Application

Material & Property Characterization
Manufacturing Process Control
& Management
Semiconductor & FPD
Manufacturing Process Control
Environmental Analysis
Vehicle & Powertrain Test
Medical Diagnostics
Forensics
Fluid Control
Food Analysis

Mass Flow Meters / Controllers

Digital Mass Flow Controller SEC-N100 Series

For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.

Pressure Insensitive Mass Flow Module D500

Pressure Insensitive Mass Flow Module CRITERION D500

The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.

High Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series

The digital mass flow controller for high-temperature environment, from 15 ℃ to 120 ℃. Digital/Analog communication.

High Precision Film Flow Meter - SF・VP Series

High precision flow rate measurement with one-touch operation.