Wide range TMAH Concentration Monitor
Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Wide measurement range : 0 - 10 %. Have the chemical resistant carbon sensor.
Indication Converter
| Model | HE-960H-TM |
|---|---|
| Measurement range | 0 - 10% |
| Ambient environment | Temperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation) |
| Power supply | 24 V DC ±10%, 10 W (max.) |
| Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) |
| Mass | Approx. 550 g |
| Conforming standards | CE marking, FCC Part 15 |
| Compatible sensors | FES-510 series (flow-type carbon sensor) |
Schematics
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