Plasma Profiling TOFMS

PP-TOFMS-HORIBA

Ultra-Fast, Sensitive and High Resolution Depth Profiling technique

Plasma Profiling TOFMS addresses the needs of materials scientists across a wide range of application areas. PP-TOFMS provides fast elemental depth distribution of any inorganic material. The speed and ease of use of PP-TOFMS permit to reduce optimization time of growth processes as many research scientists strive to reduce the time from discovery to applications of new materials.

The simultaneous full coverage of TOFMS available for each point of depth permits the detection of non suspected contamination. This is key for failure analysis and optimization of thin film processes that tend to no longer be based on ultra-high grade methods (i.e. ink jet printing…).

PP-TOFMS is an ideal close-to-process tool for materials scientists:

  • To check on stoichiometry versus depth of layers ranging from nm to tens of microns
  • To determine doping depth distribution
  • Identify unsuspected contamination
  • Monitor interface composition and width
Segment: Scientific
Manufacturing Company: HORIBA France SAS

PP-TOFMS instrument is

  • Compact
  • Rapid
  • Easy to get hands on
  • General application in materials science
  • Multi-user

 

 

 

  • Glow discharge Plasma Source
  • Unique patented RF pulsing mode
  • No sample preparation, no sample transfer in UHV environment
  • Easy (flat Horizontal) and ergonomic sample positioning with laser help
  • High sample tolerance size from 0.7 cm to 30 cm
  • Standard 4 mm anode (4 mm ⌀ crater)
  • Available 2 mm anode (2 mm ⌀ crater)
  • Oil free environment (Dry pump)
  • Easy removal and cleaning of source parts

 

TOF analyzer

  • Orthogonal extraction
  • High resolution reflectron (resolving power up to 5000 at 208 Th)
  • User friendly, ergonomic, fast hands on
  • Possibility to filter out up to four intense ions for high dynamics: user choice of ions and attenuation amplitude

 

Software

  • Fast automatic starting procedures
  • Real time display of depth profiles
  • One click semi-quantitative depth profile
  • Remote online capability
PP-TOFMS Depth Profiling of ZnO Thin Layers co-doped with Rare Earths for Photonic Materials
PP-TOFMS Depth Profiling of ZnO Thin Layers co-doped with Rare Earths for Photonic Materials
PP-TOFMS is a fast and reliable technique for depth profiling of rare earth doped ZnO thin films. Tb and Eu profiles are obtained with high sensitivity and high depth resolution. This type of information is typically provided by SIMS, RBS or depth profiling XPS but not as rapidly and readily and at a higher cost. Such profiles turn out to be powerful complementary information to understand photoluminescence data. This example extends to similar materials for photonics (lighting, display, solar energy industries) applications such as other wide bandgap semiconductors (SiC, GaN...), nitrides and oxynitrides layers, silicon nano-objects, glasses... doped with Yb, Y, Sm, Er, Nd, Pr, and Tm...

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Product accessories

PP-TOFMS Software
More PP-TOFMS Software

Ergonomic software for data acquisition, data treatment and technical support

Related products

Auto SE
More Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

EMGA-920
More EMGA-920

Oxygen/Nitrogen Analyzer

EMGA-930
More EMGA-930

Oxygen/Nitrogen/Hydrogen Analyzer

GD-Profiler 2™
More GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

GDOES Software
More GDOES Software

Quantum and Image

LabRAM HR Evolution
More LabRAM HR Evolution

Confocal Raman Microscope

Smart SE
More Smart SE

Powerful and Cost Effective Spectroscopic Ellipsometer

UVISEL 2 VUV
More UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

UVISEL Plus
More UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

XploRA™ PLUS
More XploRA™ PLUS

Raman Spectrometer - Confocal Raman Microscope

GD-Profiler 2™
More GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

GDOES Accessories
More GDOES Accessories

Accessories for samples with various shapes, sizes and properties

GDOES Software
More GDOES Software

Quantum and Image

ICP Neo
More ICP Neo

ICP Software

ICP-OES
More ICP-OES

Complete your ICP-OES Spectrometer for your specific needs

MESA-50
More MESA-50

X-Ray Fluorescence Analyzer

MESA-50K
More MESA-50K

X-Ray Fluorescence Analyzer

Ultima Expert
More Ultima Expert

High resolution, high sensitivity and high stability ICP-OES

Ultima Expert LT
More Ultima Expert LT

Affordable high performance ICP-OES

XGT-7200
More XGT-7200

X-ray Analytical Microscope

XGT-9000
More XGT-9000

X-ray Analytical Microscope