Reticle / Mask Particle Detection System
Next-generation inspection platform to meet future needs
PD-Xpadion is the latest generation of the HORIBA Particle Inspection product line. Based on an innovative modular platform design, PD Xpadion is the right tool to meet current and future needs of Mask & Pellicle inspection in the lithography and mask production processes. Fab automation, combined with a suite of HORIBA’s core technology, allow users to expand the PD Xpadion system to include not only particle inspection and detection, but also particle characterization by Raman analysis, pellicle film thickness and uniformity, and pellicle health monitoring tools.
Selection of countries and territories where this product is available:
China,Germany,Ireland,Israel,Italy,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
View the complete list here.
|Dimensions||(W) x (D) x (H)||1,000 x 1,850 x 1,600 mm|
|Inspection Particle Size||Pattern||0.5 μm / 0.35 μm (0.1 μm : Blank Mask)*¹|
|Glass||5.0 μm (0.5 μm - : High Sensitivity Option)*¹|
|Pellicle||10.0 μm (0.5 μm - : High Sensitivity Option)*¹|
|Light Source||633 nm He-Ne laser or 488 nm Solid-state laser|
|Reticle Size||5 inch - 9 inch|
|Case openers||SMIF POD, Compatible with various cases|
|Throughput||Approx. 12 min (From inspection start to test result display for 2 surface (6 inch) inspection)|
|Panel Surface Treatment||Stainless Steel|
|Installation Environment||Cleanliness||Class6 ISO standards or better|
|Temperature||23 +/- 1°C|
|Utilities||Power||AC200-240 V, 2 kVA 50/60Hz, Single Phase|
|Vacuum Source||Pressure -80 kPA or less|
|Compressed Air||0.6 MPa - 0.7 MPa|
New Function / Option
|Reticle Edge Handling||Yes|
|Auto Capture / Auto Sizing||Yes|
|Data Browser Function||Yes|
|False Detection Reduction Function||Yes|
*PSL equivalent , HORIBA recommends customer sample test for inspection sensitivity validation.
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