HF-SP-CU

2-channel High Precision HF Concentration Monitor HF-SP-CU

2-์ฑ„๋„ ๊ณ ์ •๋ฐ€ HF ๋†๋„ ๋ชจ๋‹ˆํ„ฐ

HF-SP-CU๋Š” ๊ณ ์ •๋ฐ€ ๋ฐ ๊ณ ์„ฑ๋Šฅ HF ๋†๋„ ๋ชจ๋‹ˆํ„ฐ๋กœ +/- 2.0ppm (์ตœ๊ณ  ์ •๋ฐ€๋„), ๊ณ ์† ์ƒ˜ํ”Œ๋ง & ์ถœ๋ ฅ, 2์ฑ„๋„ ์„ผ์„œ, ์„ผ์„œ ๋‚ด ์••๋ ฅ ๋ณด์ • ๊ธฐ๋Šฅ์œผ๋กœ ๋ฏธ์„ธ ๊ณต์ • ๊ด€๋ฆฌ๊ฐ€ ๊ฐ€๋Šฅํ•ฉ๋‹ˆ๋‹ค. ๋ฐ˜๋„์ฒด ๋ฏธ์„ธ ๊ณต์ • ์ œ์–ด์— ์ ํ•ฉํ•ฉ๋‹ˆ๋‹ค.

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
  • High precision : +/- 2.0 ppm (highest accuracy)
  • High speed sampling & output
  • 2-channel sensors achieves the measurement of both the supply tank and chamber
  • Intra-sensor pressure correction function
Size: 1.56 MB
Brochures-Analyzers for Wet Process

์ œํ’ˆ ๋ฌธ์˜

HORIBA์ œํ’ˆ์˜ ์ž์„ธํ•œ ์ •๋ณด๋ฅผ ์›ํ•˜์‹œ๋ฉด, ์•„๋ž˜์˜ ์–‘์‹์— ๋‚ด์šฉ์„ ์ž…๋ ฅ์„ ๋ถ€ํƒ๋“œ๋ฆฝ๋‹ˆ๋‹ค.

* ๋Š” ํ•„์ˆ˜์ž…๋ ฅํ•ญ๋ชฉ์ž…๋‹ˆ๋‹ค.

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