Mass Flow Checker MFT-20

Mass Flow Checker MFT-20

The MFT-20 offers a way of checking whether the mass flow controller (MFC) is operating normally by driving and controlling the MFC while monitoring the input and output voltages. In this manner, any abnormalities in the MFC or power supply can be quickly examined before being removed from the system piping.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • Simplifies the checking procedure (no need to remove the piping)
  • No need for a power supply (operates on power from the existing signal cable)
  • Capable of fully opening and closing the valve
  • Automatic zero function available (only for SECs equipped with an automatic zero function)

Display

DC 20 V full scale/LCD display

Internal standard voltage

+5 VDC

Power source voltage

+7 to +30 VDC (normally used with +15 V mass flow controllers)

Power drain

6 mA or lower, in the voltage range shown above

Weight

400 g

Operating temperature

0 to 50°C

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