen Monitor in Low Concentration

In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
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In-line Sensor & Auto Range Switching Concentration Monitor

HF / HCl Concentration Monitor HF-960H
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HF / HCl Concentration Monitor

Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M
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Low Concentration Type HF/HCl/NH3 Concentration Monitor

2-channel High Precision HF Concentration Monitor HF-SP-CU
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2-channel High Precision HF Concentration Monitor

Industrial pH meter HP-480(W)
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Industrial pH meter

Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M
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Dissolved Ozone Monitor

IR-200
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Gas Monitor for Chamber Cleaning End Point Monitoring

IR-300
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Vapor Concentration Monitor

IR-400
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High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

Large Flow Liquid Source Vaporization Control System LE Series Image
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Large Flow Liquid Source Vaporization Control System

Real Time Interferometric Process Monitor LEM-CT-670-G50
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Real Time Interferometric Process Monitor [CCD] Laser Interference Camera

Digital Liquid Mass Flow Meters / Controllers LF-F/LV-F series
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Digital Liquid Mass Flow Meters / Controllers

Compact Baking System LSC series
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Compact Baking System

Liquid Auto Refill System LU Series
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Liquid Auto Refill System

Mixed Injection System Liquid Vaporizers MI-1000/MV-1000
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Mixed Injection System Liquid Vaporizers

Compact Process Gas Monitor MICROPOLE System
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Compact Process Gas Monitor

Mixed Gas Generators MU Series(MU-2200)
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Mixed Gas Generators MU Series

Mixed Injection System Liquid Vaporizer MV-2000 Series
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Mixed Injection System Liquid Vaporizer

Reticle/Mask Particle Detection System PR-PD2
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Reticle/Mask Particle Detection System

Blanks Mask Particle Detection System PR-PD2BLI
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Blanks Mask Particle Detection System

Reticle / Mask Particle Detection System, PR-PD2HR
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Reticle / Mask Particle Detection System

Compact Reticle/Mask Particle Detection System PR-PD3
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Compact Reticle/Mask Particle Detection System

Low-cost ReticleMask Particle Detection System PR-PD5
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Low-cost Reticle/Mask Particle Detection System

Piezo Actuator Valve PV Series
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Piezo Actuator Valve

RP-1
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Reticle/Mask Particle Remover

RU-1000
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Plasma Emission Controller

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
More SC-2 Concentration Monitor, CS-152

Semiconductor process monitoring for SC-2 process

Mass flow controllers SEC-400 series
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Mass flow controllers

High Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series
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High Temperature Digital Mass Flow Controller

Mass Flow Controller SEC-E Series
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Mass Flow Controller

Digital Mass Flow Controller SEC-N100 Series
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Digital Mass Flow Controller

Digital Mass Flow Controller SEC-R100 Series
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Digital Mass Flow Controller

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
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Multi Range/Multi Gas Digital Mass Flow Controller

Pressure Insensitive Mass Flow Controller SEC-Z700X Series
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Pressure Insensitive Mass Flow Controller

Highly Sensitive Silica Monitor SLIA-300
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Highly Sensitive Silica Monitor

Test Gas Generation Systems TU Series
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Test Gas Generation Systems

Micro Volume pH Monitor UP-100
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Micro Volume pH Monitor

Digital Automatic Pressure Regulator UR-Z700 series
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Digital Automatic Pressure Regulator

Direct Liquid Injection System VC Series
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Direct Liquid Injection System

Capacitance Manometer VG Series
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Capacitance Manometer

XF-100 Series
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Digital Liquid Mass Flow Meters