GR-500 Series

Wafer Back Side Cooling System

The GR-500 Series provides stable, high-accuracy pressure control of heat-transfer gases such as helium and argon, which are essential for wafer backside temperature control. Its high stability and accuracy make it ideal for wafer cooling applications.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.

・Precise low-pressure control with a proven capacitive pressure sensor

・High-accuracy gas flow monitoring during pressure control

 

Specifications of GR-500 Series

Dimensions of GR-500 Series

Size: 0.71 MB
GR-500 Series Brochure

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