OLED technology is playing an important role in display technology since it offers several advantages compared to LCD technology among which its efficiency and high display quality, a high contrast rate, lower energy consumption, etc. Furthermore, this technology has an ecological aspect since it uses organic recyclable materials.
However the improvement of the performances of the devices produced by these technologies requires a precise knowledge of their optical and structural properties that could be provided by spectroscopic ellipsometry. This non destructive and sensitive optical technique is able to characterize layers with thicknesses of some angstroms and provides information regarding the state of the surface, the microstructure of composite materials, etc.
The aim of this work is to show the capabilities of the Auto-SE ellipsometer to perform localized measurements at short scale thanks to its very small light-beam spots and the unique integrated MyAutoView vision system. Indeed, these features enable to target very small areas and thus, get ride of the averaging effects resulting from using the common large spots.
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