Smart SE

SmartSE-HORIBA

Powerful and Cost Effective Spectroscopic Ellipsometer

 

Smart SE, Powerful and Cost Effective Spectroscopic Ellipsometer
 
The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes thin film thickness from a few Angstroms to 20µm, optical constants (n,k), and thin film structure properties (such as roughness, optical graded and anisotropic layers, etc).

The spectral range from 450 to 1000nm is measured in a few seconds and ellipsometric data are analyzed using the DeltaPsi2 software platform. The software integrates two levels of software to fulfil both routine analysis with predefined recipes and advanced analysis with state-of-the art ellipsometric modelling.

The Smart SE ellipsometer is a cost effective thin film R&D tool with no compromise on features, and delivers research grade performance at an economical price. It provides an integrated vision system for accurate spot positioning, seven automated micro spots with size ranging down to a few tens of microns for measurement of small features, and the ability to measure the complete 16-element Mueller matrix in just a few seconds for the study of complex samples.

The flexible design of the Smart SE enables full automation of the sample stage and goniometer as well as in-situ use on process chambers. It matches any application or budget for a wide variety of application areas including microelectronic, photovoltaic, display, optical coatings, surface treatments and organic compounds.

 

 

Segment: Scientific
Division: Surface Characterization
Manufacturing Company: HORIBA France SAS
  • Fast & accurate
  • Easily upgradeable
  • Visualization of your spot sample

 

 

Standard Configurations
Spectra range:450nm to 1000nm
Spectra resolutionBetter than 3nm
Light sourceCombined Halogen and Blue LED
Measurement time<1sec to 10 sec
Beam size

75µm * 150µm, 100µm * 250µm,

100µm * 500µm, 150µm * 150µm,

250µm * 250µm, 250µm * 500µm,

500µm*500µm

Angle of incidence450 to 900 by step of 50
Sample sizeUp to 200mm
Sample alignmentManual 17mm height adjustement and tilt
Dimensions100cm * 46cm * 23cm(W*H*D)
Performances
Straight-through air accuracyΨ=450±0.050 Δ=00±0.20
Thickness accuracy on 1000 Å Oxide0.04%
Thickness repeatability on 1000 Å Oxide±0.02%

 

 

Options

  • Automated angle of incidence from 450 to 900 by step of 0.010
  • Motorized stage for 200mm and 300mm sample sizes
  • In-situ adjustable flanges for mounting on process chamber
  • Heating and cooling stages
  • Liquid and electrochemical cells
  • Cross hair auto-collimation system
Battery Evaluation in Electrical Equipment
Battery Evaluation in Electrical Equipment

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

Auto SE
More Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

EMGA-920
More EMGA-920

Oxygen/Nitrogen Analyzer

EMGA-921
More EMGA-921

Hydrogen Analyzer

EMGA-930
More EMGA-930

Oxygen/Nitrogen/Hydrogen Analyzer

EMIA-Expert
More EMIA-Expert

Carbon/Sulfur Analyzer

EMIA-Pro
More EMIA-Pro

Carbon/Sulfur Analyzer

EMIA-Step
More EMIA-Step

Carbon/Sulfur Analyzer

GD-Profiler 2™
More GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

GDOES Software
More GDOES Software

Quantum and Image

LabRAM HR Evolution
More LabRAM HR Evolution

Confocal Raman Microscope

Plasma Profiling TOFMS
More Plasma Profiling TOFMS

Ultra-Fast, Sensitive and High Resolution Depth Profiling technique

UVISEL 2 VUV
More UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

UVISEL Plus
More UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

XGT-7200
More XGT-7200

X-ray Analytical Microscope

XGT-9000
More XGT-9000

X-ray Analytical Microscope

XploRA™ PLUS
More XploRA™ PLUS

Raman Spectrometer - Confocal Raman Microscope

Auto SE
More Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

Auto Soft
More Auto Soft

Intuitive Auto-Soft Interface for the Auto SE and Smart SE

Customize with VBS
More Customize with VBS

Scripts and ActiveX

DeltaPsi2 Software
More DeltaPsi2 Software

A Platform for HORIBA Scientific Ellipsometers

Gratings - OEM Diffraction Grating
More Gratings - OEM Diffraction Grating

OEM gratings design and production capabilities

LEM-CT-670-G50
More LEM-CT-670-G50

Real Time Interferometric Process Monitor [CCD] Laser Interference Camera

MESA-50
More MESA-50

X-Ray Fluorescence Analyzer

MESA-50K
More MESA-50K

X-Ray Fluorescence Analyzer

PP-TOFMS Software
More PP-TOFMS Software

Ergonomic software for data acquisition, data treatment and technical support

Spectroscopic Ellipsometer - Large area mapping Ellipsometers
More Spectroscopic Ellipsometer - Large area mapping Ellipsometers

For Flat Panel Display and Photovoltaic Industries

Template and Methods
More Template and Methods

Recall settings, and automate processes

UVISEL 2
More UVISEL 2

Spectroscopic Ellipsometer

UVISEL 2 VUV
More UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

UVISEL Plus
More UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

UVISEL Plus In-Situ
More UVISEL Plus In-Situ

In-situ spectroscopic ellipsometer for real-time thin film monitoring

XGT-7200
More XGT-7200

X-ray Analytical Microscope

XGT-9000
More XGT-9000

X-ray Analytical Microscope

Auto SE
More Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

Spectroscopic Ellipsometer - In-Line
More Spectroscopic Ellipsometer - In-Line

In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems

Spectroscopic Ellipsometer - Large area mapping Ellipsometers
More Spectroscopic Ellipsometer - Large area mapping Ellipsometers

For Flat Panel Display and Photovoltaic Industries

UVISEL 2
More UVISEL 2

Spectroscopic Ellipsometer

UVISEL 2 VUV
More UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

UVISEL Plus
More UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

UVISEL Plus In-Situ
More UVISEL Plus In-Situ

In-situ spectroscopic ellipsometer for real-time thin film monitoring