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Mass Flow Control

HORIBA offer a wide variety of products for mass flow control in the form of controllers and meters. All our mass flow control products offer high accuracy and a fast response time. The range of gas flow controllers includes two types of sensors, pressure differential type and thermal type and various communication protocols; analogue, digital, DeviceNet™, PROFIBUS® and EtherCAT®. Choose between the high precision piezo stack valve or the more traditional solenoid valve to control your process gas.

All metal seal or Viton™ seal are available depending on your gas or liquid compatibility requirements.

Ultra wide range devices with a turndown ration of 1000:1 are available.

Multi gas (where the user can program the gas type) and multi range (where the user can configure the flow range) are available for when you need flexibility. These multigas multi range flow controllers also reduce the amount of inventory you need to hold.

View our MFC comparison chart here

Related Products

D700MG
mehr D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700WR
mehr D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
mehr DZ-100

Ultra-thin Mass Flow Controller

SEC-Z700S Series
mehr SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Controller

FS-3000
mehr FS-3000

Thermal Flow Splitter

SEC-N100 Series
mehr SEC-N100 Series

Digital Mass Flow Controller

SEC-8000 F/D/E Series
mehr SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-Z700X Series
mehr SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

SEC-400 Series
mehr SEC-400 Series

Mass Flow Controller

SEC-E Series
mehr SEC-E Series

Mass Flow Controller

SEC-Z500X Series
mehr SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

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