UV Plasma sources

The UVS300 and UVS 10/35 are UV Plasma sources with high intensity, working with different gases.

Segment: Scientific
Manufacturing Company: HORIBA France SAS

Model

UVS 10/35

UVS300

Type

Plasma source

Duo plasmatron source

Supported gases

He – H - Ne – Ar – Kr - Xe

He – H – Ne - Ar

Power

200 W

300 W

Vacuum flange

DN40CF

DN40CF

Cooling

Air cooled

Water cooled

Source point diameter

few mm

50 µm

Flux

8.1015 photons/sr.s

2.1016 photons/sr.s

Overall length

245 mm

305 mm

Weight

3 kg

12  kg

Power supply

Included in the package

Included in the package

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