Vacuum Ultra Violet Spectroscopy

From sub-assembly to complete Beamline

Taking the advantage of his leading position in the design and realization of diffraction grating, HORIBA Scientific has developed over the last past 35 years some of the most innovative Vacuum Ultra Violet (VUV) monochromators for synchrotron centers and scientific community. These monochromators, which combine the ultimate advanced diffraction grating technologies and for some ultra precise under vacuum mechanics, have been installed in several synchrotron centers and have demonstrated superior performances.

Today the development of new compact VUV sources and applications requires compact VUV monochromators. Based on diffraction grating capabilities and our large experience acquired in the difficult and demanding market of under vacuum synchrotron monochromators HORIBA Scientific has developed a wide offer of compact monochromators for application such as Extreme UV lithography or soft X-ray Photoemission Spectroscopy.

Using our double expertise in optical and mechanical design, as well as our large offer of monochromators we are able to propose a wide range of fully integrated VUV systems. These systems are provided with sources, sample chambers, monochromators and detection and are controlled by HORIBA Scientific software. Based on modularity designs, different configurations can be realized in order to answer to the requirements of your particular application.


Browse Products

Vacuum Spectrometer H30UVL
MoreVacuum Spectrometer H30UVL
Monograph for far and extreme ultraviolet
Vacuum Spectrometer H20UVL
MoreVacuum Spectrometer H20UVL
A Compact Monochromator for the 100-600 nm region
Vacuum Spectrometer - Custom Monochromators
MoreVacuum Spectrometer - Custom Monochromators
Vacuum monochromator to answer specific request
Vacuum Spectrometer - TGM300
MoreVacuum Spectrometer - TGM300
Monochromator with 300 mm focal length to cover the 10-300 nm spectral range
Vacuum Spectrometer - TGM1900
MoreVacuum Spectrometer - TGM1900
Monochromator with 1146 mm focal length to cover the 8-128 nm spectral range.
Vacuum Spectrometer - TGM1200
MoreVacuum Spectrometer - TGM1200
Monochromator with 1000 mm focal length to cover the 12.5-400 nm spectral range.
Vacuum Spectrometer - TGS300
MoreVacuum Spectrometer - TGS300
Toroidal Grating Spectrograph, coming from Synchrotron technologies
Vacuum System - VUV Transmission
MoreVacuum System - VUV Transmission
Use of H20UVL for VUV transmission
Vacuum System - VUV Fluorescence
MoreVacuum System - VUV Fluorescence
Fluorescence instrument based on H20-UVL and iHR320
Vacuum Spectrometer - VHR Series
MoreVacuum Spectrometer - VHR Series
Vacuum High Resolution monochromators for the 100-1500 nm region
Vacuum Spectrometer - PGM1000
MoreVacuum Spectrometer - PGM1000
Monograph to explore the 1- 125 nm
Vacuum Spectrometer - PGM200
MoreVacuum Spectrometer - PGM200
Plane Grating Monographs