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PD Xpadion Brochure
PD Xpadion
Reticle / Mask Particle Detection System
Next-generation inspection platform to meet future needs
PD-Xpadion is the latest generation of the HORIBA Particle Inspection product line. Based on an innovative modular platform design, PD Xpadion is the right tool to meet current and future needs of Mask & Pellicle inspection in the lithography and mask production processes. Fab automation, combined with a suite of HORIBA’s core technology, allow users to expand the PD Xpadion system to include not only particle inspection and detection, but also particle characterization by Raman analysis, pellicle film thickness and uniformity, and pellicle health monitoring tools.
Segment: Semiconductor
Division: Metrology
Manufacturing Company: HORIBA, Ltd.
Selection of countries and territories where this product is available:
China,Germany,Ireland,Israel,Italy,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
View the complete list
here.
- Adjustable detection sensitivity by utilizing a combination of optical systems
- OHT, EFEM, multi-port, multi-slot adaptation
- Ability to reanalyse inspection data for faster inspection recipe optimization
- Integration options with other HORIBA sensor products like Raman spectroscopy and Ellipsometry
- False detection reduction function
- Innovative software with improved usability
| Model | PD Xpadion | |
| Dimensions | (W) x (D) x (H) | 1,000 x 1,850 x 1,600 mm |
| Weight | Approx. 950kg | |
| Inspection Particle Size | Pattern | 0.5 μm / 0.35 μm (0.1 μm : Blank Mask)*¹ |
| Glass | 5.0 μm (0.5 μm - : High Sensitivity Option)*¹ | |
| Pellicle | 10.0 μm (0.5 μm - : High Sensitivity Option)*¹ | |
| Light Source | 633 nm He-Ne laser or 488 nm Solid-state laser | |
| Reticle Size | 5 inch - 9 inch | |
| Case openers | SMIF POD, Compatible with various cases | |
| Throughput | Approx. 12 min (From inspection start to test result display for 2 surface (6 inch) inspection) | |
| Panel Surface Treatment | Stainless Steel | |
| Installation Environment | Cleanliness | Class6 ISO standards or better |
| Temperature | 23 +/- 1°C | |
| Utilities | Power | AC200-240 V, 2 kVA 50/60Hz, Single Phase |
| Vacuum Source | Pressure -80 kPA or less | |
| Compressed Air | 0.6 MPa - 0.7 MPa | |
New Function / Option | Reticle Edge Handling | Yes |
| Auto Capture / Auto Sizing | Yes | |
| Data Browser Function | Yes | |
| False Detection Reduction Function | Yes | |
*PSL equivalent , HORIBA recommends customer sample test for inspection sensitivity validation.
