CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

Keywords: 3D NAND, SiN(Silicon nitride), Etching, Hot phos(Hot phosphoric acid),

In 3D NAND manufacturing process, dozens of layers of SiO2 and SiN are deposited, and the SiN layer is selectively removed using hot phos.
In this process, the desired etching rate can be achieved by controlling the concentration and temperature of the chemical solution.
Previous products have difficulty to measure high temperature chemicals, but the CS-620F is able to measure at high temperatures  up to 170 C degrees. 
Continuous Measurements are made using absorption spectroscopy, which requires less maintenance and fewer consumables versus other methods. 

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Key features

High concentration phosphoric acid up to 92% can be measured

No cooling mechanism and cooling time is needed.
Direct measurement is possible without cooling high-temperature phosphoric acid (140 to 170°C) in the circulation line.

PFA is used in the sample wetted area to reduce contamination risk.

Contributes to significant reduction in equipment downtime by adopting semi-annual background correction cycles.

Contributes to faster concentration feedback control by updating measured data every 3 seconds

Stability

▶ Measurement results
The sample (actual solution) measured for 1 hour shows exellent stability.

▶ Measurement conditions
Measurement Cycle: every 3 seconds   Measurement time: 1 hour   Moving average: 16 times 
Sample concentration (Initial Sample Concentration)   H3PO4: 92.2%   H2O: 7.8%   Sample temperature: 141°c

Recommend Products


CS-700
High Precision, High Stability
Chemical Concentration Monitor

CS-600F
Fiber Optic Type Chemical
Concentration Monitor

HF HD-960L
Dissolved Oxygen Monitor
in Low Concentration
Product nameCHEMICAL SOLUTION MONITOR
ModelCS-620F
Measurement principleAbsorption spectroscopic method
Calculation principleTemperature compensation type multivariate analysis
SampleH3PO4/H2O

Measurable range
Repeatability

 ComponentMeasurable range
(mass%)
Repeatability
(mass%)
Analog output
range(mass%)
1st solutionH3PO485.00-92.00+/-0.1085.00-100.00
H2O8.0-15.0+/-0.30.0-15.0
・ Repeatability is defined by maximum error from average (1 hour).
・ In the case of low temperature measurement (140°C) and high temperature measurement (170°C) with the same chemical,
there is possibility of discrepancy (Maximum +/- 0.30%).
Conditions
of Measurement
1) Measurement interval: Approx. 3 sec. (minimum)
2) Moving average: 16 times
Connection fitting size1 inch or 3/4 inch
Sample conditionSample temperature: 140 to 170°C
Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour)
Input pressure: 0.2 MPa or less
Pressure fluctuation: 0.02 MPa or less
Flow rate: 1 to 30 L/min
Air(for operation and purge)Connection port: 4 mm O.D. quick joint
Pressure: 0.2 MPa ± 0.02 MPa
Power source100 to 230 V AC (Single-Phase), 50/60 Hz
Power consumptionApprox.85 VA (Transient electric current at the time of the start is excluded)
CommunicationParallel I/O, RS-232C, Analog output
Dimension(Monitor) 200 (W) × 308 (D) × 78 (H) mm
(Lamp unit) 200 (W) × 262 (D) × 100 (H) mm
(Sample cell) 240 (W) × 209 (D) × 205 (H) mm
Weight(Monitor) Approx.3.6 kg
(Lamp unit) Approx.2.8 kg
(Sample cell) Approx.3.0 kg
Ambient temperature(Monitor, Lamp unit) 20 to 30°C
(Optical fiber, Sample cell) 20 to 100°C
* Sudden temperature change should be avoided, within +/- 1°C/1hour
Ambient humidity(Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)
Slanting angle of installation(Monitor, Lamp unit) Within +/-1 degree
(Sample cell) Please install so that air bubbles do not stay up.
Optical fiberLength: 5 m, Bend radius: R150 mm

 

Semiconductor BEOL CMP in Semiconductor Manufacturing Process
Semiconductor BEOL CMP in Semiconductor Manufacturing Process

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

CM-200A/210A
More CM-200A/210A

Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor

CS-100 Series
More CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-131
More CS-131

High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

CS-137
More CS-137

BHF Concentration Monitor

CS-139E
More CS-139E

High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

CS-150
More CS-150

SPM Monitor

CS-153
More CS-153

FPM Monitor

CS-153N
More CS-153N

HF/HNO3 Monitor

CS-600F
More CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-700
More CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
More CS-900

Non-Contact Chemical Concentration Monitor

HE-200C
More HE-200C

Industrial electric conductivity meter (Four-Wire Analyzer)

HE-200R
More HE-200R

Industrial electric resistivity meter (Four-Wire Analyzer)

HE-300C
More HE-300C

Industrial electric conductivity meter (Two-Wire Transmitter)

HE-300R
More HE-300R

Industrial electric resistivity meter (Two-Wire Transmitter)

HE-480C
More HE-480C

Industrial conductivity meter (low concentration type)

HE-480C-GC
More HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480R
More HE-480R

Industrial resistivity meter

HE-480R(W)
More HE-480R(W)

Industrial resistivity meter

HE-960CA
More HE-960CA

Citric Acid Monitor

HE-960H-TM
More HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
More HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
More HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
More HE-960LC

Carbon Sensor Conductivity Meter

HE-960R-GC(W)
More HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HE-960RW
More HE-960RW

Industrial resistivity meter

HE-960RW-GC(W)
More HE-960RW-GC(W)

2-Channel Resistivity Meter

HE-960TM
More HE-960TM

TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

HF HD-960L
More HF HD-960L

Dissolved Oxygen Monitor in Low Concentration

HF-960EM
More HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
More HF-960H

HF / HCl Concentration Monitor

HF-960M
More HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-SP-CU
More HF-SP-CU

2-channel High Precision HF Concentration Monitor

HP-480(W)
More HP-480(W)

Industrial pH meter

HZ-960
More HZ-960

Dissolved Ozone Monitor

SC-2 Concentration Monitor, CS-152
More SC-2 Concentration Monitor, CS-152

Semiconductor process monitoring for SC-2 process

SLIA-300
More SLIA-300

Highly Sensitive Silica Monitor

UP-100
More UP-100

Micro Volume pH Monitor

CS-100 Series
More CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-131
More CS-131

High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

CS-137
More CS-137

BHF Concentration Monitor

CS-139E
More CS-139E

High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

CS-150
More CS-150

SPM Monitor

CS-153
More CS-153

FPM Monitor

CS-153N
More CS-153N

HF/HNO3 Monitor

CS-600F
More CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-700
More CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
More CS-900

Non-Contact Chemical Concentration Monitor

FES-310L
More FES-310L

Sanitary Conductivity Sensor (Flow Through type)

FS-01FC-SL Series
More FS-01FC-SL Series

Sanitary Conductivity Sensor (Flow Through type) for Low Concentrations

Gratings - OEM Diffraction Grating
More Gratings - OEM Diffraction Grating

OEM gratings design and production capabilities

HC-200F (Four-Wire Analyzer)
More HC-200F (Four-Wire Analyzer)

Industrial simplified fluoride ion concentration meter

HC-200NH
More HC-200NH

Ammonia Nitrogen Meter

HC-300F (Two-Wire Transmitter)
More HC-300F (Two-Wire Transmitter)

Industrial simplified fluoride ion concentration meter

HD-200
More HD-200

Industrial dissolved oxygen analyzer (Four-Wire Analyzer)

HD-200FL
More HD-200FL

Industrial dissolved oxygen analyzer (Four-Wire Analyzer)

HD-300
More HD-300

Industrial dissolved oxygen analyzer (Two-Wire Transmitter)

HD-480
More HD-480

Industrial dissolved oxygen analyzer (The Slim48 series)

HE-200C
More HE-200C

Industrial electric conductivity meter (Four-Wire Analyzer)

HE-200H (Four-Wire Analyzer)
More HE-200H (Four-Wire Analyzer)

Industrial electric conductivity meter

HE-200R
More HE-200R

Industrial electric resistivity meter (Four-Wire Analyzer)

HE-300C
More HE-300C

Industrial electric conductivity meter (Two-Wire Transmitter)

HE-300R
More HE-300R

Industrial electric resistivity meter (Two-Wire Transmitter)

HE-480C
More HE-480C

Industrial conductivity meter (low concentration type)

HE-480C-GC
More HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
More HE-480H

Industrial conductivity meter (high concentration type)

HE-480R
More HE-480R

Industrial resistivity meter

HE-480R(W)
More HE-480R(W)

Industrial resistivity meter

HE-960CA
More HE-960CA

Citric Acid Monitor

HE-960CW
More HE-960CW

2-channel Sanitary Conductivity Meter (Low Concentration type)

CS-100 Series
More CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-131
More CS-131

High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

CS-137
More CS-137

BHF Concentration Monitor

CS-139E
More CS-139E

High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

CS-150
More CS-150

SPM Monitor

CS-153
More CS-153

FPM Monitor

CS-153N
More CS-153N

HF/HNO3 Monitor

CS-600F
More CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-700
More CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
More CS-900

Non-Contact Chemical Concentration Monitor

H1034B
More H1034B

OEM Imaging Scanning Spectrometer/Monochromator

HF-960M
More HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HU-200SS
More HU-200SS

Industrial MLSS meter (Four-Wire Analyzer)

HZ-960
More HZ-960

Dissolved Ozone Monitor

OPSA-150
More OPSA-150

Organic Pollutant Monitor

SC-2 Concentration Monitor, CS-152
More SC-2 Concentration Monitor, CS-152

Semiconductor process monitoring for SC-2 process

TPNA-500
More TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

VS70-CCD-HD
More VS70-CCD-HD

High Dynamic Range Mini-Spectrometer

VS70-CCD-HS
More VS70-CCD-HS

High Speed Miniature CCD Spectrometer

VS70-PDA
More VS70-PDA

Highest SNR PDA Mini-Spectrometer

VUV Transmission
More VUV Transmission

Use of H20UVL for VUV transmission