Highlighting a certain element as a characteristic point simplifies detection of foreign material, obstacles, etc.
Foreign material is detected quickly through high-speed screening and highlighting through imaging processing. Additionally, the high resolution X-ray beam enables detailed analysis of elements contained in foreign material. This series of foreign material analyses can be completed with a single unit, up to the level of several ten μm.
■ Analysis of Foreign Material in Films
Even difficult to visually confirm foreign materials can be detected and analyzed while checking optical observation images with high resolution of them after elemental mapping screening.
■ Analysis of Hydrous Samples
Enables measurement of hydrous samples and foreign materials can be detected through image processing.
Energy dispersive X-ray fluorescence
Na (11) ～ U (92)
Largest sample size ［W x D x H］
300 x 250 x 40 mm
Stage movable range ［W x D x H］
100 x 200 x 20 mm
Direction of optical observation and X-ray beam
15 kV, 30 kV, 50 kV
Max 1 mA
Maximum No. of capillaries
X-ray Fluorescence detector
LN2 Free detector
Transmission X-ray detector
100 x 100 mm (max)
4 types, switchable
Optical camera (for detailed observation)
2.5 x 2.5 mm
<10 μ m
Variable between 1 – 10 mm
Around, coaxial, transmitted
Whole sample chamber /optical system only
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