Plasma Emission Control and Process Gas Monitoring for Dry Coating Process in Functional Glass Manufacturing

HORIBA is one of the world's largest gas and liquid mass flow controller manufacturers, with a range of analogue, digital and high temperature mass flow controllers along with the point of use liquid source vaporization control and delivery systems.

HORIBA can deliver the critical control needed for the success in your coating industry manufacturing lines such as Chemical vapour deposition (CVD), Atomic layer deposition (ALD), metal organic chemical vapour deposition (MOCVD), PVD (physical vapour deposition), Plasma enhanced chemical vapour deposition (PECVD) and Diamond layer or Diamond layer coating (DLC). We offer a comprehensive range of fluid control and process monitoring to improve yield, increase throughput and add value to your Coating Process.

HORIBA has one of the world’s smallest quadrupole mass spectrometers allowing it to operate at a much higher pressures (1 Pa) than the larger traditional systems. This results in a reduction in the need for additional pumping equipment.

Related Products

EV 2.0 Series
EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

EV-140C
EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

IR-300
IR-300

Vapor Concentration Monitor

IR-400
IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

LEM Series
LEM Series

Camera Endpoint Monitor based on Real Time Laser Interferometry

Micropole System QL Series
Micropole System QL Series

Quadrupole Mass Analyzer

RU-1000
RU-1000

Plasma Emission Controller

VCC-100
VCC-100

Vapor Concentration Controller

VG-200S
VG-200S

Capacitance Manometer

Request for quotation

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.