Semiconductor

Semiconductor

HORIBA have developed a line-up of fluid control, vaporization, analytical equipment and measuring systems tailored to every stage of the semiconductor, FPD manufacturing process, and the other wide range of manufacturing process. In all stages, from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency in your process.

Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.

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Fluid Control

Fluid Control

Fluid Control Systems

Fluid Control System

Dry Process Control

Dry Process Control

Wet Process Control

Wet Process Control

Metrology

Metrology

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See more our NEW and HOT products !

CRITERION D500

Pressure Insensitive Mass Flow Module

This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.

The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. 

 

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Mixed Injection System Liquid Vaporizer MV-2000 Series

The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

 

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High Precision, High Stability Chemical Concentration Monitor

The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
 By improving HORIBA's renowned spectroscopic measurement technology,  the CS-700 realizes up to 5X improvement in measurement performance.
 Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.

 

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Dissolved Oxygen Monitor in Low Concentration HF HD-960L

High stability measurement dissolved oxygen in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.

 

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Reticle / Mask Particle Detection System PR-PD2HR

The HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.

 

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Latest News

Capacitance Manometer VG Series

HORIBA wins a 2018 iF DESIGN AWARD with its innovative VG-200 capacitance manometer

HORIBA, an OEM of instruments and measurement systems, has secured a prestigious iF DESIGN AWARD 2018, in the ‘Product Design’ discipline, with its VG...

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Atsushi Horiba Elected VLSI Research All-Star of the Chip-Making Industry for Management Contributions

VLSI Research Inc. (stylized VLSIresearch) in the USA announced its 2017 All-Stars of the Semiconductor Industry, nine executives who made outstanding...

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HORIBA STEC has obtained ISO/IEC 17025 Accreditation for Gas Mass Flow Rate Calibrations

HORIBA STEC, Co., Ltd. (hereafter HORIBA STEC) — a subsidiary of HORIBA, Ltd. (hereafter HORIBA) — has obtained accreditation based on ISO/IEC 17025...

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Video

Explore us through our video !

Made in Aso

An introduction to HORIBAs cutting edge manufacturing facility on Japan's beautiful Kyushu Island.

 

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HORIBA Leader's Voice 2018

Semiconductor Instruments & Systems

 

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Browse Products

2-channel High Precision HF Concentration Monitor HF-SP-CU
More2-channel High Precision HF Concentration Monitor HF-SP-CU
2-Channel Resistivity Meter HE-960RW-GC(W)
More2-Channel Resistivity Meter HE-960RW-GC(W)
CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
MoreBHF Concentration Monitor, CS-137
Capacitance Manometer VG Series
MoreCapacitance Manometer VG Series
Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
MoreCarbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
Compact Baking System LSC series
MoreCompact Baking System LSC series
Compact Process Gas Monitor MICROPOLE System
MoreCompact Process Gas Monitor MICROPOLE System
Compact Reticle/Mask Particle Detection System PR-PD3
MoreCompact Reticle/Mask Particle Detection System PR-PD3
Pressure Insensitive Mass Flow Module D500
MoreCRITERION D500
Pressure Insensitive Mass Flow Module
CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
MoreCS-100 Series
Stand-alone Type Chemical Concentration Monitor
CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
MoreCS-153
FPM Monitor
Fiber Optic Type Chemical Concentration Monitor CS-600F
MoreCS-600F
Fiber Optic Type Chemical Concentration Monitor
Digital Liquid Mass Flow Meters XF-100 Series Image
MoreDigital Liquid Mass Flow Meters XF-100 Series
Digital Mass Flow Controller SEC-N100 Series
MoreDigital Mass Flow Controller SEC-N100 Series
Direct Liquid Injection System VC Series
MoreDirect Liquid Injection System VC Series
Dissolved Oxygen Monitor in Low Concentration HF HD-960L
MoreDissolved Oxygen Monitor in Low Concentration HF HD-960L
Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M
MoreDissolved Ozone Monitor HZ-960
Optical Emission Spectroscopy Etching End-point Monitor EV-140C
MoreEV-140C
Optical Emission Spectroscopy Etching End-point Monitor
Exhaust Pressure Controller EC-5000 Series
MoreExhaust Pressure Controller EC-5000 Series
Gas Monitor for Chamber Cleaning End Point Monitoring IR-200
MoreGas Monitor for Chamber Cleaning End Point Monitoring IR-200
Industrial resistivity meter HE-480R(W)
MoreHE-480R(W)
Industrial resistivity meter
Citric Acid Monitor HE-960CA
MoreHE-960CA
Citric Acid Monitor
Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC
MoreHE-960HC
Carbon Sensor Conductivity Meter (High concentration type)
Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC
MoreHE-960LC
Carbon Sensor Conductivity Meter
Carbon Sensor Resistivity Meter HE-960R-GC(W)
MoreHE-960R-GC(W)
Carbon Sensor Resistivity Meter
TMAH Conductivity Meter HE-960TM
MoreHE-960TM
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations
HF / HCl Concentration Monitor HF-960H
MoreHF-960H
HF / HCl Concentration Monitor
CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
MoreHF/HNO3 Monitor, CS-153N
HE-960H-TM,HE-960H-KOH,HE-960H-TM-S
MoreHigh Precision TMAH Concentration Monitor HE-960H-TM-S
High Precision, High Stability Chemical Concentration Monitor CS-700
MoreHigh Precision, High Stability Chemical Concentration Monitor
High Resistivity Meter HE-Z-100T
MoreHigh Resistivity Meter HE-Z-100T
High Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series
MoreHigh Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series
Gas Monitor IR-400
MoreHigh-grade type Gas Monitor for Chamber Cleaning End Point Monitoring IR-400
Highly Sensitive Silica Monitor SLIA-300
MoreHighly Sensitive Silica Monitor SLIA-300
Hydrofluoric Acid Monitor CM-200A/210A
MoreHydrofluoric Acid Monitor CM-200A/210A
Ideal for hydrofluoric acid monitoring in semiconductor manufacturing
Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M
MoreHZ-960HPO-M
H2O2 Monitor
In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
MoreIn-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
Industrial pH meter HP-480(W)
MoreIndustrial pH meter HP-480(W)
HE-960H-TM,HE-960H-KOH,HE-960H-TM-S
MoreKOH Monitor HE-960H-KOH
Large Flow Liquid Source Vaporization Control System LE Series Image
MoreLarge Flow Liquid Source Vaporization Control System LE Series
Real Time Interferometric Process Monitor LEM-CT-670-G50
MoreLEM-CT-670-G50
Real Time Interferometric Process Monitor [CCD] Laser Interference Camera
Digital Liquid Mass Flow Meters / Controllers LF-F/LV-F series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
Liquid Auto Refill System LU Series
MoreLiquid Auto Refill System LU Series
Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M
MoreLow Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M
Low-cost ReticleMask Particle Detection System PR-PD5
MoreLow-cost Reticle/Mask Particle Detection System PR-PD5
Mass Flow Controller SEC-E Series
MoreMass Flow Controller SEC-E Series
Mixed Injection System Liquid Vaporizers MI-1000/MV-1000
MoreMI-1000/MV-1000
Mixed Injection System Liquid Vaporizers
Micro Volume pH Monitor UP-100
MoreMicro Volume pH Monitor UP-100
Mixed Gas Generators MU Series(MU-2200)
MoreMixed Gas Generators MU Series (MU-2200)
Mixed Injection System Liquid Vaporizer MV-2000 Series
MoreMixed Injection System Liquid Vaporizer MV-2000 Series
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
MoreMulti Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
Multi-point Chemical Solution Monitor CS-100F4
MoreMulti-point Chemical Solution Monitor CS-100F4
Piezo Actuator Valve PV Series
MorePiezo Actuator Valve PV Series
Plasma Emission Controller RU-1000 Image
MorePlasma Emission Controller RU-1000
POCl3 Auto Refill System FDM Series
MorePOCl3 Auto Refill System FDM Series
Reticle/Mask Particle Detection System PR-PD2
MorePR-PD2
Reticle/Mask Particle Detection System
Blanks Mask Particle Detection System PR-PD2BLI
MorePR-PD2BLI
Blanks Mask Particle Detection System
Reticle / Mask Particle Detection System, PR-PD2HR
MoreReticle / Mask Particle Detection System PR-PD2HR
Reticle/Mask Particle Remover RP-1
MoreReticle/Mask Particle Remover RP-1
SC-1 Monitor, CS-131
MoreSC-1 Monitor, CS-131
High-speed response and compact chemical solution concentration monitor
CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
MoreSC-2 Concentration Monitor, CS-152
Semiconductor process monitoring for SC-2 process
Mass flow controllers SEC-400 series
MoreSEC-400 series
Mass flow controllers
Digital Mass Flow Controller SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
Pressure Insensitive Mass Flow Controller SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller
CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
MoreSPM Monitor CS-150
Test Gas Generation Systems TU Series
MoreTest Gas Generation Systems TU Series
CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
MoreTMAH/H2O2 Monitor, CS-139E
High-speed response and compact chemical solution concentration monitor
Digital Automatic Pressure Regulator UR-Z700 series
MoreUR-Z700 series
Digital Automatic Pressure Regulator
Vapor Concentration Monitor IR-300
MoreVapor Concentration Monitor IR-300
Wafer Back Side Cooling System GR-300 Series
MoreWafer Back Side Cooling System GR-300 Series
HE-960H-TM,HE-960H-KOH,HE-960H-TM-S
MoreWide range TMAH Concentration Monitor HE-960H-TM