Development of Long-Life, Energy Conservation “Eco-Friendly Products”

In order to provide customers with products that reflect consideration of their life cycles, such as long those with usable lives and minimization of energy consumption, we have positioned certain products as “eco-friendly products” if they satisfy certain standards we have adopted; we use this description when developing and marketing such products. With social and economic matters such as rising energy costs in the background, we use quantitative measurement to determine to what extent products reduce energy requirements or materials used. With our “eco-friendly products,” we aim to achieve a 25% reduction compared to conventional models.


Eco-Friendly Product: HORIBA, Ltd.

Trace Gas Monitor  GA-370

The trace gas monitor GA-370 measures with high sensitivity the amounts of CO, CO2, and CH4 in industrial gases. It is used, for example, to manage the concentration of impurities contained in nitrogen (N2), argon (Ar), and oxygen (O2) generated at gas production facilities such as hydrogen production plants and air separation plants.

The GA-370 has undergone a complete interface renewal. At the same time, a communication feature was added to it in order to meet a customer request. For eco-friendly design, we reviewed and revised the product design at the parts level to reduce power consumption and use fewer parts.

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Eco-friendly product: HORIBA STEC, Co., Ltd.

Gas Monitor  IR-432

The gas monitor IR-432 is mounted on a CVD (chemical vapor deposition) system* used in semiconductor production and measures on a real-time basis Silicon Tetrafluoride (SiF4), an exhaust component generated during chamber cleaning. As microfabrication of thin films advances, the necessity of keeping the post-process chamber clean has increased importance for improving productivity. The IR-432 detects the end point of chamber cleaning to boost semiconductor production efficiency.

For further eco-friendliness, we reduced the product volume by 30.5% (compared to the previous model), achieving a smaller device footprint for customer satisfaction.

*CVD system: a system that creates thin films by causing chemical reactions of vaporized film forming materials on the substrate surface.