Chemical Concentration Monitor for Semiconductor Manufacturing Equipment Launched

|   Press release

  

HORIBA Advanced Techno, Co., Ltd. launched the CS-900, a non-contact chemical concentration monitor, on December 11. The monitor performs non-contact measurement of chemicals used in semiconductor manufacturing processes such as cleaning and etching.
Chemicals that affect the homogeneity of surface treatment in the semiconductor manufacturing process require exact control. The CS-900 chemical concentration monitor measures chemicals delivered through piping without touching the chemicals, enabling safe and stable measurement results without causing leaks or contamination. HORIBA Advanced Techno aims to sell 150 units in the first year and more than 1,000 units by the year 2023 both in and outside of Japan.
 

Background

Chemical processing in the semiconductor manufacturing process is a key process that requires the exact control of chemicals due to its impact on the homogeneity of surface treatment and its effect on throughput.
Conventionally, chemical concentration was measured by directly connecting the sensor unit to the pipe carrying the chemical, or by branching a piping route to the measuring unit. Problems with these methods include contamination of the chemical, cumbersome connection work with the piping, and chemical leakage. HORIBA Advanced Techno developed a sensor unit that easily installs around the pipe, making non-contact chemical measurements possible. This provides safe and stable measurements by eliminating the source of chemical leaks and contamination. The sensor unit can be installed without cutting existing piping, which allows for shorter installation work time and reduced workload.
HORIBA Advanced Techno will leverage its global share of 70% for its CS chemical concentration monitor series and aims at expanding sales even further.
 

Features

  • Non-contact design for zero contamination
    Preventing chemical leakage and contamination offers safe and stable measurements that contribute to improved throughput and reduced chemical usage.
  • LED light source for extended service life
    LEDs are used to extend the service life of the light source.
     
  • Provides stable measurement of high temperature chemicals (20 to 80°C)
    A completely redesigned optics system and improved processing enable the stable measurement of chemicals used at high temperatures essential for today’s most advanced chemical processing.

 

Product overview

NameCS-900 Chemical Concentration Monitor
DimensionsDisplay unit    96 x 135 x 96 mm (W x D x H)
Sensor unit    238 x 140 x 146 mm (W x D x H)
 (excludes protrusions)
Measurement theoryAbsorption spectroscopy
Chemical temperature 20 to 80°C
WeightDisplay unit approx. 0.9 kg
Sensor unit approx. 2.9 kg
CS-900 Chemical Concentration Monitor  From left: Display unit and sensor unit