CS-153N HF/HNO3 Monitor

24-hour real-time monitoring of HF/HNO3 solution concentrations in semiconductor wet-etching processes

iHR320 Imaging Spectrometer

The iHR320 provides a platform for spectroscopic measurements for years to come.

iHR550 Imaging Spectrometer

The iHR550 spectrometer offers a unique combination of spectral quality, flexibility, robustness, and ease of use that makes it the ideal general-purpose spectrometer for performing spectral measurements with quality results.

InGaAs Array Detector

The HORIBA Jobin Yvon family of NIR array detectors, the Symphony Series, feature spectroscopic grade InGaAs detectors in a linear array of 512 or 1024 pixels.

MicroHR Spectrometer

The MicroHR is a short focal length Czerny-Turner spectrometer that can be used as an imaging spectrograph or a scanning Monochromator. As a spectrograph, it features either a fixed or micrometer adjustable entrance slit with out unique Quick-Align CCD adapter.

Motorized MicroHR Spectrometer

Available as an imaging spectrograph or scanning monochromator, the new automated MicroHR allows users to make rapid and precise measurements, offering a degree of versatility not found in comparable focal length spectrometers.

MicroHR NIR Spectrometer

The NIR MicroHR is a 140 mm focal length spectrometer featuring gold optics (for increased through-put in the NIR spectral region) and interchangeable gold gratings for optimization of optical components and wavelength range selection.

PR-PD2HR Particle detection system

Achieves dramatic cost reductions in advanced mask inspections

Standard Clean 1 (SC-1) chemical concentration monitor image

High-speed response and compact profile of the CS-131, SC-1 (standard clean) Solution Concentration Monitor makes it the ideal choice for single wafer and batch type cleaning devices.