VU90 Spectrometer

Compact VUV CCD Spectrometer

Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)

Horiba has developed a compact size Vacuum Ultraviolet (VUV) Spectrometer with a dedicated CCD Camera Syncerity-VUV, all manufactured in its NJ facility. This unique system features a special CCD sensor with high sensitivity in the  far-UV wavelength range with capability to measure from 115 nm with a resolution better than 0.5 nm under vacuum or high purity nitrogen. The system’s internal optical cavity can be black coated for ultimate suppression of stray light.

For OEM VUV Industrial Applications

  • VUV Emission & Fluorescence 
  • VUV Transmission & Reflectance
  • GCVUV: Alternative to Conventional Gas Chromatography
  • Examples:
    • Metrology
    • Photolithography
    • Petrology
    • Environmental Monitoring
    • Flavors & Fragrances
    • Food & Beverage Safety

 

*Available in select countries.

You can email OEM Technical Sales at: OEM.US@horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

Segment: Scientific
Division: OEM
Manufacturing Company: HORIBA Scientific
  • First portable and most affordable VUV spectrometer
  • Smallest VUV system footprint on the market
  • Ultra high throughput combined with unmatched low stray light performance
  • High resolution of 0.5 nm Selectable resolution and throughput
  • Deep-cooled CCD with high quantum efficiency
  • Extendable wavelength coverage from Far UV to UV-VIS-NIR

 

CCD Quantum Efficiency

UV hardened sensor provides increased lifetime, however no warranty is provided on any sensor exposed to VUV

 

Stray Light Comparison


Stray light comparison between uncoated and coated cavity (Super Black)  measured by far field illumination using tungsten lamp – zero order

 

Spectrum of Deuterium

Spectrum of Deuterium lamp shows enhanced sensitivity starting from 113 nm with 22 µm slit (0.45 nm resolution)

 

VUV System Slit Interchangeability Test

VUV system slit interchangeability test with 40 µm pinhole and 22 µm slit
 

View different setups of FUV system and Adjustable Resolution and Throughput

OEM Spectrometer Selection Guide

View and Download our OEM Spectrometer Selection Guide

You can email OEM Technical Sales at: OEM.US@horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

 

 

 

General Spectrometer Specifications

Spectral Coverage115 - 230 nm Full coverage on CCD: 115 - 320 nm (No order sorting filter available)
Spectral Resolution 0.5 nm with 22 μm pinhole, 0.75 nm with 40 μm pinhole
Spectral Dipersion34.6 nm/mm; 0.38 nm/pixel
Focal Length 90 mm
VUV OpticsMgF2 coated grating and mirror
Vacuum or Nitrogen Purged Mode~ 10-6Torr with turbomolecular pump. Helium leak test performed at factory.
N2 high purity nitrogen constant purge required
Options
 
Seleciton of different heights of VUV CCDs
Kinematic mounts to interchange Pinholes (or Slits)
Bare metal finish is standard: Super black coating reduces stray light
F/# ~ F/10
SoftwareLabVIEW Acquisition sortware for initial evaluation (DLLs provided for software integration)

 

Vacuum Camera Specifications (Syncerity® VUV 2048 pixel BI Sensor)*
Quantum efficiency at 20°C (see plots below)StandardSpecial
CCD Sensor Format2048 x 70Optional increased heights available
CCD Pixel Size14 x14 μm
CCD Height1 mm
CCD QE3 options - refer to graphs below
Camera Window2 options - no window for lowest VUV response or MgF2 window
Deep Thermoelectric Cooling-45°C under vacuum (10-6 mbar) with +25°C ambient or -25°C under N2 purging
Single Pixel Well Capacity50,000 e¯/pixel (minimum); 60,000 e¯/pixel (typical)
Serial Register Full Well Capacity250,000 e¯/pixel (minimum); 500,000 e¯/pixel (typical output register saturation)
Scan Rates45 kHz and 500 kHz
Readout Noise (at 45 kHz and at –45°C)10 e¯ (typical) to 14 e¯ (maximum)
Readout Noise (at 500 kHz and at –45°C)20 e¯ (typical) to 25 e¯ (maximum)
Maximum Spectral Rate20 Hz at 45 kHz scan rate; 189 Hz at 500 kHz scan rate
Digitization16-bit ADC
Dynamic Range (typical for single pixel)55,500:1
Non-linearity (measured on each camera)<0.15% (typical) at 45 kHz (0.4% maximum)
<0.20% (typical) at 500 kHz (1% maximum)
Dark Current at –45°C
Note: Pixel size = 14 μm
0.1 e¯ /pixel/s (typical)
Software-adjustable Gains2, 4, and 10 e¯ /count at –45°C
Environmental ConditionsOperating temperature 15°C to 40°C ambient
Relative humidity <70% (non-condensing)
Storage temperature -25°C to 45°C
Power Requirements
AC/DC Power Supply (provided)
90-264 VAC, 47–63 Hz

*Specifications, form factor, and spectrometer cover subject to change without notice. No LabVIEW™ license is needed to run our acquisition software.

CCD Quantum Efficiency

UV hardened sensor provides increased lifetime, however no warranty is provided on any sensor exposed to VUV

Mechanical Drawings

Download Mechanical Drawings

You can email OEM Technical Sales at: OEM.US@horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

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