LSC series

Compact Baking System LSC series

Compact Baking System

HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.

 

Segment: Semiconductor
Produktionsfirma: HORIBA STEC, Co., Ltd.
  • High Flow Rate Gasification
  • The LSC-A100 provides stable gasification of materials such as TEOS 600SCCM and H2O 2SLM
  • All device maintenance can be performed at the front of the unit
  • An optional PocketPC type PDA can be used to monitor the operating conditions of the LSC and to record and analyze operation logs.

 

 

 

Flow rate generated

H2O 2SLM, TEOS 600 SCCM (Max.)

Operating pressure

Max. 1.33kPa

Source tank volume

2.7L

Heat regulation method

PID control by the heat regulator

Liquid surface detection method

Floating switch

Internal mass flow controller

SEC-8400 series

Air pressure valve

Bellows type

Materials in liquid connection and gas contact area

SUS316L, PFA

Operating Temperature

20 to 35°C

External input

Air pressure valve open/close, mass flow controller flow rate setting signal (0 to 5 V DC/0 to 100% F.S.), emergency stop signal, auto zero signal (option)

External output

Temperature alarm, liquid level H.H. alarm, liquid level signal (H, M, L), READY signal, mass flow controller flow rate output signal ((0 to 5 V DC/0 to 100% F.S.), thermoregulated bath internal fan stop alarm, valve voltage monitor (option)

Power source

AC 100 V, single phase 50/60 Hz, 1.5 kVA

Other

Auto-recharge system: Can be connected to LU series.

  

* The flow rate control range varies with the type of liquid.

* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).

 

External Dimension

 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Liquid Source Vaporization and Supply in Research and Testing Laboratories
Liquid Source Vaporization and Supply in Research and Testing Laboratories

Informationsanfrage

Sie haben Fragen oder Wünsche? Nutzen Sie dieses Formular, um mit unseren Spezialisten in Kontakt zu treten. * Diese Felder sind Pflichtfelder.

Related products

More EC-5000 Series

Exhaust Pressure Controller

More EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

More EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

More IR-300

Vapor Concentration Monitor

More LE Series

Large Flow Liquid Source Vaporization Control System

More LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

More LU Series

Liquid Auto Refill System

More LU-4000 Series

POCl3 Auto Refill System

More MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

More Micropole System

Residual Gas Analyzer

More MV-2000

Mixed Injection System Liquid Vaporizer

More PV Series

Piezo Actuator Valve

More SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

More SEC-N100 Series

Digital Mass Flow Controller

More SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

More UR-Z700 Series

Digital Automatic Pressure Regulator

More VC Series

Direct Liquid Injection System

More CRITERION D500

Pressure Insensitive Mass Flow Module

More CVS-ONE

Constant Volume Sampler

More DZ-100

Ultra-thin Mass Flow Controller

More EXFM-ONE

Ultrasonic Exhaust Flow Meter

More FS-3000

Thermal Flow Splitter

More LE Series

Large Flow Liquid Source Vaporization Control System

More LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

More LU Series

Liquid Auto Refill System

More LU-4000 Series

POCl3 Auto Refill System

More MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

More MV-2000

Mixed Injection System Liquid Vaporizer

More PTFM-1000V2

Pitot Tube Flow Meter

More PTFM-ONE-DT

Dual Pitot Tube Flow Meter

More SEC-400 Series

Mass Flow Controller

More SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

More SEC-E Series

Mass Flow Controller

More SEC-N100 Series

Digital Mass Flow Controller

More SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

More SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Controller

More SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

More VC Series

Direct Liquid Injection System

More XF Series

Digital Liquid Mass Flow Meters

Corporate