Reliable characterization of optical coatings often requires more than measurements at a single incidence angle. In this application note, the HORIBA UVISEL Plus spectroscopic ellipsometer is used to characterize a mirror sample with a protective coating through multi-angle measurements performed at 45° and 70° incidence.
Using the Bound Multimodel approach within DeltaPsi2, data acquired at different angles are linked through common optical parameters, improving model robustness and reducing parameter correlation. The resulting optical model enables accurate determination of coating thickness and optical constants while allowing prediction of optical behavior at lower incidence angles, including 10°.
This study demonstrates how UVISEL Plus combines advanced ellipsometric measurements and predictive optical modeling to support the development and validation of high-performance optical coatings.
Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm
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