Semiconductor Manufacturing Process

Semiconductors are the key evolving components in the industry today. HORIBA has kept its sights keenly focused on this micro world. Specialists in each field; HORIBA have pursued proprietary engineering projects in a wide range of areas that include evaluation and analysis, purity of ultra-pure water, composition of liquids and gases, and more broadly, environment and safety. With our sights set clearly on the overall process, we have developed a line-up of analytical equipment, fluid control and measuring systems tailored to every stage of the semiconductor manufacturing process in response to stringent quality control requirements. In all stages, from materials evaluation through to final inspection, HORIBA products help maintain high efficiency in the manufacture of leading-edge electronics devices.

Browse Applications

Semiconductor BEOL CMP in Semiconductor Manufacturing Process

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Related Products

SLIA-300
MoreSLIA-300
Highly Sensitive Silica Monitor
CS-150
MoreCS-150
SPM Monitor
XGT-9000
MoreXGT-9000
X-ray Analytical Microscope
HF-960EM
MoreHF-960EM
In-line Sensor & Auto Range Switching Concentration Monitor
CS-600F
MoreCS-600F
Fiber Optic Type Chemical Concentration Monitor
CS-139E
MoreCS-139E
High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor,
HE-960TM
MoreHE-960TM
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations
UP-100
MoreUP-100
Micro Volume pH Monitor
Partica LA-960
MorePartica LA-960
Laser Scattering Particle Size Distribution Analyzer
HZ-960HPO-M
MoreHZ-960HPO-M
H2O2 Monitor
CM-200A/210A
MoreCM-200A/210A
Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor
HD-300
MoreHD-300
Industrial dissolved oxygen analyzer (Two-Wire Transmitter)
CS-153N
MoreCS-153N
HF/HNO3 Monitor
HE-480R(W)
MoreHE-480R(W)
Industrial resistivity meter
HP-480(W)
MoreHP-480(W)
Industrial pH meter
CS-100 Series
MoreCS-100 Series
Stand-alone Type Chemical Concentration Monitor
CS-153
MoreCS-153
FPM Monitor
CS-137
MoreCS-137
BHF Concentration Monitor
HF-960M
MoreHF-960M
Low Concentration Type HF/HCl/NH3 Concentration Monitor
HE-960H-TM
MoreHE-960H-TM
Wide range TMAH Concentration Monitor
HF-960H
MoreHF-960H
HF / HCl Concentration Monitor
HE-960HC
MoreHE-960HC
Carbon Sensor Conductivity Meter (High concentration type)
HE-480C-GC
MoreHE-480C-GC
Carbon Sensor Conductivity Meter (Low concentration type)
HE-960RW-GC(W)
MoreHE-960RW-GC(W)
2-Channel Resistivity Meter
HE-960R-GC(W)
MoreHE-960R-GC(W)
Carbon Sensor Resistivity Meter
CS-131
MoreCS-131
High-speed response and compact chemical solution concentration monitor SC-1 Monitor,
SC-2 Concentration Monitor, CS-152
MoreSC-2 Concentration Monitor, CS-152
Semiconductor process monitoring for SC-2 process
HE-960RW
MoreHE-960RW
Industrial resistivity meter
HE-960CA
MoreHE-960CA
Citric Acid Monitor
HE-960LC
MoreHE-960LC
Carbon Sensor Conductivity Meter
HE-Z-100T
MoreHE-Z-100T
High Resistivity Meter
CS-700
MoreCS-700
High Precision, High Stability Chemical Concentration Monitor
HF HD-960L
MoreHF HD-960L
Dissolved Oxygen Monitor in Low Concentration
HF-SP-CU
MoreHF-SP-CU
2-channel High Precision HF Concentration Monitor
HZ-960
MoreHZ-960
Dissolved Ozone Monitor
HE-960H-TM-S
MoreHE-960H-TM-S
High Precision TMAH Concentration Monitor
HE-300R (Two-Wire Transmitter)
MoreHE-300R (Two-Wire Transmitter)
Industrial electric resistivity meter
HE-960H-KOH
MoreHE-960H-KOH
KOH Monitor
2-channel Sanitary Conductivity Meter HE-960CW
More2-channel Sanitary Conductivity Meter HE-960CW
Sanitary Conductivity Meter (Low Concentration type)
XGT-7200
MoreXGT-7200
X-ray Analytical Microscope