Fluid Control
HORIBA have developed a line-up of fluid control, vaporization, analytical equipment and measuring systems tailored to every stage of the semiconductor, FPD manufacturing process, and the other wide range of manufacturing process. In all stages, from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency in your process.
Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.
Hideyuki Koishi, president of HORIBA STEC, Co., Ltd., a leading supplier of mass flow controllers (MFCs), one subsystem critical to semiconductor production, recently spoke with SEMI about the company’s response to the COVID-19 outbreak, the pandemic’s impact on the global supply chain and the company’s ability to meet the demand for MFCs.
Read moreThis leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.
The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal.
moreThe MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.
moreThe HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
By improving HORIBA's renowned spectroscopic measurement technology, the CS-700 realizes up to 5X improvement in measurement performance.
Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.
High stability measurement dissolved oxygen in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.
moreThe HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.
morePressure Insensitive Mass Flow Module
Stand-alone Type Chemical Concentration Monitor
Fiber Optic Type Chemical Solution Concentration Monitor
Fiber Optic Type Chemical Concentration Monitor
Optical Fiber Type Hot Phosphoric Acid Concentration Monitor
High Precision, High Stability Chemical Concentration Monitor
Non-Contact Chemical Concentration Monitor
Ultra-thin Mass Flow Controller
Exhaust Pressure Controller
Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry
Optical Emission Spectroscopy Etching End-point Monitor
Thermal Flow Splitter
Wafer Back Side Cooling System
Dissolved Oxygen Monitor in Low Concentration
Carbon Sensor Conductivity Meter (Low concentration type)
Industrial resistivity meter
Citric Acid Monitor
KOH Monitor
Wide range TMAH Concentration Monitor
High Precision TMAH Concentration Monitor
Carbon Sensor Conductivity Meter (High concentration type)
Carbon Sensor Conductivity Meter
Flat Carbon Sensor Conductivity meter
Carbon Sensor Resistivity Meter
2-Channel Resistivity Meter
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations
In-line Sensor & Auto Range Switching Concentration Monitor
HF / HCl Concentration Monitor
Low Concentration Type HF/HCl/NH3 Concentration Monitor
2-channel High Precision HF Concentration Monitor
Industrial pH meter
Dissolved Ozone Monitor
H2O2 Monitor
Gas Monitor for Chamber Cleaning End Point Monitoring
Vapor Concentration Monitor
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
Large Flow Liquid Source Vaporization Control System
Camera Endpoint Monitor based on Real Time Laser Interferometry
Digital Liquid Mass Flow Meters / Controllers
Compact Baking System
Liquid Auto Refill System
POCl3 Auto Refill System
Mixed Injection System Liquid Vaporizers
Compact Process Gas Monitor
Mixed Gas Generators MU Series
Mixed Injection System Liquid Vaporizer
Reticle/Mask Particle Detection System
Blanks Mask Particle Detection System
Reticle / Mask Particle Detection System
Compact Reticle/Mask Particle Detection System
Low-cost Reticle/Mask Particle Detection System
Piezo Actuator Valve
Reticle/Mask Particle Remover
Plasma Emission Controller
Semiconductor process monitoring for SC-2 process
Mass Flow Controller
High Temperature Digital Mass Flow Controller
Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
Pressure Insensitive Mass Flow Controller
Highly Sensitive Silica Monitor
Test Gas Generation Systems
Micro Volume pH Monitor
Digital Automatic Pressure Regulator
Direct Liquid Injection System
Capacitance Manometer
Digital Liquid Mass Flow Meters
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