Scientific

Spectroscopic Ellipsometry

๋ถ„๊ด‘ ํƒ€์›๊ณ„

๋ฐ•๋ง‰ ํŠน์„ฑํ™”์— ๊ฐ€์žฅ ์ ํ•ฉํ•œ ๊ธฐ์ˆ 

๋ถ„๊ด‘ ํƒ€์›์€ ์–‡์€ ์ธต๊ณผ ํ‘œ๋ฉด ํŠน์„ฑํ™”์— ๋„๋ฆฌ ์‚ฌ์šฉ๋˜๋Š” ํ‘œ๋ฉด ๋ฏผ๊ฐ์„ฑ, ๋น„ํŒŒ๊ดด์„ฑ, ๋น„์นจ์ž…์„ฑ ๊ด‘ํ•™ ๊ธฐ๋ฒ•์ž…๋‹ˆ๋‹ค. ๊ฐ„๋‹จํ•˜๊ฒŒ ๋ฐ•๋ง‰ ์‹œ๋ฃŒ์—์„œ ๋น„์Šค๋“ฌํžˆ ๋ฐ˜์‚ฌ๋˜๋ฉด์„œ ๋น›์˜ ํŽธ๊ด‘ ์ƒํƒœ ๋ณ€ํ™”๋ฅผ ๊ธฐ๋ฐ˜์œผ๋กœ ์ธก์ •ํ•ฉ๋‹ˆ๋‹ค. ๋ฌผ์งˆ์˜ ์ข…๋ฅ˜์— ๋”ฐ๋ผ, ๋ถ„๊ด‘ ํƒ€์›๊ณ„๋Š” ๋ช‡ ร…์—์„œ ์ˆ˜์‹ญ ๋ฏธํฌ๋ก (ใŽ›)์˜ ๋‘๊ป˜๋ฅผ ์ธก์ •ํ•  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ๋‹ค์ธต ๋ฐ•๋ง‰ ์ธก์ •์—๋„ ์ ํ•ฉํ•œ ๊ธฐ์ˆ ์ž…๋‹ˆ๋‹ค.

๋ถ„๊ด‘ ํƒ€์› ์ธก์ •๋ฒ•์€ ์ธต ๋‘๊ป˜, ๊ด‘ํ•™ ํŠน์„ฑ(n,k), ๊ด‘ํ•™ ๋ฐด๋“œ ๊ฐญ, ๊ณ„๋ฉด ๋ฐ ๊ฑฐ์น ๊ธฐ ๋‘๊ป˜, ํ•„๋ฆ„ ์กฐ์„ฑ, ๊นŠ์ด ๋ฐ ๋ฉด์ ์— ๋”ฐ๋ฅธ ๊ท ์ผ์„ฑ ๋“ฑ๊ณผ ๊ฐ™์€ ๋‹ค์–‘ํ•œ ๋ฐ•๋ง‰ ํŠน์„ฑ์„ ํŠน์„ฑํ™”ํ•  ์ˆ˜ ์žˆ๊ฒŒ ํ•ฉ๋‹ˆ๋‹ค.

๋ถ„๊ด‘ ํƒ€์›๊ณ„์— ์ ํ•ฉํ•œ ์žฌ๋ฃŒ๋กœ๋Š” ๋ฐ˜๋„์ฒด, ์œ ์ „์ฒด, ๊ณ ๋ถ„์ž, ์œ ๊ธฐ๋ฌผ, ๊ธˆ์† ๋“ฑ์ด ์žˆ์Šต๋‹ˆ๋‹ค. ํƒ€์›์ธก์ •๋ฒ•์€ ๊ณ ์ฒด-์•ก์ฒด ๋˜๋Š” ์•ก์ฒด-์•ก์ฒด ๊ณ„๋ฉด์„ ์—ฐ๊ตฌํ•˜๋Š” ๋ฐ๋„ ์‚ฌ์šฉ๋  ์ˆ˜ ์žˆ๋‹ค.

HORIBA ๋ถ„๊ด‘ ํƒ€์›๊ณ„๋Š” ํ˜์‹ ์ ์ธ ๊ธฐ์ˆ ์„ ์‚ฌ์šฉํ•˜์—ฌ ๊ธฐ๊ณ„์  ์›€์ง์ž„ ์—†์ด ๊ณ ์ฃผํŒŒ ํŽธ๊ด‘ ๋ณ€์กฐ ์ธก์ •์„ ์ˆ˜ํ–‰ํ•˜์—ฌ ๊ธฐ์กด ํƒ€์›๊ณ„์— ๋น„ํ•ด ๋น ๋ฅด๊ณ  ๋„“์€ ๋ฒ”์œ„์™€ ๋†’์€ ํŠน์„ฑ ์ •๋ฐ€๋„๋ฅผ ์ œ๊ณตํ•ฉ๋‹ˆ๋‹ค.

๋น„๋””์˜ค ๋ฐ ์›น ์„ธ๋ฏธ๋‚˜

ํŠธ๋ ˆ์ด๋‹์šฉ ๋น„๋””์˜ค๋ฅผ ๋ณด๋ฉด์„œ ๋ถ„๊ด‘ ํƒ€์› ์ธก์ •์— ๋Œ€ํ•ด ์ž์„ธํžˆ ์•Œ์•„๋ณธ ๋’ค,  ์›น ์„ธ๋ฏธ๋‚˜ ์ปฌ๋ ‰์…˜์„ ์‚ฌ์šฉํ•˜์—ฌ ์‘์šฉ ํ”„๋กœ๊ทธ๋žจ์— ๋Œ€ํ•ด ์•Œ์•„๋ณด์‹ญ์‹œ์˜ค.

ํŠธ๋ ˆ์ด๋‹

HORIBA์˜ ๋ถ„๊ด‘ ํƒ€์› ์ธก์ • ์ „๋ฌธ๊ฐ€๊ฐ€ ๋ณด์œ ํ•˜๊ณ  ๊ณ„์‹  HORIBA Scientific ๊ธฐ๊ธฐ๋ฅผ ์ตœ๋Œ€๋กœ ํ™œ์šฉํ•  ์ˆ˜ ์žˆ๋„๋ก ๊ฐ€์ด๋“œ ๋ฐ ์–ด๋“œ๋ฐ”์ด์Šค๋ฅผ ์ œ๊ณตํ•ฉ๋‹ˆ๋‹ค. ํ‘œ๋ณธ ๋ถ„์„์— ๋Œ€ํ•œ ์ž์‹ ๊ฐ๊ณผ ๊ฒฝํ—˜์„ ์Œ“์„ ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.

๊ธฐ์ˆ  ๋ฐ FAQ

๋ถ„๊ด‘ ํƒ€์›์€ ๋ฐ•๋ง‰ ์ƒ˜ํ”Œ์—์„œ ๋น„์Šค๋“ฌํžˆ ๋ฐ˜์‚ฌ๋˜๋ฉด์„œ ๋น›์˜ ํŽธ๊ด‘ ์ƒํƒœ ๋ณ€ํ™”๋ฅผ ๊ธฐ๋ฐ˜์œผ๋กœ ํ•˜๋Š” ๋น„ํŒŒ๊ดด, ๋น„์ ‘์ด‰ ๋ฐ ๋น„์นจ์Šต ๊ด‘ํ•™ ๊ธฐ๋ฒ•์ž…๋‹ˆ๋‹ค. ์ด ๊ธฐ์ˆ ์— ๋Œ€ํ•œ ์ž์„ธํ•œ ๋‚ด์šฉ์€ ์•„๋ž˜ ๋งํฌ์—์„œ ํ™•์ธํ•˜์„ธ์š”.

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์ œํ’ˆ ๋ฌธ์˜

HORIBA์ œํ’ˆ์˜ ์ž์„ธํ•œ ์ •๋ณด๋ฅผ ์›ํ•˜์‹œ๋ฉด, ์•„๋ž˜์˜ ์–‘์‹์— ๋‚ด์šฉ์„ ์ž…๋ ฅ์„ ๋ถ€ํƒ๋“œ๋ฆฝ๋‹ˆ๋‹ค.

* ๋Š” ํ•„์ˆ˜์ž…๋ ฅํ•ญ๋ชฉ์ž…๋‹ˆ๋‹ค.

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