Pressure-based Mass Flowmetry

Structure

Starting from the gas inlet, the device consists of an external particle protection filter, an inlet line pressure sensor, a control valve, a pair of pressure sensors, a flow resistor (flow restrictor), and a digital electric circuit. Not only does the gas channel contain no heat source, it is made entirely from metallic materials and has a polished interior surface as standard, making this an ultra-clean model.

Browse Products

CRITERION™ Series (D700uF)
CRITERION™ Series (D700uF)

Micro Flow Pressure Insensitive Mass Flow Module D700uF

CRITERION™ Series (D700T)
CRITERION™ Series (D700T)

Best Performance Pressure Insensitive Mass Flow Module D700T

CRITERION™ Series (D700MG)
CRITERION™ Series (D700MG)

High Speed & Precision Pressure Insensitive Mass Flow Module D700MG

CRITERION™ Series (D700WR)
CRITERION™ Series (D700WR)

Wide Range Pressure Insensitive Mass Flow Module D700WR

CRITERION™ Series (DZ-100)
CRITERION™ Series (DZ-100)

Ultra-thin Mass Flow Module DZ-100

VG S Series
VG S Series

Capacitance Manometer

CRITERION™ Series (D500)
CRITERION™ Series (D500)

Pressure Insensitive Mass Flow Module D500