Spectroscopic Ellipsometers are optical thin film measurement tools for determining film thickness and optical constants (n,k) of thin film structures. They are widely used in the microelectronics, display, photonics, photovoltaics, lighting, optical and functional coating, biotechnology industries.
Advantages of Ellipsometry:
When compared with other optical metrology instruments the unique strength of spectroscopic ellipsometers are based on their highly precise and simple experimental measurements plus physical and material information derived from optical constants characterization.
Spectroscopic Ellipsometers are the tool of choice for measuring optical constants (n,k) (also called complex dielectric constants) of materials. The precision of optical constants are in the range of 10-3.
Through measurement of optical constants, SE can provide detailed knowledge of:
У вас есть вопросы или пожелания? Используйте эту форму, чтобы связаться с нашими специалистами.