Semiconductor

Fluid Control

HORIBA has a diverse range of products to cater for your fluid measurement and control requirements.

In a variety of manufacturing processes and research laboratories we offer precise measurement and reliable control of gas and liquids.  HORIBA is the recognised leader of high performance mass flow meters, mass flow controllers, automatic pressure controllers and liquid vaporization systems used throughout the cutting edge semiconductor manufacturing industry.


Mass Flow Control


HORIBA offer a wide variety of products for mass flow control in the form of controllers and meters. All our mass flow control products offer high accuracy and a fast response time. The range of gas flow controllers includes two types of sensors, pressure differential type and thermal type and various communication protocols; analogue, digital, DeviceNet™, PROFIBUS® and EtherCAT®. Choose between the high precision piezo stack valve or the more traditional solenoid valve to control your process gas.

All metal seal or Viton™ seal are available depending on your gas or liquid compatibility requirements.

Ultra wide range devices with a turndown ration of 1000:1 are available.

Multi gas (where the user can program the gas type) and multi range (where the user can configure the flow range) are available for when you need flexibility. These multigas multi range flow controllers also reduce the amount of inventory you need to hold.

View our MFC comparison chart here

To find out more about Mass Flow Controllers and their Product Characteristics click here

 


Liquid Source Vaporization System


HORIBA is one of the leading providers of high performance vaporizers. HORIBA’s liquid source vaporizers are used throughout the semiconductor manufacturing process to safely and efficiently deliver liquid precursors in gas phase to the point of use. Wherever a liquid precursor requires vaporizing in vacuum or atmospheric pressure, HORIBA have a vaporizing technique to offer a vaporizer to meet your requirements. HORIBA have more than 30 years vaporizing knowhow using direct injection, mixed injection, bubbling and baking vaporization techniques.

HORIBA’s Liquid Source Vaporizers can vaporize liquid materials stably and efficiently. Our vaporizers can also be linked to HORIBA’s range of automatic refill systems to provide safe and continuous delivery of vapor to the point of use. There is no downtime as bulk precursor tanks can be exchanged without interrupting the manufacturing process.


Pressure Control 


HORIBA offer a choice of products within pressure control to monitor, regulate or control the pressure in a gas supply line.

HORIBA pressure control products include digital high performance pressure sensors and piezo valves. They can help eliminate the effects of cross talk caused by switching high flow lines.

HORIBA wafer cooling system uses helium gas to reduce heat damage and our exhaust pressure controller maintains a consistent level of pressure in a chamber.


Gas Generator Systems


HORIBA gas generator systems are suitable for many applications. Due to the integration of HORIBA’s own mass flow controllers within our mixed gas generator systems we are able to offer high performance and accuracy.

HORIBA products are suitable for generating combustion gases supplied to burners and other industrial purposes, as well as laboratory uses in biotechnology, e.g. atmosphere gas supply systems inside fermenters, and the food and beverage markets.

HORIBA also have test gas generator systems for evaluating the performance of various kinds of gas sensors as well as systems for generating simulated gases for evaluating catalysts. The gas generator systems can be bespokely designed for individual customer  needs.

 

 

Browse Products

CRITERION D500
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Pressure Insensitive Mass Flow Module

Exhaust Pressure Controller EC-5000 Series
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Exhaust Pressure Controller

GR-300 Series
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Wafer Back Side Cooling System

Large Flow Liquid Source Vaporization Control System LE Series Image
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Large Flow Liquid Source Vaporization Control System

Digital Liquid Mass Flow Meters / Controllers LF-F/LV-F series
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Digital Liquid Mass Flow Meters / Controllers

Mixed Injection System Liquid Vaporizers MI-1000/MV-1000
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Mixed Injection System Liquid Vaporizers

Mixed Injection System Liquid Vaporizer MV-2000 Series
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Mixed Injection System Liquid Vaporizer

Piezo Actuator Valve PV Series
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Piezo Actuator Valve

Mass flow controllers SEC-400 series
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Mass flow controllers

High Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series
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High Temperature Digital Mass Flow Controller

Mass Flow Controller SEC-E Series
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Mass Flow Controller

Digital Mass Flow Controller SEC-N100 Series
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Digital Mass Flow Controller

Digital Mass Flow Controller SEC-R100 Series
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Digital Mass Flow Controller

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
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Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
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Pressure Insensitive Mass Flow Controller

Digital Automatic Pressure Regulator UR-Z700 series
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Digital Automatic Pressure Regulator

Direct Liquid Injection System VC Series
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Direct Liquid Injection System

XF-100 Series
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Digital Liquid Mass Flow Meters

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