R-CLUE

Raman Photoluminescence & Cathodoluminescence

The R-CLUE all-in-one fiber coupled solution offers colocalized Raman, PhotoLuminescence and Cathodoluminescence Imaging and spectroscopy analysis.

R-CLUE takes benefit of HORIBA Scientific extended know-how in Raman and PL spectroscopy with field-proven optical components, guaranteeing optical stability, reproducibility and collection efficiency.

Thanks to its compact footprint inside and outside the SEM and its deported spectroscopy modules, it can be installed on a large range of specimen chambers.

R-CLUE is fully automated and computer controlled, from retractable parabolic mirror position to Rayleigh filter change and grating and detector selection, allowing quick adoption by even non spectroscopist users.

Controlled by Labspec 6 Simply Powerful software suite, R-CLUE features advanced unique functionalities for both fast imaging and spectroscopy analysis (KIA spectral database, SWIFT, cosmic ray removal, peak fitting, particle finder, mosaic, multivariate analysis, advanced 3D display…)

Segment: Scientific

Division: Custom Spectroscopy Solutions

Manufacturing Company: HORIBA France SAS

All-in-one fully automated solution for high-end Research labs, featuring:

Fiber coupled interface
Colocalized laser and e-beam excitations
Fully computer controlled
Multi-wavelengths Raman lasers
Injection-rejection Raman filters
Field upgradeable
Built-in video camera

Spectral Range	UV-VIS or VIS-NIR fiber dependent
Diamond turned collection mirror	parabolic mirror short & long working distances
200 mm retractable interface	Motorized with fine adjustment under vacuum
CL imaging detector	Standard: Panchromatic and monochromatic CL with ambient PMT Options: Cooled PMT, IGA monochannel, photon counting PMT, time resolved PMT, RGB filters
CL spectrometer type	iHR 320, iHR 550 (320 to 550 mm focal length),up to 3 grating turret, 2-entrance/2exit
Upgrade available	Upgrade from LabRAM HR Series
Electron beam control	CL-LINK for multiple acquisition processing (Analog, pulse mode, SE), Mapping linescan, point measurement, Synchronization with spectroscopic detection, Control by external scan input of Electron Microscope
Software	Spectroscopy and imaging powered by LabSpec 6™
Remote Controller	Optional
Clue Accessories	Polarization, ND filter, camera, EMCCD etc
SEM Accessories	LN2, He cryo-stages, EBIC detector and many other accessories to complement our CLUE Series add-on detectors

Defect Evaluation of GaN Epitaxial Wafer by CL

The threading dislocation occurs easily in GaN crystal grown on sapphire substrates. It is said that this is caused by the large lattice mismatch of sapphire and GaN. The crystal may seem to be uniform in the SEM image, but the dark spot such as the threading dislocation can be observed when measuring the CL intensity image at the wavelength (362nm) which corresponds to the band edge emission.