IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

The IR-400 offers real-time monitoring of the chamber cleaning end point during the deposition process. By optimizing the cleaning process, the IR-400 reduces cleaning time and gas usage. This reduction in cleaning gas usage leads to a reduction in chamber damage and increases the life times of all the systems components.

 

Segment: Semiconductor
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • Multi gas monitoring (Supported SiF4 andCF4) (IR-422)
  • High sensitivity
  • Gas cell heating function up to 180 dec.C
  • Multi-display
  • Analog/Digital communication.

 

Benefits of real-time end-point monitoring with the IR-400

  • Reduce time for chamber cleans
  • Reduce usage of cleaning gases
  • Repeatable and predictable clean process
  • Longer lifetime of chamber components

 

Applications example

  • Monitoring chamber exhaust line

Monitoring chamber exhaust line

 

Measurement Techniques

Reliable, High-performance
Non-dispersive Infrared Absorptiometry (NDIR)

The infrared absorptiometry method employed by the IR-300 Series uses the principle of the absorption by gas molecules of the infrared light emitted from an infrared light source. A sample output from a sample that has absorbed the gas being measured is compared to a reference output with no absorbance, and the result is converted into a gas concentration. The use of this double beam method enables long-term, stable measurement results to be obtained.

 Reliable, High-performance Non-dispersive Infrared Absorptiometry (NDIR)

Reliable, High-performance Non-dispersive Infrared Absorptiometry (NDIR)

 

The optical system is made up of a light source, gas cell and double beam detectors. The stability of the double beam detector has been proven over a period of more than 40 years.

 

External Dimension

External Dimension of Gas Monitor IR-400

 

Sterilization Process in Food and Beverage Manufacturing
Sterilization Process in Food and Beverage Manufacturing

Solicitud de Información

Tiene alguna pregunta o solicitud? Utilice este formulario para ponerse en contacto con nuestros especialistas.

* Estos campos son obligatorios.

Related products

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

VG-200S
VG-200S

Capacitance Manometer

51 series
51 series

Explosion-proof Gas Analyzer

AP-370 Series
AP-370 Series

Air Pollution Monitor

APCA-370
APCA-370

Ambient Carbon Dioxide Monitor

APHA-370
APHA-370

Hydrocarbon Monitor / THC Analyser

APMA-370
APMA-370

Ambient Carbon Monoxide Monitor

APNA-370
APNA-370

Ambient NOx Monitor

APNA-370/CU-2
APNA-370/CU-2

Ambient Ammonia Monitor

APOA-370
APOA-370

Ambient Ozone Monitor

APSA-370
APSA-370

Ambient Sulfur Dioxide Monitor

APSA-370/CU-1
APSA-370/CU-1

Ambient Hydrogen Sulfide Monitor

AQMS
AQMS

Ambient Air Quality Monitoring System

CEMS
CEMS

Continuous Emission Monitoring System

ENDA-5000 series
ENDA-5000 series

Stack Gas Analysis System

FTX-ONE-CL
FTX-ONE-CL

FTIR Exhaust Gas Analyzer Dilute Measurement Type

FTX-ONE-CS/RS
FTX-ONE-CS/RS

FTIR Exhaust Gas Analyzer Direct Measurement Type

GA-370
GA-370

Trace Gas Monitor

GI-700 series
GI-700 series

Stack Gas Analyzer

IR-300
IR-300

Vapor Concentration Monitor

MEXA-1170HCLD
MEXA-1170HCLD

Heated Type NOx Analyzer

MEXA-1170HFID
MEXA-1170HFID

Heated Type THC Analyzer

MEXA-1170SX
MEXA-1170SX

Motor Exhaust Gas Sulfur Analyzer

MEXA-1300R
MEXA-1300R

Motor Exhaust Gas Analyzer

MEXA-584L
MEXA-584L

Automotive Emission Analyzer

MEXA-ONE
MEXA-ONE

Motor Exhaust Gas Analyzer

MEXA-ONE-FT
MEXA-ONE-FT

FTIR Motor Exhaust Gas Analyzer

MEXA-ONE-QL-NX
MEXA-ONE-QL-NX

Laser Spectroscopic Motor Exhaust Gas Analyzer

OBS-ONE GS Unit
OBS-ONE GS Unit

On-board Emissions Measurement System

OBS-ONE-XL (IRLAM)
OBS-ONE-XL (IRLAM)

On-board NH3/N2O Measurement System for real-world driving

PG-300 series
PG-300 series

Portable Gas Analyzer

Process
Process

Process Analyzer System

TX-100
TX-100

Tunable Laser Gas Analyzer

VA-5000 / VA-5000WM Series
VA-5000 / VA-5000WM Series

Multi-Component Gas Analyzer

51 series
51 series

Explosion-proof Gas Analyzer

AP-370 Series
AP-370 Series

Air Pollution Monitor

AP-380 Series
AP-380 Series

Air Quality Monitor

APCA-370
APCA-370

Ambient Carbon Dioxide Monitor

APMA-370
APMA-370

Ambient Carbon Monoxide Monitor

CEMS
CEMS

Continuous Emission Monitoring System

EMGA-921
EMGA-921

Hydrogen Analyzer

EMGA-Expert
EMGA-Expert

Oxygen/Nitrogen/Hydrogen Analyzer
(Flagship High-Accuracy Model)

EMGA-Pro
EMGA-Pro

Oxygen/Nitrogen Analyzer (Entry Model)

EMIA-Expert
EMIA-Expert

Carbon/Sulfur Analyzer
(Flagship High-Accuracy Model)

EMIA-Pro
EMIA-Pro

Carbon/Sulfur Analyzer (Entry Model)

EMIA-Step
EMIA-Step

Carbon/Sulfur Analyzer (Tubular Electric Resistance Heating Furnace Model)

ENDA-5000 series
ENDA-5000 series

Stack Gas Analysis System

ENDA-7000 Series
ENDA-7000 Series

Stack Gas Analyzer

GA-370
GA-370

Trace Gas Monitor

GI-700 series
GI-700 series

Stack Gas Analyzer

IR-300
IR-300

Vapor Concentration Monitor

LO-300
LO-300

Laser scanning oil film detector

MEXA-1300R
MEXA-1300R

Motor Exhaust Gas Analyzer

MEXA-584L
MEXA-584L

Automotive Emission Analyzer

MEXA-ONE
MEXA-ONE

Motor Exhaust Gas Analyzer

OBS-ONE GS Unit
OBS-ONE GS Unit

On-board Emissions Measurement System

OBS-ONE-XL (IRLAM)
OBS-ONE-XL (IRLAM)

On-board NH3/N2O Measurement System for real-world driving

OCMA-500
OCMA-500

Oil concentration meter

OCMA-550
OCMA-550

Oil concentration meter

PG-300 series
PG-300 series

Portable Gas Analyzer

TCA-5000
TCA-5000

Hydrogen Gas Analyzer

TX-100
TX-100

Tunable Laser Gas Analyzer

VA-5000 / VA-5000WM Series
VA-5000 / VA-5000WM Series

Multi-Component Gas Analyzer

Corporate