SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Controller

The SEC-Z700S Series is equipped with new developed thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of gas delivery systems.

A new high-performance function provides a simplified gas supply system. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations.

The SEC-Z700S Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. Flow rate output, temperature and pressure readings are provided.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

Features
Specifications

Basic Features

Multi Gas / Multi Range function. The gas type and full scale flow rate can be changed by the customer
Stable control of the gas flow without effect by upstream and downstream pressure fluctuations
On board Multi display
Ultra clean design - metal diaphragm, all stainless SUS-316L and polished surface treatment (standard)
Compact size Same fitting to fitting dimension up to 50 SLM
Signal compatibility: EtherCAT, DeviceNet Model

Key Features

Warranty 1% Set Point high accuracy (Flow rate ≥5%)
High repeatability (≤±0.15% Set Point/Flow rate ≥5%)
Wide range control (0.5-100% Full Scale)
Tunable response (300ms≦t≦1000ms)
High operation temperature (15-60℃)
Low seat leak performance (≤0.1% Full Scale/Bin#01-#06)
High corrosion resistance design

Model		*SEC-Z714SMG ^10/ SEC-Z717SMG ^11*			*SEC-Z724SMG ^10 / SEC-Z727SMG ^11*
Full-scale flow rate (N2 conversion flow rate)		MR.MG number #01 : 30 SCCM	MR.MG number #02 : 100 SCCM #03 : 300 SCCM #04 : 1 SLM #05 : 3 SLM	MR.MG number #06 : 10 SLM	MR.MG number #07 : 30 SLM #08 : 50 SLM
Flow rate accuracy 1 2		≤± 1.0 %S.P. (Flow rate ≥ 5 %) ≤± 0.05 %F.S. (Flow rate < 5 %)
Linearity *1		≤± 0.5 %F.S.
Repeatability 1 3		≤± 0.15 %S.P. (Flow rate ≥ 5 %) ≤± 0.0075 % F.S. (Flow rate < 5 %)
Zero point temperature effect		≤± 0.01 %F.S./℃
Span temperature effect		≤± 0.05 %F.S./℃
Zero point output stability *4		≤± 0.3 %F.S./year
Flow rate control range		0.5-100 %F.S. Auto close function : ≤ 0.25 %F.S.
Step-up flow response time *5		450 ± 30 ms (0 %F.S. → 5 %F.S. < T ≤ 100 %F.S.) ≤ 600 ms (0 %F.S. → 2 %F.S. < T ≤ 5 %F.S.) ≤ 1 s (0 %F.S. → 0.5 → F.S. < T < 2 → F.S.)
Step down flow response time *5		450 ± 30 ms (100 %F.S. → 10 %F.S. < T ≤ 80 %F.S.) ≤2 s (100 %F.S. → 0.5 %F.S. < T ≤ 10 %F.S.) ≤200 ms (100 → F.S. → 0 %F.S. (Valve closed))
Flow response time adjustment (Tunable Response) 5 6		Tunable range 300 ms ≤ T ≤ 1000 ms (0.3 s ≤ T ≤ 1 s) Adjustment accuracy User specified time ± 50 ms (± 0.05 s)
Supply pressure condition		≤ 450 kPa (G)
Operating differential pressure	max	400 kPa (D)
	min	100 kPa (D) (Supply pressure < 150 kPa (A)) 50 kPa (D) (Supply pressure ≥ 150 kPa (A))		100 kPa (D)	200 kPa (D)
Proof pressure		1 MPa (G)
Flow rate at fully closed control valve *7		≤ 0.1 %F.S.		(N.C.valve) ≤ 0.2 %F.S. (N.O.valve) ≤ 0.5 %F.S.
Pressure transient sensitivity *8		≤± (1.5 %F.S. + 1.5 %S.P.)		≤± 1.0 %F.S.
Pressure measurement accuracy		≤± 3.5 kPa (Measurement range : 0-700 kPa (A))
Operating temperature *9		15-60℃
Temperature measurement accuracy		≤± 2℃ (Measurement range : 15-60℃)
Leak integrity		≤ 5 × 10-12 Pa • m3/s (He)
Valve type		Normally closed : N.C. Normally opend : N.O.
Wetted materials		SUS316 L, Ni-alloy, PFA (Bin#01-#04)
Fitting		1/4 inch VCR equivalent fitting-to-fitting dimension 124 mm 1.125 inch C-Seal Port-to-port dimension 92 mm 1.125 inch W-Seal Port-to-port dimension 92 mm
Communication interface		M12 (5 pin) male connector DeviceNet™protocol 10 RJ45 connector × 2 EtherCAT®protocol 11
Service communication port		φ2.5 port Dedicated RS-485 communication
Power supply		M12 (5 pin) male connector 24 VDC, 7.5 VA Applicable for ODVA standard 10 M8 (5 pin) male connector 24 VDC ± 4 V, 7.5 VA 11
Weight		1.3kg 10 / 1.1kg 11
Mounting orientation		Free
Warm-up operation time		≥ 60 minutes
Storage temperature		0-80℃ (Non condensing)

*1: Value applicable to a calibration gas (N2) or the gas types measured with our benchmark equipment. *2: Flow rate accuracy with the ambient temperature at 23 ± 2℃ (in compliance with SEMI E56-0309). *3: Complies with
"repeatability" as defined by SEMI E56-0309. *4: Zero point output stability in compliance with SEMI E69-0298. *5: The response time is defined as the time that it takes for the product's flow rate output to reach 98 % of the amount of
the change set for the flow rate. For any change in flow rate control to 0 %F.S. (valve closed), the response time is defined as the time it takes for the product's flow rate output to reach 0.5 %F.S. *6: The value in our conditions as
based on the use of a calibration gas (N2). *7: Flow rate when the control valve is fully closed and a calibration gas (N2) is supplied at 450 kPa (G). *8: Flow rate variation amount where a 2 psi pressure change (in compliance with
SEMI F64-0701) occurs in a 1second period when flow rate control is applied between 5 %F.S. and 100 %F.S. in our conditions as based on the use of a calibration gas (N2). *9: The product's temperature output constitutes the
benchmark. The product's temperature may rise higher than the environmental temperature if a source of heat exists in the vicinity of the product or if multiple units of the product have been installed in close proximity to each other.
*10: DeviceNet™ communication model. *11: EtherCAT® communication model.

In notation of pressure unit, (D) shows differential pressure, (G) shows gauge pressure, (A) shows absolute pressure. ???? SCCM, SLM are symbols representing the gas flow rate (ml/min, l/min, at 0℃ 101.3 kPa).
% F.S.is the percentage of the set full scale flow rate. % S.P. is a percentage of the set flow rate setting.