Non-destructive Layer Thickness Distribution Imaging by Micro-XRF for Deposition Uniformity Assessment

Nuclear targets with well-controlled deposition thickness are critical for reproducible experimental conditions and reliable data in nuclear physics beamline experiments. HORIBA’s micro-XRF system, XGT-9000, enables non-destructive layer thickness distribution imaging, and we demonstrate the feasibility using a Yb/C/Glass sample having a non-uniform Yb deposition. This application note shows that the ability provides feedback for the target development non-destructively and ensures consistent experimental performance.