Vacuum Ultra Violet Spectroscopy

Vacuum UV

from sub-assembly to complete Beamline

Taking the advantage of his leading position in the design and realization of diffraction grating, HORIBA Scientific has developed over the last past 35 years some of the most innovative Vacuum Ultra Violet (VUV) monochromators for synchrotron centers and scientific community. These monochromators, which combine the ultimate advanced diffraction grating technologies and for some ultra precise under vacuum mechanics, have been installed in several synchrotron centers and have demonstrated superior performances.

Today the development of new compact VUV sources and applications requires compact VUV monochromators. Based on diffraction grating capabilities and our large experience acquired in the difficult and demanding market of under vacuum synchrotron monochromators HORIBA Scientific has developed a wide offer of compact monochromators for application such as Extreme UV lithography or soft X-ray Photoemission Spectroscopy.

Browse Products

Custom VUV Monochromator - Ni-Gi Monochromator
MoreCustom Monochromators
Sample Chamber for VUV system
MoreSample chamber for VUV system
TGM300 Toroidal Grating Monochromator HORIBA
MoreVacuum Ultra Violet Spectrometer - TGM300
Monochromator with 300 mm focal length to cover the 10-300 nm spectral range
TGM 1900 VUV Toroidal Grating Monochromator HORIBA
MoreVacuum Ultra Violet Spectrometer - TGM1900
Monochromator with 1146 mm focal length to cover the 8-128 nm spectral range.
UV Plasma sources
MoreUV Plasma sources
TGM Toroidal Grating Monochromator HORIBA
MoreVacuum Ultra Violet Spectrometer - TGM1200
Monochromator with 1000 mm focal length to cover the 12.5-400 nm spectral range.
Deuterium lamp
MoreSource: Deuterium Lamp for VUV systems
H30 UVL VUV Spectrograph HORIBA
MoreVacuum Ultra Violet Spectroscometer - TGS300
Toroidal Grating Spectrograph, coming from Synchrotron technologies
VUV Transmission VUV oC Picture
MoreVUV Transmission
VUV Fluorescence oC Picture Fr
MoreVUV Fluorescence
UV Plasma sources
MoreUV Plasma sources
VUV Reflectance VUV oC Picture FR
MoreVacuum Ultra Violet System - VUV Reflectance
VUV Transmission VUV oC Picture
MoreVacuum Ultra Violet System - VUV Transmission
VUV Fluorescence oC Picture Fr
MoreVacuum Ultra Violet System - VUV Fluorescence
VHR 1000 Series Far UV Spectrometers
MoreVacuum Ultra Violet Spectrometer - VHR Series
Vacuum High Resolution monochromators for the 100-1500 nm region
PGM1000 Plane Grating Monographs
MoreVacuum Ultra Violet Spectrometer - PGM1000
PGM200 Plane grating monographs
MoreVacuum Ultra Violet Spectrometer - PGM200
Plane Grating Monographs