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〈Catalog〉For Semiconductor Manufacturing Process Dissolved Oxygen in Low Concentration HF Meter HD-960L
| Model Name | HD-960L | |
|---|---|---|
| Measurement range Repeatability | Measurement range | Repeatability |
| 0.0 to 200.0 μg/L | +/-1% FS | |
| 200 to 2000μg/L | +/-1% FS | |
| 2.00 to 20.00mg/L | +/-1% FS | |
| Conditions measurement sample | Sample Pressure | 0 to 0.1MPa |
| Sample flow rate | 15 to 200ml /min. | |
| Sample temperature | 10 to 45 °C | |
| Sample HF concentration | 0 to 5000ppm | |
| Transmission output | 4-20mA, 4points | |
| Contact output | 4 points | |
| Power supply | DC24V +/- 10% 15W | |
| Combined Sensor unit | DO-100 | |
| Combined Sensor | #5600 | |
| Sample inlet/outlet | 1/4 inch tube | |
Schematics
