IR-300

Vapor Concentration Monitor IR-300

Vapor Concentration Monitor

The Metal-Organic Chemical Vapor Deposition (MOCVD) process is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber by controlling the temperature, pressure and the carrier gas flow rate (bubbling method). The in-line IR-300 Series measures and reports the precursor concentration in real time giving the user the following benefits:

  • Optimise process control to produce more high-grade devices
  • Improve device yield and reduce scrap
  • Improve reproducibility
  • Know when a bubbler will require exchanging
  • Extend MTTA
  • Reduce unplanned interventions
  • Reduce valuable precursor waste
Segment: Semiconductor
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • Real-time monitoring
    Fast response and excellent repeatability allow real time tracking of changes in vapor concentration
  • Multi-calibration Curve Function (Optional)
    Allows for concentration measurement of up to 3 chemicals or ranges
  • Multi-display Function
    The multi-display function on the top of the IR-300 unit gives the user onsite checking capability of concentration monitoring and precursor supply line status
  • Communications Function
    Connectivity through DeviceNet™, RS485 and analog communications
  • Simple, Compact Design
    With a face-to-face size of 124 mm, the unit’s compact and mount-orientation-free design allows for easy integration

 

A high optical intensity and long-life light source combined with high-speed signal processing enables the IR-300 Series to achieve faster, more repeatable responses to changes in precursor concentration. These features give the user a true understanding of the actual process though real-time inline concentration measurement.

Measurement Example of MOCVD Precursor

■Experiment flow sheet

■Monitoring of precursor concentration change

Here is an example in which the concentration of the supplied precursor—which changes due to adjustment of the pressure in the bubbler by the back pressure regulator—was monitored in real time.

 

Measurement Techniques

Reliable, High-performance
Non-dispersive Infrared Absorptiometry (NDIR)

The infrared absorptiometry method employed by the IR-300 Series uses the principle of measuring the absorption of gas molecules in infrared light emitted from an infrared light source. A sample output from a sample that has absorbed the gas being measured is compared to a reference output with no absorbance, and the result is converted into a gas concentration. The use of this double beam method enables long-term, stable measurement results to be obtained.

 

The optical system is made up of a light source, gas cell and double beam detectors. The stability of the double beam detector has been proven over a period of more than 40 years.

Specifications (Last updated in August, 2022) 

*1 Please contact HORIBA STEC regarding chemical and/or full-scale concentration other than those shown above.

*2 The specification is guaranteed under the standard conditions of HORIBA STEC.

      Ambient temperature: 23±2°C, Gas cell temperature: 60°C, Measurement flow rate: 1000 SCCM, Calibration gas: C3H8 balanced in N2 at 105 kPa(A)

*3 Accuracy is based on concentration of the calibration gas.

*4 Gas replacement time (Td: time delay) is not included in the response.

     The typical Td in our inspection equipment is approx. 1.0 second.

     The response without moving average is approx. 1.5 second. It is necessary to change # of moving average of firmware settings by digital communication.

*5 Recommended operating condition. The performance is guaranteed on the standard condition.

*6 Required specification of temperature controller:

     Control cycle: 1 second or less, PID control with auto tuning function

*7 Optional wetted material: Body: SUS 316L, Gas cell optical window: Sapphire, Ni, Al

*8 The height of IR-315 is 145mm

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