Glow Discharge Optical Emission Spectrometry (GDOES)

글로 방전 광학 방출 분광법(GDOES)


GDOES는 나노미터 깊이 분해능으로 모든 원소와 두께를 정량 측정하는 동시에 층상 재료의 초고속 원소 깊이 프로파일 분석을 제공하는 분석 기법입니다. HORIBA Scientific의 펄스 RF GDOWS 기기와 DiP(Differential Interferometry Profiling)는 재료 연구 및 공정 정교화를 위한 이상적인 동반 특성화 도구입니다.

혁신적인 펄스 RF 소스를 통해 첫 번째 나노미터에서 150µm 이상까지 모든 유형의 고체 샘플을 최적 성능으로 프로파일링할 수 있습니다. 고분자 재료는 특허받은 UFS(Ultra Fast Sputtering)로 쉽게 스퍼터링됩니다. 또한 이 소스를 사용하여 SEM(Scanning Electron Microscopy)을 위한 샘플 surfaces 준비도 가능합니다.

수소, 중수소, 리튬, 탄소, 질소, 산소 등을 포함한 모든 원소를 측정할 수 있습니다.

특허받은 DiP(Differential Interferometry Profiling)는 GD 분석과 동시에 수행되는 나노미터 정밀도로 시간의 함수로서 깊이를 직접 측정할 수 있습니다.

모든 HORIBA Scientific GD 분석기에 사용되는 특허받은 HDD(High Dynamic Range Detectors)는 실시간으로 감도를 자동 최적화하여, 한 레이어의 추적 수준에서 요소를 분석하며, 별도 조정 없이 두 번째 레이어에서 주요 요소 분석이 가능합니다.

GD-Profiler 2™

The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin and thick films characterization and process studies.


Our trainers are experts in GDOES. They will provide trainings advice and guidance to make the most of your HORIBA Scientific instrument.
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Technology & F.A.Q.

Glow Discharge Optical Emission Spectroscopy (GDOES)

GDOES is an analytical technique that provides both the surface/depth profile and the bulk elemental composition of solid materials and layers quickly, and with high sensitivity to all elements. Read more about this technique and its wide range of applications.

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Combined Pulsed RF GD-OES and HAXPES for Quantified Depth Profiling through Coatings

The combination between pulsed GD OES and XPS, notably to look at embedded interfaces, is generating interest from the Surface community. Look at this open Access article published in Coatings.

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New GD-Profiler 2™ Brochure Available

Discover the new brochure for the GD-Profiler 2™, our Pulsed RF Glow Discharge Optical Emission Spectrometer, with Differential Interferometry Profiling (DiP) information and the latest functionalities and applications.

Get the brochure

Novel Porous Phosphorus–Calcium–Magnesium Coatings on Titanium with Copper or Zinc Obtained by DC Plasma Electrolytic Oxidation: Fabrication and Characterization

In this paper, the characteristics of new porous coatings fabricated at three voltages in electrolytes based on H3PO4 with calcium nitrate tetrahydrate, magnesium nitrate hexahydrate, and copper(II) nitrate trihydrate are presented. The SEM, energy dispersive spectroscopy (EDS), glow discharge optical emission spectroscopy (GDOES), X-ray photoelectron spectroscopy (XPS), and XRD techniques for coating identification were used.

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Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

We developed an in situ measurement technique implemented on a Glow Discharge Optical Emission Spectrometry (GDOES) instrument, which provides the depth information during the profiling process. The setup is based on a differential interferometer, and we show that a measurement accuracy better than 5% can be obtained for crater depths ranging from 100 nanometers to several tens of micrometers. This development can be directly applied to non-transparent coatings, and brings significant improvement to the quantification process in GDOES.

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Studying perovskite solar cells with HORIBA Scientific equipment

With their ~20 % efficiency, hybrid perovskite solar cells are the new promising candidate for next generation photovoltaics. Thanks to the wide HORIBA Scientific portfolio, different techniques can be used to gain in depth knowledge on the optoelectronic properties and mechanisms of this class of materials. In this application note we decided to use spectroscopic ellipsometry, steady-state and time-resolved fluorescence and Glow Discharge Optical Emission Spectroscopy to investigate the properties of CH3NH3PbI3 thin films deposited on a spin-coated PEDOT:PSS. The impact of the exposure to air was addressed.

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MoS2/Pb nanocomposite coatings for solid lubricants application

Pulsed RF Glow Discharge Optical Emission Spectrometry offers ultra-fast elemental depth profiling capability for the investigation of thin and thick films. Thanks to the use of a pulsed RF source, coupled with a high resolution optical spectrometer, the GD Profiler 2 provides an excellent depth resolution, allowing the fast evaluation of the coating quality. In this application note, we focus on a MoS2/Pb composite multilayered sample, used as a solid lubricant. The analysis of such a sample shows the excellent performance of this instrument for the study of nm-thick complex coatings.

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GD-Profiler 2™
GD-Profiler 2™

Glow Discharge Optical Emission Spectrometer

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