Fluid Control

HORIBA have developed a line-up of fluid control, vaporization, analytical equipment and measuring systems tailored to every stage of the semiconductor, FPD manufacturing process, and the other wide range of manufacturing process. In all stages, from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency in your process.
Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.
See more our NEW and HOT products !
HORIBA, an OEM of instruments and measurement systems, has secured a prestigious iF DESIGN AWARD 2018, in the ‘Product Design’ discipline, with its VG...
VLSI Research Inc. (stylized VLSIresearch) in the USA announced its 2017 All-Stars of the Semiconductor Industry, nine executives who made outstanding...
HORIBA STEC, Co., Ltd. (hereafter HORIBA STEC) — a subsidiary of HORIBA, Ltd. (hereafter HORIBA) — has obtained accreditation based on ISO/IEC 17025...
Visit HORIBA Scientific at ACS 2020 booth #1218
Visit HORIBA Scientific at Biophysical Society 2020 booth #409
Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor
Pressure Insensitive Mass Flow Module
Stand-alone Type Chemical Concentration Monitor
Multi-point Chemical Solution Monitor
High-speed response and compact chemical solution concentration monitor SC-1 Monitor,
BHF Concentration Monitor
High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor
SPM Monitor
FPM Monitor
HF/HNO3 Monitor
Fiber Optic Type Chemical Concentration Monitor
High Precision, High Stability Chemical Concentration Monitor
Exhaust Pressure Controller
Optical Emission Spectroscopy Etching End-point Monitor
POCl3 Auto Refill System
Wafer Back Side Cooling System
Carbon Sensor Conductivity Meter (Low concentration type)
Industrial resistivity meter
Citric Acid Monitor
KOH Monitor
Wide range TMAH Concentration Monitor
High Precision TMAH Concentration Monitor
Carbon Sensor Conductivity Meter (High concentration type)
Carbon Sensor Conductivity Meter
Carbon Sensor Resistivity Meter
2-Channel Resistivity Meter
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations
High Resistivity Meter
Dissolved Oxygen Monitor in Low Concentration
In-line Sensor & Auto Range Switching Concentration Monitor
HF / HCl Concentration Monitor
Low Concentration Type HF/HCl/NH3 Concentration Monitor
2-channel High Precision HF Concentration Monitor
Industrial pH meter
Dissolved Ozone Monitor
H2O2 Monitor
Gas Monitor for Chamber Cleaning End Point Monitoring
Vapor Concentration Monitor
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
Large Flow Liquid Source Vaporization Control System
Real Time Interferometric Process Monitor [CCD] Laser Interference Camera
Digital Liquid Mass Flow Meters / Controllers
Compact Baking System
Liquid Auto Refill System
Mixed Injection System Liquid Vaporizers
Compact Process Gas Monitor
Mixed Gas Generators MU Series
Mixed Injection System Liquid Vaporizer
Reticle/Mask Particle Detection System
Blanks Mask Particle Detection System
Reticle / Mask Particle Detection System
Compact Reticle/Mask Particle Detection System
Low-cost Reticle/Mask Particle Detection System
Piezo Actuator Valve
Reticle/Mask Particle Remover
Plasma Emission Controller
Semiconductor process monitoring for SC-2 process
Mass flow controllers
High Temperature Digital Mass Flow Controller
Mass Flow Controller
Digital Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
Pressure Insensitive Mass Flow Controller
Highly Sensitive Silica Monitor
Test Gas Generation Systems
Micro Volume pH Monitor
Digital Automatic Pressure Regulator
Direct Liquid Injection System
Capacitance Manometer
Digital Liquid Mass Flow Meters