HORIBA Jobin Yvon with its partners is proud to announce the implementation of an in-situ UVISEL Spectroscopic Ellipsometer on the AUTh 6" Black magic CVD tool from Aixtron Ltd within the European Project GLADIATOR.

11. Februar 2016

The GLADIATOR project (Graphene Layers: Production, Characterization and Integration)

The GLADIATOR project (Graphene Layers: Production, Characterization and Integration) is driven by the vision of developing an approach to the production of high quality graphene (transmittance ≤ 90%, sheet resistance ≥ 10 Ohm/sq.) both on a large scale and at a low cost. For future CVD graphene manufacture, it is essential to monitor in-situ and real-time the quality during the graphene growth process.

Accordingly, the UVISEL Spectroscopic Ellipsometer has been adapted to the AUTh CVD 6’’ graphene system. AUTh together with OET P.C. have shown for the first time the growth differentiation between mono- and multilayers graphene by in-situ Spectroscopic Ellipsometry. The UVISEL uses the phase modulation technology providing an ultra-fast acquisition time in FUV-visible spectral range, whilst delivering high precision measurement and best signal to noise ratio, especially necessary for research and development on graphene thin film.

Although the Spectroscopic Ellipsometry technique is very powerful, the project partners continue to work on the more challenging adaptation of an in-situ Raman Spectrometer to acquire complementary information on surface chemistry and the graphene quality during its growth. The project is now just over half-way through its 42 month duration and has already achieved very promising and interesting results, in accord with its ambitious schedule.