Thermal Flow Splitter
FS-3000 combines HORIBA STEC’s mass flow controller (MFC) and MuCube (Master controller). By controlling MFC from MuCube equipped with the HORIBA STEC’s proprietary control algorithm, FS-3000 achieves stable splitting control.
The control algorithm realizes stable flow rate splitting control by controlling flow rate ratios, while controlling the pressure of the upper stream of FS-3000 using HORIBA STEC’s original control optimization technology. Furthermore, even when the splitting ratios are altered, the control algorithm realizes high-speed response to flow rate splitting.
|Channels||2-15 Channels||Operating temperature||5-50°C (recommended range: 15-45°C)|
|Introducing flow rate||Depends on channels and introducing flow rate||Proof pressure||1000 kpa (G)|
|Ratio setting range||Depends on channels and introducing flow rate||Mounting orientation||Free|
|Supply pressure condition||Depends on channels and introducing flow rate||Control interface||RS-485, DeviceNetTM|
|Valve type||O: Normally open C: Normally close||Power supply||Master, Slave DC24V|
(Conforming to ODVA standards)
|Response *||Depends on channels and introducing flow rate|
*The response time of each channel is calculated with the response time being the time when the flow rate output of this product reaches 98% of the flow rate setting change amount. The slowest response time is the response time of the flow splitter.
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