HORIBA - Semiconductor

Welcome

In today’s society, the rate of change in product development is driven by consumer demand from many industries looking for differentiation in a crowed marketplace. At the heart of new product development are the advances and utilisation of new technologies underpinned by the use of advanced materials and semiconductors.  

HORIBA competencies in Fluid Control, Measurement and Analysis are enabling researchers, developers, original equipment manufacturers and end users to deliver novels solutions to global demands.  

Semiconductor Processing

Semiconductor Processing

Advanced Materials

Advanced Materials

Industry

Industry

Applications

Semiconductor Applications

Products

HORIBA Semiconductor Products

Features

Hideyuki Koishi, President of HORIBA STEC

A Critical Subsystem Supplier’s Response to COVID-19

Hideyuki Koishi, president of HORIBA STEC, Co., Ltd., a leading supplier of mass flow controllers (MFCs), one subsystem critical to semiconductor production, recently spoke with SEMI about the company’s response to the COVID-19 outbreak, the pandemic’s impact on the global supply chain and the company’s ability to meet the demand for MFCs.

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CRITERION D500

Pressure Insensitive Mass Flow Module

This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.

The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. 

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Mixed Injection System Liquid Vaporizer MV-2000 Series

The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

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High Precision, High Stability Chemical Concentration Monitor

The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
 By improving HORIBA's renowned spectroscopic measurement technology,  the CS-700 realizes up to 5X improvement in measurement performance.
 Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.

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Dissolved Oxygen Monitor in Low Concentration HF HD-960L

High stability measurement dissolved oxygen in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.

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Reticle / Mask Particle Detection System PR-PD2HR

The HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.

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