Vacuum Ultra Violet Spectroscopy

From sub-assembly to complete Beamline

Taking the advantage of his leading position in the design and realization of diffraction grating, HORIBA Scientific has developed over the last past 35 years some of the most innovative Vacuum Ultra Violet (VUV) monochromators for synchrotron centers and scientific community. These monochromators, which combine the ultimate advanced diffraction grating technologies and for some ultra precise under vacuum mechanics, have been installed in several synchrotron centers and have demonstrated superior performances.

Today the development of new compact VUV sources and applications requires compact VUV monochromators. Based on diffraction grating capabilities and our large experience acquired in the difficult and demanding market of under vacuum synchrotron monochromators HORIBA Scientific has developed a wide offer of compact monochromators for application such as Extreme UV lithography or soft X-ray Photoemission Spectroscopy.

Using our double expertise in optical and mechanical design, as well as our large offer of monochromators we are able to propose a wide range of fully integrated VUV systems. These systems are provided with sources, sample chambers, monochromators and detection and are controlled by HORIBA Scientific software. Based on modularity designs, different configurations can be realized in order to answer to the requirements of your particular application.

 

Browse Products

LSH Illuminator
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Compact Deuterium, Tungsten Halogen or Glow Bar Light Source

H30-UVL
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Vacuum Spectrometer: Monograph for far and extreme ultraviolet

H20-UVL
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Vacuum Spectrometer: A Compact Monochromator for the 100-600 nm region

Vacuum Spectrometer - Custom Monochromators
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Vacuum monochromator to answer specific request

TGM300
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Vacuum Spectrometer - Monochromator with 300 mm focal length to cover the 10-300 nm spectral range

TGM1900
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Vacuum Spectrometer - Monochromator with 1146 mm focal length to cover the 8-128 nm spectral range.

TGM1200
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Vacuum Spectrometer - Monochromator with 1000 mm focal length to cover the 12.5-400 nm spectral range.

TGS300
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Vacuum Spectrometer - Toroidal Grating Spectrograph, coming from Synchrotron technologies

VUV Transmission
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Use of H20UVL for VUV transmission

VUV Fluorescence
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Vacuum System - Fluorescence instrument based on H20-UVL and iHR320

Scopelite 200
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Microscope Illumination System

VHR Series
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Vacuum Spectrometer - Vacuum High Resolution monochromators for the 100-1500 nm region

PGM1000
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Vacuum Spectrometer -Monograph to explore the 1- 125 nm

PGM200
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Vacuum Spectrometer - Plane Grating Monographs

KiloArc
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Broadband Arc Lamp Light Source

PowerArc
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Broadband Xe Light Source

Tunable KiloArc
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Tunable 1000W Xe Light Source

Tunable PowerArc
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Tunable 75W Xe Light Source

DeltaRAM X
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Random Access Monochromator