Scientific

Spectroscopic Ellipsometry

λΆ„κ΄‘ 타원계

박막 νŠΉμ„±ν™”μ— κ°€μž₯ μ ν•©ν•œ 기술

λΆ„κ΄‘ 타원은 얇은 μΈ΅κ³Ό ν‘œλ©΄ νŠΉμ„±ν™”μ— 널리 μ‚¬μš©λ˜λŠ” ν‘œλ©΄ 민감성, λΉ„νŒŒκ΄΄μ„±, λΉ„μΉ¨μž…μ„± κ΄‘ν•™ κΈ°λ²•μž…λ‹ˆλ‹€. κ°„λ‹¨ν•˜κ²Œ 박막 μ‹œλ£Œμ—μ„œ λΉ„μŠ€λ“¬νžˆ λ°˜μ‚¬λ˜λ©΄μ„œ λΉ›μ˜ νŽΈκ΄‘ μƒνƒœ λ³€ν™”λ₯Ό 기반으둜 μΈ‘μ •ν•©λ‹ˆλ‹€. 물질의 μ’…λ₯˜μ— 따라, λΆ„κ΄‘ νƒ€μ›κ³„λŠ” λͺ‡ Γ…μ—μ„œ μˆ˜μ‹­ 미크둠(γŽ›)의 λ‘κ»˜λ₯Ό μΈ‘μ •ν•  수 있으며, λ‹€μΈ΅ 박막 츑정에도 μ ν•©ν•œ κΈ°μˆ μž…λ‹ˆλ‹€.

λΆ„κ΄‘ 타원 츑정법은 μΈ΅ λ‘κ»˜, κ΄‘ν•™ νŠΉμ„±(n,k), κ΄‘ν•™ λ°΄λ“œ κ°­, 계면 및 κ±°μΉ κΈ° λ‘κ»˜, 필름 μ‘°μ„±, 깊이 및 면적에 λ”°λ₯Έ 균일성 λ“±κ³Ό 같은 λ‹€μ–‘ν•œ 박막 νŠΉμ„±μ„ νŠΉμ„±ν™”ν•  수 있게 ν•©λ‹ˆλ‹€.

λΆ„κ΄‘ 타원계에 μ ν•©ν•œ μž¬λ£Œλ‘œλŠ” λ°˜λ„μ²΄, μœ μ „μ²΄, κ³ λΆ„μž, 유기물, κΈˆμ† 등이 μžˆμŠ΅λ‹ˆλ‹€. 타원츑정법은 고체-앑체 λ˜λŠ” 앑체-앑체 계면을 μ—°κ΅¬ν•˜λŠ” 데도 μ‚¬μš©λ  수 μžˆλ‹€.

HORIBA λΆ„κ΄‘ νƒ€μ›κ³„λŠ” ν˜μ‹ μ μΈ κΈ°μˆ μ„ μ‚¬μš©ν•˜μ—¬ 기계적 μ›€μ§μž„ 없이 고주파 νŽΈκ΄‘ λ³€μ‘° 츑정을 μˆ˜ν–‰ν•˜μ—¬ κΈ°μ‘΄ 타원계에 λΉ„ν•΄ λΉ λ₯΄κ³  넓은 λ²”μœ„μ™€ 높은 νŠΉμ„± 정밀도λ₯Ό μ œκ³΅ν•©λ‹ˆλ‹€.

λΉ„λ””μ˜€ 및 μ›Ή μ„Έλ―Έλ‚˜

νŠΈλ ˆμ΄λ‹μš© λΉ„λ””μ˜€λ₯Ό λ³΄λ©΄μ„œ λΆ„κ΄‘ 타원 츑정에 λŒ€ν•΄ μžμ„Ένžˆ μ•Œμ•„λ³Έ λ’€,  μ›Ή μ„Έλ―Έλ‚˜ μ»¬λ ‰μ…˜μ„ μ‚¬μš©ν•˜μ—¬ μ‘μš© ν”„λ‘œκ·Έλž¨μ— λŒ€ν•΄ μ•Œμ•„λ³΄μ‹­μ‹œμ˜€.

νŠΈλ ˆμ΄λ‹

HORIBA의 λΆ„κ΄‘ 타원 μΈ‘μ • μ „λ¬Έκ°€κ°€ λ³΄μœ ν•˜κ³  계신 HORIBA Scientific κΈ°κΈ°λ₯Ό μ΅œλŒ€λ‘œ ν™œμš©ν•  수 μžˆλ„λ‘ κ°€μ΄λ“œ 및 μ–΄λ“œλ°”μ΄μŠ€λ₯Ό μ œκ³΅ν•©λ‹ˆλ‹€. ν‘œλ³Έ 뢄석에 λŒ€ν•œ μžμ‹ κ°κ³Ό κ²½ν—˜μ„ μŒ“μ„ 수 μžˆμŠ΅λ‹ˆλ‹€.

기술 및 FAQ

λΆ„κ΄‘ 타원은 박막 μƒ˜ν”Œμ—μ„œ λΉ„μŠ€λ“¬νžˆ λ°˜μ‚¬λ˜λ©΄μ„œ λΉ›μ˜ νŽΈκ΄‘ μƒνƒœ λ³€ν™”λ₯Ό 기반으둜 ν•˜λŠ” λΉ„νŒŒκ΄΄, 비접촉 및 λΉ„μΉ¨μŠ΅ κ΄‘ν•™ κΈ°λ²•μž…λ‹ˆλ‹€. 이 κΈ°μˆ μ— λŒ€ν•œ μžμ„Έν•œ λ‚΄μš©μ€ μ•„λž˜ λ§ν¬μ—μ„œ ν™•μΈν•˜μ„Έμš”.

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μ œν’ˆ 문의

HORIBAμ œν’ˆμ˜ μžμ„Έν•œ 정보λ₯Ό μ›ν•˜μ‹œλ©΄, μ•„λž˜μ˜ 양식에 λ‚΄μš©μ„ μž…λ ₯을 λΆ€νƒλ“œλ¦½λ‹ˆλ‹€.

* λŠ” ν•„μˆ˜μž…λ ₯ν•­λͺ©μž…λ‹ˆλ‹€.

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