IT-470F-H

High-Accuracy Infrared Thermometer [Built-in type]

Industry Leading* High Accuracy Thermometer

The IT-470F-H is a built-in type, non-contact infrared thermometer with industry-leading* accuracy. It contributes to improve process stabilization, for which requires high accuracy temperature measurement, such as semiconductor and FPD production.

 

*Resuts of 2025 in-house study

 

  • Absolute high measurement accuracy ยฑ0.1ยฐC* and superior repeatability(2ฯƒ) of 0.1ยฐC*.

*Actual value, under given conditions.

Application

For semiconductor and FPD production which requires high accuracy temperature measurement

  • In case of a susceptor is in a vacuum chamber
    Temperature measurement of a susceptor is possible from outside of a chamber through the window
  • In case of surface temperature measurement of liquid crystal substrate in FPD production process.
    As non contact measurement, surface is not damaged.
  • In case of temperature controlling in polishing
    As non contact measurement, surface is not damaged.

 

 

Measurement wavelength8 to 14ยตm
Measurement temp. range-50 to 200โ„ƒ
Output resolutionOptical digital output: 0.1โ„ƒ    Current output โ‰ค0.025%FS
Accuracy*
(Optical digital output)
ยฑ4.0โ„ƒ (Object temperature -50โ„ƒ)
ยฑ0.8โ„ƒ (Object temperature -20โ„ƒ)
ยฑ0.6โ„ƒ (Object temperature 0โ„ƒ)
ยฑ0.5โ„ƒ (Object temperature 23โ„ƒ)
ยฑ0.4โ„ƒ (Object temperature 100โ„ƒใ€œ)
(Linear interpolation is applied for the mid-points of object temperature and interpolated data are rounded to one decimal place.)
Repeatability
(Optical digital output)
0.7โ„ƒ (Object temperature -50โ„ƒ)
0.5โ„ƒ (Object temperature 23โ„ƒ)
0.5โ„ƒ (Object temperature 200โ„ƒ)
(In case of the emissivity = 1.000 and use the 2ฯƒ value of 10 times measurement)
Response time (Optical digital output)Optical digital output: โ‰ค1.4 sec (running average 1 sec, at 95% response)
Data sampling period0.1 sec
Display update periodOptical digital output: 0.2 sec  Current output: 0.1 sec
Measuring diameterฮฆ8mm/Distance 150mm (incident light amount 90%)
Emissivity setting0.001 to 1.000 changeable (Setting at factory shipping)
Operating temp. & humidity0 to 55โ„ƒ, 35ใ€œ85%RH (no condensation)
PowerDC24Vยฑ5%
FunctionOptical digital output (JIS F05)    Current output 4 to 20๏ฝA (Load resistance 100ฮฉ, non-isolated)
Dimensions55ร—44ร—96mmใ€€Power, Current cable attached (Standard length 2m)
Massโ‰ค300g

*Condition: Operating temperature 24 to 29โ„ƒ (include temperature of attachment), Humidity 55ยฑ20%, Emissivity correction setting 1.000.

์ œํ’ˆ ๋ฌธ์˜

HORIBA์ œํ’ˆ์˜ ์ž์„ธํ•œ ์ •๋ณด๋ฅผ ์›ํ•˜์‹œ๋ฉด, ์•„๋ž˜์˜ ์–‘์‹์— ๋‚ด์šฉ์„ ์ž…๋ ฅ์„ ๋ถ€ํƒ๋“œ๋ฆฝ๋‹ˆ๋‹ค.

* ๋Š” ํ•„์ˆ˜์ž…๋ ฅํ•ญ๋ชฉ์ž…๋‹ˆ๋‹ค.

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